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Total properties:
35
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09376996
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Filing Dt:
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08/18/1999
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09387705
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Filing Dt:
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08/18/1999
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Title:
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METHOD FOR GRINDING A WAFER BACK
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Patent #:
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Issue Dt:
|
01/15/2002
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Application #:
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09481573
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Filing Dt:
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01/11/2000
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Title:
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POLISHING SLURRY AND POLISHING METHOD
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Patent #:
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Issue Dt:
|
06/25/2002
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Application #:
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09482937
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Filing Dt:
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01/14/2000
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Title:
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WATER-LADEN SOLID MATTER OF VAPOR-PHASE PROCESSED INORGANIC OXIDE PARTICLES AND SLURRY FOR POLISHING AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09484064
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Filing Dt:
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01/18/2000
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Title:
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COMPOSITE PARTICLES AND PRODUCTION PROCESS THEREOF, AQUEOUS DISPERSION, AQUEOUS DISPERSION COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, AND PROCESS FOR MANUFACTURE OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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09531163
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Filing Dt:
|
03/17/2000
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Title:
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AQUEOUS DISPERSION, AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICES, METHOD FOR MANUFACTURE OF SEMICONDUCTOR DEVICES, AND METHOD FOR FORMATION OF EMBEDDED WIRING
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09670547
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Filing Dt:
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09/27/2000
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Title:
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COMPOSITION FOR FILM FORMATION, METHOD OF FILM FORMATION, AND INSULATING FILM
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09756193
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Filing Dt:
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01/09/2001
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Publication #:
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Pub Dt:
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07/19/2001
| | | | |
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Title:
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AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING PROCESS
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|
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Patent #:
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Issue Dt:
|
11/25/2003
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Application #:
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09893961
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Filing Dt:
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06/29/2001
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Publication #:
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Pub Dt:
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02/07/2002
| | | | |
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Title:
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AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING USED FOR POLISHING OF COPPER
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|
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Patent #:
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Issue Dt:
|
08/02/2005
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Application #:
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09932943
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Filing Dt:
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08/21/2001
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Publication #:
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Pub Dt:
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02/28/2002
| | | | |
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Title:
|
SLURRY FOR CHEMICAL MECHANICAL POLISHING AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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|
|
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10112951
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Filing Dt:
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04/02/2002
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Publication #:
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Pub Dt:
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07/24/2003
| | | | |
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Title:
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METHOD OF FORMING COATING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND COATING SOLUTION
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|
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Patent #:
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Issue Dt:
|
11/04/2003
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Application #:
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10286789
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Filing Dt:
|
11/04/2002
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|
Publication #:
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Pub Dt:
|
03/20/2003
| | | | |
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Title:
|
PLASMA PROCESSING METHOD
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|
|
|
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Patent #:
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Issue Dt:
|
03/06/2007
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Application #:
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10402950
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Filing Dt:
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04/01/2003
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Publication #:
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Pub Dt:
|
02/05/2004
| | | | |
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Title:
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PLASMA TREATMENT APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
09/02/2008
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Application #:
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10538064
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Filing Dt:
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03/07/2006
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Publication #:
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Pub Dt:
|
09/28/2006
| | | | |
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Title:
|
METHOD AND DEVICE FOR PLASMA-ETCHING ORGANIC MATERIAL FILM
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|
|
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Patent #:
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Issue Dt:
|
08/08/2006
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Application #:
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10689680
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Filing Dt:
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10/22/2003
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|
Publication #:
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Pub Dt:
|
07/29/2004
| | | | |
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Title:
|
AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/28/2006
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Application #:
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10694890
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Filing Dt:
|
10/29/2003
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|
Publication #:
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Pub Dt:
|
07/08/2004
| | | | |
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Title:
|
AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING PROCESS, PRODUCTION PROCESS OF SEMICONDUCTOR DEVICE AND MATERIAL FOR PREPARING AN AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/31/2006
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Application #:
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10821971
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Filing Dt:
|
04/12/2004
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|
Publication #:
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|
Pub Dt:
|
12/23/2004
| | | | |
|
Title:
|
VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
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|
|
|
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Patent #:
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|
Issue Dt:
|
05/06/2008
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Application #:
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10854142
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Filing Dt:
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05/27/2004
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|
Publication #:
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Pub Dt:
|
01/20/2005
| | | | |
|
Title:
|
PLASMA PROCESSING APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/30/2005
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Application #:
|
10882362
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Filing Dt:
|
07/02/2004
|
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
|
Title:
|
CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHANICAL POLISHING METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/23/2007
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Application #:
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10956365
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Filing Dt:
|
10/04/2004
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|
Publication #:
|
|
Pub Dt:
|
04/21/2005
| | | | |
|
Title:
|
ETCHING METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2010
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Application #:
|
10960538
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Filing Dt:
|
10/08/2004
|
|
Publication #:
|
|
Pub Dt:
|
04/21/2005
| | | | |
|
Title:
|
PLASMA ETCHING METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2007
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Application #:
|
11038479
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Filing Dt:
|
01/21/2005
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|
Publication #:
|
|
Pub Dt:
|
09/22/2005
| | | | |
|
Title:
|
PEELING DEVICE AND PEELING METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/2009
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Application #:
|
11197434
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Filing Dt:
|
08/05/2005
|
|
Publication #:
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|
Pub Dt:
|
12/22/2005
| | | | |
|
Title:
|
PROCESSING METHOD FOR CONSERVATION OF PROCESSING GASES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2011
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Application #:
|
11229841
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Filing Dt:
|
09/20/2005
|
|
Publication #:
|
|
Pub Dt:
|
04/20/2006
| | | | |
|
Title:
|
FILM FORMING SYSTEM AND FILM FORMING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2007
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Application #:
|
11259147
|
Filing Dt:
|
10/27/2005
|
|
Publication #:
|
|
Pub Dt:
|
02/16/2006
| | | | |
|
Title:
|
VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/2010
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Application #:
|
11292353
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Filing Dt:
|
12/02/2005
|
|
Publication #:
|
|
Pub Dt:
|
06/08/2006
| | | | |
|
Title:
|
CAPACITIVE COUPLING PLASMA PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2014
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Application #:
|
12363070
|
Filing Dt:
|
01/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
08/06/2009
| | | | |
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Title:
|
SUBSTRATE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/2012
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Application #:
|
12477332
|
Filing Dt:
|
06/03/2009
|
|
Publication #:
|
|
Pub Dt:
|
09/24/2009
| | | | |
|
Title:
|
CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2013
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Application #:
|
12537766
|
Filing Dt:
|
08/07/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/25/2010
| | | | |
|
Title:
|
CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHANICAL POLISHING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/23/2014
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Application #:
|
12578007
|
Filing Dt:
|
10/13/2009
|
|
Publication #:
|
|
Pub Dt:
|
02/04/2010
| | | | |
|
Title:
|
PLASMA ETCHING UNIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2012
|
Application #:
|
12794028
|
Filing Dt:
|
06/04/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/09/2010
| | | | |
|
Title:
|
SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/2015
|
Application #:
|
13178759
|
Filing Dt:
|
07/08/2011
|
|
Publication #:
|
|
Pub Dt:
|
01/12/2012
| | | | |
|
Title:
|
PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2013
|
Application #:
|
13369970
|
Filing Dt:
|
02/09/2012
|
|
Publication #:
|
|
Pub Dt:
|
10/04/2012
| | | | |
|
Title:
|
SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/08/2014
|
Application #:
|
13420870
|
Filing Dt:
|
03/15/2012
|
|
Publication #:
|
|
Pub Dt:
|
01/24/2013
| | | | |
|
Title:
|
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCRITICAL DRYING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/2015
|
Application #:
|
14222762
|
Filing Dt:
|
03/24/2014
|
|
Publication #:
|
|
Pub Dt:
|
07/24/2014
| | | | |
|
Title:
|
DEPOSIT REMOVAL METHOD
|
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