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Reel/Frame:043546/0955   Pages: 6
Recorded: 09/11/2017
Attorney Dkt #:01213GEN
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 38
1
Patent #:
6354918
Issue Dt:
03/12/2002
Application #:
09335778
Filing Dt:
06/18/1999
Title:
APPARATUS AND METHOD FOR POLISHING WORKPIECE
2
Patent #:
6569752
Issue Dt:
05/27/2003
Application #:
09522820
Filing Dt:
03/10/2000
Title:
SEMICONDUCTOR ELEMENT AND FABRICATING METHOD THEREOF
3
Patent #:
6667238
Issue Dt:
12/23/2003
Application #:
09545504
Filing Dt:
04/07/2000
Title:
POLISHING METHOD AND APPARATUS
4
Patent #:
6413154
Issue Dt:
07/02/2002
Application #:
09582845
Filing Dt:
09/11/2000
Title:
POLISHING APPARATUS
5
Patent #:
6645053
Issue Dt:
11/11/2003
Application #:
09622638
Filing Dt:
11/08/2000
Title:
POLISHING APPARATUS
6
Patent #:
6634924
Issue Dt:
10/21/2003
Application #:
09669883
Filing Dt:
09/27/2000
Title:
POLISHING APPARATUS
7
Patent #:
7075072
Issue Dt:
07/11/2006
Application #:
10237986
Filing Dt:
09/10/2002
Publication #:
US20030047682
Pub Dt:
03/13/2003
Title:
DETECTING APPARATUS AND DEVICE MANUFACTURING METHOD
8
Patent #:
7367873
Issue Dt:
05/06/2008
Application #:
10364359
Filing Dt:
02/12/2003
Publication #:
US20040106363
Pub Dt:
06/03/2004
Title:
SUBSTRATE PROCESSING APPARATUS
9
Patent #:
7592586
Issue Dt:
09/22/2009
Application #:
10543151
Filing Dt:
04/18/2006
Publication #:
US20060237646
Pub Dt:
10/26/2006
Title:
MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMPLE BY USING ELECTRONS REFLECTED FROM THE SAMPLE
10
Patent #:
7066787
Issue Dt:
06/27/2006
Application #:
10765147
Filing Dt:
01/28/2004
Publication #:
US20040185751
Pub Dt:
09/23/2004
Title:
SUBSTRATE PROCESSING APPARATUS
11
Patent #:
7212017
Issue Dt:
05/01/2007
Application #:
11019111
Filing Dt:
12/22/2004
Publication #:
US20050199807
Pub Dt:
09/15/2005
Title:
ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS
12
Patent #:
7098457
Issue Dt:
08/29/2006
Application #:
11134330
Filing Dt:
05/23/2005
Publication #:
US20050205783
Pub Dt:
09/22/2005
Title:
ELECTRON BEAM APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME
13
Patent #:
7351969
Issue Dt:
04/01/2008
Application #:
11290688
Filing Dt:
12/01/2005
Publication #:
US20060118719
Pub Dt:
06/08/2006
Title:
ELECTRON BEAM INSPECTION SYSTEM AND INSPECTION METHOD AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
14
Patent #:
7449691
Issue Dt:
11/11/2008
Application #:
11435128
Filing Dt:
05/17/2006
Publication #:
US20060219909
Pub Dt:
10/05/2006
Title:
DETECTING APPARATUS AND DEVICE MANUFACTURING METHOD
15
Patent #:
7744445
Issue Dt:
06/29/2010
Application #:
11665001
Filing Dt:
04/10/2007
Publication #:
US20090017730
Pub Dt:
01/15/2009
Title:
POLISHING APPARATUS AND POLISHING METHOD
16
Patent #:
7352195
Issue Dt:
04/01/2008
Application #:
11723591
Filing Dt:
03/21/2007
Publication #:
US20070200569
Pub Dt:
08/30/2007
Title:
ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS
17
Patent #:
8696924
Issue Dt:
04/15/2014
Application #:
11730891
Filing Dt:
04/04/2007
Publication #:
US20070239309
Pub Dt:
10/11/2007
Title:
Polishing apparatus and polishing method
18
Patent #:
7863580
Issue Dt:
01/04/2011
Application #:
11760235
Filing Dt:
06/08/2007
Publication #:
US20080067377
Pub Dt:
03/20/2008
Title:
ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS
19
Patent #:
7411191
Issue Dt:
08/12/2008
Application #:
11806573
Filing Dt:
06/01/2007
Publication #:
US20070235644
Pub Dt:
10/11/2007
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
20
Patent #:
7767472
Issue Dt:
08/03/2010
Application #:
11882398
Filing Dt:
08/01/2007
Publication #:
US20070287364
Pub Dt:
12/13/2007
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
21
Patent #:
7952071
Issue Dt:
05/31/2011
Application #:
12162071
Filing Dt:
07/24/2008
Publication #:
US20090026368
Pub Dt:
01/29/2009
Title:
APPARATUS AND METHOD FOR INSPECTING SAMPLE SURFACE
22
Patent #:
7883394
Issue Dt:
02/08/2011
Application #:
12184032
Filing Dt:
07/31/2008
Publication #:
US20080318503
Pub Dt:
12/25/2008
Title:
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
23
Patent #:
8053726
Issue Dt:
11/08/2011
Application #:
12216233
Filing Dt:
07/01/2008
Publication #:
US20090032708
Pub Dt:
02/05/2009
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
24
Patent #:
8078306
Issue Dt:
12/13/2011
Application #:
12289507
Filing Dt:
10/29/2008
Publication #:
US20090111358
Pub Dt:
04/30/2009
Title:
POLISHING APPARATUS AND POLISHING METHOD
25
Patent #:
8554356
Issue Dt:
10/08/2013
Application #:
12311560
Filing Dt:
04/03/2009
Publication #:
US20100015889
Pub Dt:
01/21/2010
Title:
Processing end point detection method, polishing method,and polishing apparatus
26
Patent #:
8368018
Issue Dt:
02/05/2013
Application #:
12506475
Filing Dt:
07/21/2009
Publication #:
US20100019147
Pub Dt:
01/28/2010
Title:
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
27
Patent #:
8274047
Issue Dt:
09/25/2012
Application #:
12537414
Filing Dt:
08/07/2009
Publication #:
US20100032566
Pub Dt:
02/11/2010
Title:
SUBSTRATE SURFACE INSPECTION METHOD AND INSPECTION APPARATUS
28
Patent #:
8124933
Issue Dt:
02/28/2012
Application #:
12538416
Filing Dt:
08/10/2009
Publication #:
US20100019149
Pub Dt:
01/28/2010
Title:
MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMPLE BY USING ELECTRONS EMITTED FROM THE SAMPLE
29
Patent #:
8292694
Issue Dt:
10/23/2012
Application #:
12618033
Filing Dt:
11/13/2009
Publication #:
US20100062691
Pub Dt:
03/11/2010
Title:
SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
30
Patent #:
8506362
Issue Dt:
08/13/2013
Application #:
12667891
Filing Dt:
01/06/2010
Publication #:
US20110003537
Pub Dt:
01/06/2011
Title:
POLISHING APPARATUS AND POLISHING METHOD
31
Patent #:
8388409
Issue Dt:
03/05/2013
Application #:
12700917
Filing Dt:
02/05/2010
Publication #:
US20100151770
Pub Dt:
06/17/2010
Title:
SUBSTRATE POLISHING APPARATUS
32
Patent #:
8568199
Issue Dt:
10/29/2013
Application #:
12897973
Filing Dt:
10/05/2010
Publication #:
US20110081829
Pub Dt:
04/07/2011
Title:
POLISHING ENDPOINT DETECTION APPARATUS
33
Patent #:
8445360
Issue Dt:
05/21/2013
Application #:
13027551
Filing Dt:
02/15/2011
Publication #:
US20110207294
Pub Dt:
08/25/2011
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
34
Patent #:
8641480
Issue Dt:
02/04/2014
Application #:
13036114
Filing Dt:
02/28/2011
Publication #:
US20110217906
Pub Dt:
09/08/2011
Title:
POLISHING APPARATUS AND POLISHING METHOD
35
Patent #:
8368031
Issue Dt:
02/05/2013
Application #:
13243429
Filing Dt:
09/23/2011
Publication #:
US20120032079
Pub Dt:
02/09/2012
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
36
Patent #:
8803103
Issue Dt:
08/12/2014
Application #:
13732897
Filing Dt:
01/02/2013
Publication #:
US20140034831
Pub Dt:
02/06/2014
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
37
Patent #:
10207390
Issue Dt:
02/19/2019
Application #:
14017620
Filing Dt:
09/04/2013
Publication #:
US20140004773
Pub Dt:
01/02/2014
Title:
PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISHING APPARATUS
38
Patent #:
8777694
Issue Dt:
07/15/2014
Application #:
14036321
Filing Dt:
09/25/2013
Publication #:
US20140024294
Pub Dt:
01/23/2014
Title:
POLISHING ENDPOINT DETECTION METHOD
Assignor
1
KABUSHIKI KAISHA TOSHIBA
Exec Dt:
08/29/2017
Assignee
1
TOSHIBA MEMORY CORPORATION
1-1, SHIBAURA 1-CHOME, MINATO-KU,
TOKYO, JAPAN
Correspondence name and address
WENDEROTH, LIND & PONACK, L.L.P.
1030 15TH STREET NW
SUITE 400 EAST
WASHINGTON, DC 20005

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