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Reel/Frame:043169/0711   Pages: 4
Recorded: 08/02/2017
Attorney Dkt #:TEA-092US2CON/ELECP108USA
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/25/2020
Application #:
15666765
Filing Dt:
08/02/2017
Publication #:
Pub Dt:
11/16/2017
Title:
METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFICATION SYSTEM FOR SEMICONDUCTOR MANUFACTURING
Assignors
1
Exec Dt:
11/07/2012
2
Exec Dt:
10/29/2012
3
Exec Dt:
10/29/2012
4
Exec Dt:
10/29/2012
5
Exec Dt:
10/29/2012
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
AKASAKA BIZ TOWER
TOKYO, JAPAN 107-6325
Correspondence name and address
AMIN, TUROCY & WATSON, LLP
127 PUBLIC SQUARE
57TH FLOOR, KEY TOWER
CLEVELAND, OH 44114

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