Patent Assignment Details
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| Reel/Frame: | 043764/0100 | |
| Pages: | 4 |
| | Recorded: | 10/03/2017 | | |
| Attorney Dkt #: | 024163USA |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/03/2019
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Application #:
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15637772
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Filing Dt:
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06/29/2017
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Publication #:
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Pub Dt:
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01/04/2018
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Title:
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Device To Increase Deposition Uniformity In Spatial ALD Processing Chamber
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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SERVILLA WHITNEY LLC
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33 WOOD AVENUE SOUTH
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SUITE 830
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ISELIN, NJ 08830
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