Total properties:
43
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Patent #:
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Issue Dt:
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04/22/2014
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Application #:
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13423018
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Filing Dt:
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03/16/2012
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Publication #:
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Pub Dt:
|
05/16/2013
| | | | |
Title:
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METHOD FOR CHEMICAL PLANARIZATION AND CHEMICAL PLANARIZATION APPARATUS
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Patent #:
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Issue Dt:
|
12/15/2015
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Application #:
|
13541167
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Filing Dt:
|
07/03/2012
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Publication #:
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Pub Dt:
|
01/10/2013
| | | | |
Title:
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
|
14198668
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Filing Dt:
|
03/06/2014
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Publication #:
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Pub Dt:
|
07/03/2014
| | | | |
Title:
|
METHOD FOR CHEMICAL PLANARIZATION AND CHEMICAL PLANARIZATION APPARATUS
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Patent #:
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|
Issue Dt:
|
01/12/2016
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Application #:
|
14464223
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Filing Dt:
|
08/20/2014
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Publication #:
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Pub Dt:
|
12/31/2015
| | | | |
Title:
|
SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
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|
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Patent #:
|
|
Issue Dt:
|
12/25/2018
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Application #:
|
14479736
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Filing Dt:
|
09/08/2014
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Publication #:
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Pub Dt:
|
04/23/2015
| | | | |
Title:
|
CHUCK CLEANER AND CLEANING METHOD
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|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
14604818
|
Filing Dt:
|
01/26/2015
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Publication #:
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Pub Dt:
|
01/21/2016
| | | | |
Title:
|
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
14610168
|
Filing Dt:
|
01/30/2015
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Publication #:
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|
Pub Dt:
|
03/03/2016
| | | | |
Title:
|
METHOD FOR FORMING INSULATOR FILM ON METAL FILM
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|
Patent #:
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|
Issue Dt:
|
04/18/2017
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Application #:
|
14639084
|
Filing Dt:
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03/04/2015
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Publication #:
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|
Pub Dt:
|
05/05/2016
| | | | |
Title:
|
METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY DEVICE
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|
|
Patent #:
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|
Issue Dt:
|
10/03/2017
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Application #:
|
14828830
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Filing Dt:
|
08/18/2015
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Publication #:
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Pub Dt:
|
10/13/2016
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14843545
|
Filing Dt:
|
09/02/2015
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Publication #:
|
|
Pub Dt:
|
08/18/2016
| | | | |
Title:
|
MULTI-PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
14844356
|
Filing Dt:
|
09/03/2015
|
Publication #:
|
|
Pub Dt:
|
09/22/2016
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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|
Patent #:
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|
Issue Dt:
|
12/12/2017
|
Application #:
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14844469
|
Filing Dt:
|
09/03/2015
|
Publication #:
|
|
Pub Dt:
|
09/22/2016
| | | | |
Title:
|
REFLECTIVE PHOTOMASK, METHOD FOR MANUFACTURING SAME AND PROGRAM FOR MAKING MASK PATTERN
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|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
14940186
|
Filing Dt:
|
11/13/2015
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Publication #:
|
|
Pub Dt:
|
03/10/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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|
Patent #:
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|
Issue Dt:
|
08/23/2016
|
Application #:
|
14958995
|
Filing Dt:
|
12/04/2015
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
Title:
|
SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
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|
Patent #:
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|
Issue Dt:
|
02/27/2018
|
Application #:
|
14985969
|
Filing Dt:
|
12/31/2015
|
Publication #:
|
|
Pub Dt:
|
02/23/2017
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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|
Patent #:
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|
Issue Dt:
|
01/30/2018
|
Application #:
|
14998379
|
Filing Dt:
|
12/28/2015
|
Publication #:
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|
Pub Dt:
|
03/16/2017
| | | | |
Title:
|
Mask and pattern forming method
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Patent #:
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|
Issue Dt:
|
06/11/2019
|
Application #:
|
15001991
|
Filing Dt:
|
01/20/2016
|
Publication #:
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|
Pub Dt:
|
03/02/2017
| | | | |
Title:
|
SEMICONDUCTOR MEMORY DEVICE HAVING AIR GAP
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Patent #:
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|
Issue Dt:
|
10/09/2018
|
Application #:
|
15046841
|
Filing Dt:
|
02/18/2016
|
Publication #:
|
|
Pub Dt:
|
03/09/2017
| | | | |
Title:
|
INSPECTION DEVICE, INSPECTION METHOD, AND IMAGE PROCESSING PROGRAM
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|
Patent #:
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|
Issue Dt:
|
01/01/2019
|
Application #:
|
15048120
|
Filing Dt:
|
02/19/2016
|
Publication #:
|
|
Pub Dt:
|
03/02/2017
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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|
Patent #:
|
|
Issue Dt:
|
08/22/2017
|
Application #:
|
15061470
|
Filing Dt:
|
03/04/2016
|
Publication #:
|
|
Pub Dt:
|
03/16/2017
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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|
Patent #:
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|
Issue Dt:
|
11/05/2019
|
Application #:
|
15069360
|
Filing Dt:
|
03/14/2016
|
Publication #:
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|
Pub Dt:
|
03/16/2017
| | | | |
Title:
|
DUST COLLECTION APPARATUS AND DUST COLLECTION SYSTEM
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|
Patent #:
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Issue Dt:
|
07/10/2018
|
Application #:
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15069482
|
Filing Dt:
|
03/14/2016
|
Publication #:
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|
Pub Dt:
|
02/09/2017
| | | | |
Title:
|
EUV MASK AND METHOD FOR MANUFACTURING SAME
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|
Patent #:
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|
Issue Dt:
|
03/27/2018
|
Application #:
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15069534
|
Filing Dt:
|
03/14/2016
|
Publication #:
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|
Pub Dt:
|
03/16/2017
| | | | |
Title:
|
PATTERN DATA GENERATION METHOD, PATTERN DATA GENERATION DEVICE, AND MASK
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|
Patent #:
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|
Issue Dt:
|
06/12/2018
|
Application #:
|
15071006
|
Filing Dt:
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03/15/2016
|
Publication #:
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Pub Dt:
|
04/06/2017
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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11/28/2017
|
Application #:
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15131704
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Filing Dt:
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04/18/2016
|
Publication #:
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Pub Dt:
|
06/15/2017
| | | | |
Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
|
09/05/2017
|
Application #:
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15133523
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Filing Dt:
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04/20/2016
|
Publication #:
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|
Pub Dt:
|
06/15/2017
| | | | |
Title:
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SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
|
01/21/2020
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Application #:
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15195482
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Filing Dt:
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06/28/2016
|
Publication #:
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Pub Dt:
|
06/29/2017
| | | | |
Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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03/28/2017
|
Application #:
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15213537
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Filing Dt:
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07/19/2016
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Publication #:
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Pub Dt:
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11/10/2016
| | | | |
Title:
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SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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08/29/2017
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Application #:
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15225491
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Filing Dt:
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08/01/2016
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Publication #:
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Pub Dt:
|
11/24/2016
| | | | |
Title:
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APPARATUS FOR MANUFACTURING TEMPLATE AND METHOD FOR MANUFACTURING TEMPLATE
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Patent #:
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Issue Dt:
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05/22/2018
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Application #:
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15249970
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Filing Dt:
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08/29/2016
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Publication #:
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Pub Dt:
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03/16/2017
| | | | |
Title:
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REFLECTIVE MASK AND METHOD FOR MANUFACTURING REFLECTIVE MASK
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Patent #:
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Issue Dt:
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05/01/2018
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Application #:
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15251554
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Filing Dt:
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08/30/2016
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Publication #:
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Pub Dt:
|
03/16/2017
| | | | |
Title:
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ELECTRON BEAM IRRADIATION DEVICE
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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15257138
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Filing Dt:
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09/06/2016
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Publication #:
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Pub Dt:
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07/20/2017
| | | | |
Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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01/16/2018
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Application #:
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15257406
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Filing Dt:
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09/06/2016
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Publication #:
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Pub Dt:
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10/19/2017
| | | | |
Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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04/23/2019
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Application #:
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15258275
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Filing Dt:
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09/07/2016
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Publication #:
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Pub Dt:
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09/14/2017
| | | | |
Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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10/09/2018
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Application #:
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15258559
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Filing Dt:
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09/07/2016
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Publication #:
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Pub Dt:
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10/19/2017
| | | | |
Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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06/06/2017
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Application #:
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15258675
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Filing Dt:
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09/07/2016
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Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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10/02/2018
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15267924
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Filing Dt:
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09/16/2016
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Publication #:
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Pub Dt:
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11/23/2017
| | | | |
Title:
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15298807
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Filing Dt:
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10/20/2016
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Publication #:
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Pub Dt:
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02/09/2017
| | | | |
Title:
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SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
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01/09/2018
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Application #:
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15427676
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Filing Dt:
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02/08/2017
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Publication #:
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Pub Dt:
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05/25/2017
| | | | |
Title:
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SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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11/27/2018
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Application #:
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15440025
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Filing Dt:
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02/23/2017
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Publication #:
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Pub Dt:
|
06/08/2017
| | | | |
Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY DEVICE
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Patent #:
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Issue Dt:
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05/07/2019
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Application #:
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15454618
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Filing Dt:
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03/09/2017
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Publication #:
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Pub Dt:
|
09/14/2017
| | | | |
Title:
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NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
15456033
|
Filing Dt:
|
03/10/2017
|
Publication #:
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|
Pub Dt:
|
09/14/2017
| | | | |
Title:
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NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
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Patent #:
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Issue Dt:
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11/28/2017
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Application #:
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15460438
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Filing Dt:
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03/16/2017
|
Publication #:
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|
Pub Dt:
|
09/21/2017
| | | | |
Title:
|
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
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|