Total properties:
11
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09838061
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Filing Dt:
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04/18/2001
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Title:
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Actuating mechanism for rotating micro-mirror
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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10810022
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Filing Dt:
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03/25/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Title:
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MICRO GRATING STRUCTURE
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10904188
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Filing Dt:
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10/28/2004
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Publication #:
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Pub Dt:
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02/02/2006
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Title:
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METHOD OF ETCHING CAVITIES HAVING DIFFERENT ASPECT RATIOS
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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10904621
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Filing Dt:
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11/19/2004
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Publication #:
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Pub Dt:
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03/16/2006
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Title:
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METHOD OF FORMING A WAFER BACKSIDE INTERCONNECTING WIRE
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Patent #:
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Issue Dt:
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10/20/2009
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Application #:
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10977044
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Filing Dt:
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10/29/2004
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Publication #:
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Pub Dt:
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06/09/2005
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Title:
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EXTERNAL CAVITY TUNABLE LASER SYSTEM FORMED FROM MEMS CORNER MIRROR
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11426013
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Filing Dt:
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06/23/2006
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Publication #:
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Pub Dt:
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09/20/2007
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Title:
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METHOD FOR WAFER-LEVEL PACKAGE
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Patent #:
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Issue Dt:
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08/21/2007
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Application #:
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11426017
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Filing Dt:
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06/23/2006
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Title:
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METHOD OF FABRICATING A DIAPHRAGM OF A CAPACITIVE MICROPHONE DEVICE
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Patent #:
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Issue Dt:
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11/24/2009
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Application #:
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12100392
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Filing Dt:
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04/09/2008
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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WAFER-LEVEL PACKAGING CUTTING METHOD CAPABLE OF PROTECTING CONTACT PADS
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Patent #:
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Issue Dt:
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08/02/2011
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Application #:
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12273550
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Filing Dt:
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11/19/2008
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Publication #:
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Pub Dt:
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03/12/2009
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Title:
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INTERPOSER FOR CONNECTING PLURALITY OF CHIPS AND METHOD FOR MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
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10/04/2011
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Application #:
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12326355
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Filing Dt:
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12/02/2008
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Publication #:
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Pub Dt:
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03/19/2009
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Title:
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INTEGRATION MANUFACTURING PROCESS FOR MEMS DEVICE
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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13072879
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Filing Dt:
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03/28/2011
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Publication #:
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Pub Dt:
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07/21/2011
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Title:
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INTEGRATION MANUFACTURING PROCESS FOR MEMS DEVICE
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