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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10260693
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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04/01/2004
| | | | |
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Title:
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JUNCTION CAPACITOR STRUCTURE AND FABRICATION METHOD THEREFOR IN A DUAL DAMASCENE PROCESS
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Patent #:
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Issue Dt:
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10/10/2006
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Application #:
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10260824
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/10/2003
| | | | |
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Title:
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METHOD OF FORMING A METAL-INSULATOR-METAL CAPACITOR IN AN INTERCONNECT CAVITY
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10261463
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
|
04/01/2004
| | | | |
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Title:
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SILICON-RICH LOW THERMAL BUDGET SILICON NITRIDE FOR INTEGRATED CIRCUITS
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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10263593
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Filing Dt:
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10/03/2002
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Publication #:
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Pub Dt:
|
02/13/2003
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Title:
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APPARATUS FOR REMOVING PHOTORESIST EDGE BEADS FROM THIN FILM SUBSTRATES
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10265856
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Filing Dt:
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10/07/2002
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Publication #:
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Pub Dt:
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04/08/2004
| | | | |
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Title:
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APPARATUS AND METHOD TO IMPROVE THE RESOLUTION OF PHOTOLITHOGRAPHY SYSTEMS BY IMPROVING THE TEMPERATURE STABILITY OF THE RETICLE
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10267810
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Filing Dt:
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10/09/2002
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Publication #:
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Pub Dt:
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04/15/2004
| | | | |
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Title:
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LATERALLY INTERCONNECTING STRUCTURES
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10272767
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Filing Dt:
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10/16/2002
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Title:
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INTER-LAYER INTERCONNECTION STRUCTURE FOR LARGE ELECTRICAL CONNECTIONS
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10274765
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Filing Dt:
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10/21/2002
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Title:
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SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC AND METHOD OF MANUFACTURE THEREOF
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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10288410
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Filing Dt:
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11/05/2002
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Title:
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HIGH PERFORMANCE SI-GE DEVICE MODULE WITH CMOS TECHNOLOGY
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10290437
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Filing Dt:
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11/06/2002
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Title:
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METHOD AND APPARATUS FOR CLEANING DEPOSITED FILMS FROM THE EDGE OF A WAFER
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10300254
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Filing Dt:
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11/20/2002
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Publication #:
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Pub Dt:
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05/29/2003
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Title:
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LDMOS DEVICE HAVING A TAPERED OXIDE
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Patent #:
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Issue Dt:
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11/30/2004
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10300365
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11/20/2002
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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SEMICONDUCTOR DEVICE USING AN INSULATING LAYER HAVING A SEED LAYER
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Issue Dt:
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12/02/2003
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Application #:
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10304631
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11/26/2002
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Publication #:
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Pub Dt:
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04/24/2003
| | | | |
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Title:
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METHOD OF REDUCING SILICONE OXYNITRIDE GATE INSULATOR THICKNESS IN SOME TRANSISTORS OF A HYBRID INTEGRATED CIRCUIT TO OBTAIN INCREASED DIFFERENTIAL IN GATE INSULATOR THICKNESS WITH OTHER TRANSISTORS OF THE HYBRID CIRCUIT
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10304974
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11/26/2002
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Publication #:
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Pub Dt:
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05/27/2004
| | | | |
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Title:
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THICK METAL TOP LAYER
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Patent #:
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NONE
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Application #:
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10306565
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Filing Dt:
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11/27/2002
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Publication #:
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Pub Dt:
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05/27/2004
| | | | |
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Title:
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Process for fabricating a semiconductor device having an insulating layer formed over a semiconductor substrate
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10313333
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
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Title:
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PROCESS TO MINIMIZE POLYSILICON GATE DEPLETION AND DOPANT PENETRATION AND TO INCREASE CONDUCTIVITY
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10317147
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12/11/2002
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Publication #:
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Pub Dt:
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09/18/2003
| | | | |
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Title:
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METHOD OF VERIFYING IC MASK SETS
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Patent #:
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Issue Dt:
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03/16/2004
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10321250
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12/16/2002
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Title:
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SENICONDUCTOR WAFER ARRANGEMENT OF A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10321938
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12/16/2002
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Title:
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DIELECTRIC BARRIER FILMS FOR USE AS COPPER BARRIER LAYERS IN SEMICONDUCTOR TRENCH AND VIA STRUCTURES
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Patent #:
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Issue Dt:
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03/15/2005
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10327283
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12/19/2002
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Title:
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DIAMOND METAL-FILLED PATTERNS ACHIEVING LOW PARASITIC COUPLING CAPACITANCE
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Patent #:
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Issue Dt:
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04/25/2006
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10328333
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12/23/2002
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Title:
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DUAL DAMASCENE INTERCONNECT STRUCTURE WITH IMPROVED ELECTRO MIGRATION LIFETIMES
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Patent #:
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Issue Dt:
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12/06/2005
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Application #:
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10328614
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12/23/2002
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Title:
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LOW K POLYMER E-BEAM PRINTABLE MECHANICAL SUPPORT
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Patent #:
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03/21/2006
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10335470
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12/31/2002
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Title:
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INTERCONNECT ROUTING USING PARALLEL LINES AND METHOD OF MANUFACTURE
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Patent #:
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01/17/2006
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10358968
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02/04/2003
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Title:
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ALTERNATING APERTURE PHASE-SHIFT MASK FABRICATION METHOD
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10360746
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02/05/2003
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Title:
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METHOD FOR PREVENTING BORDERLESS CONTACT TO WELL LEAKAGE
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Patent #:
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Issue Dt:
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10/25/2005
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10368520
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02/18/2003
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Pub Dt:
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08/19/2004
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Title:
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METHODS AND STRUCTURE FOR IC TEMPERATURE SELF-MONITORING
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Patent #:
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06/08/2004
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10368760
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02/18/2003
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Title:
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METHOD FOR CREATING SELF-ALIGNED ALLOY CAPPING LAYERS FOR COPPER INTERCONNECT STRUCTURES
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12/20/2005
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10368811
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02/18/2003
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Pub Dt:
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08/07/2003
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Title:
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SILICON GERMANIUM CMOS CHANNEL
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Patent #:
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12/14/2004
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10383031
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03/06/2003
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Pub Dt:
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08/28/2003
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Title:
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INTEGRATED CIRCUIT ISOLATION SYSTEM
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Patent #:
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03/29/2005
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10383149
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03/06/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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LOCAL INTERCONNECT FOR INTEGRATED CIRCUIT
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Patent #:
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04/04/2006
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10387846
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03/13/2003
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Pub Dt:
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08/14/2003
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Title:
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MICROMAGNETIC DEVICE FOR POWER PROCESSING APPLICATIONS AND METHOD OF MANUFACTURE THEREFOR
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05/24/2005
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10392206
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03/19/2003
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Pub Dt:
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09/23/2004
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METHOD AND INTEGRATED CIRCUIT FOR CAPACITOR MEASUREMENT WITH DIGITAL READOUT
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05/17/2005
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10400252
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03/27/2003
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Pub Dt:
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10/30/2003
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LOW VIA RESISTANCE SYSTEM
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10/04/2005
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10400278
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03/27/2003
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Pub Dt:
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01/29/2004
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Title:
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METAL PLANARIZATION SYSTEM
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08/09/2005
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10400279
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03/27/2003
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Pub Dt:
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10/02/2003
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LOCAL INTERCONNECT
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NONE
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10400281
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03/27/2003
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Pub Dt:
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10/30/2003
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Title:
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Ion beam dual damascene process
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04/05/2005
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10400297
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03/26/2003
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VIA AND METAL LINE INTERFACE CAPABLE OF REDUCING THE INCIDENCE OF ELECTRO-MIGRATION INDUCED VOIDS
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02/28/2006
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10406847
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04/04/2003
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Pub Dt:
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10/07/2004
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Title:
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CHROMELESS PHASE SHIFT MASK
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11/23/2004
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10409423
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04/08/2003
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Pub Dt:
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09/11/2003
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Title:
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ELECTROSTATIC DISCHARGE PROTECTION IN DOUBLE DIFFUSED MOS TRANSISTORS
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11/23/2004
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10409499
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04/08/2003
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Pub Dt:
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09/18/2003
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Title:
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ANALOG CAPACITOR IN DUAL DAMASCENE PROCESS
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05/25/2004
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10410925
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04/09/2003
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MECHANICAL STRESS FREE PROCESSING METHOD
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Issue Dt:
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07/18/2006
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10412867
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04/14/2003
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Pub Dt:
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10/14/2004
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Title:
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MODIFIED BINARY SEARCH FOR OPTIMIZING EFFICIENCY OF DATA COLLECTION TIME
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Issue Dt:
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08/19/2008
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10413051
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04/14/2003
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Pub Dt:
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10/14/2004
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Title:
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HIGH K GATE INSULATOR REMOVAL
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Issue Dt:
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06/06/2006
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10417708
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04/16/2003
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WAFER CHUCKING APPARATUS AND METHOD FOR SPIN PROCESSOR
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Issue Dt:
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01/03/2006
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10418375
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04/18/2003
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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ION RECOIL IMPLANTATION AND ENHANCED CARRIER MOBILITY IN CMOS DEVICE
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Patent #:
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Issue Dt:
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04/18/2006
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10421068
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04/23/2003
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Pub Dt:
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12/02/2004
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PLANARIZATION WITH REDUCED DISHING
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Issue Dt:
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10/28/2008
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10421421
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04/23/2003
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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VISUAL WEAR CONFIRMATION POLISHING PAD
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Patent #:
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Issue Dt:
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09/14/2004
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10422270
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04/24/2003
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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PLASMA TREATMENT OF LOW DIELECTRIC CONSTANT DIELECTRIC MATERIAL TO FORM STRUCTURES USEFUL IN FORMATION OF METAL INTERCONNECTS AND/OR FILLED VIAS FOR INTERGRATED CIRCUIT STRUCTURE
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04/20/2004
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10423096
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04/25/2003
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PAD CONDITIONING MONITOR
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Patent #:
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Issue Dt:
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03/28/2006
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10429376
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05/05/2003
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Publication #:
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Pub Dt:
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11/11/2004
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Title:
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VARIABLE MASK FIELD EXPOSURE
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Patent #:
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Issue Dt:
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02/08/2005
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10435561
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05/09/2003
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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SEMICONDUCTOR DEVICE HAVING A LOW DIELECTRIC CONSTANT DIELECTRIC MATERIAL AND PROCESS FOR ITS MANUFACTURE
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Patent #:
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03/23/2004
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10439863
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05/16/2003
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Title:
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SPLIT-GATE METAL-OXIDE-SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10442533
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Filing Dt:
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05/20/2003
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Title:
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FABRICATION OF TRENCHES WITH MULTIPLE DEPTHS ON THE SAME SUBSTRATE
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10448082
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Filing Dt:
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05/29/2003
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Title:
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INTERCONNECT INTEGRATION
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Patent #:
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Issue Dt:
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02/19/2008
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10452360
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Filing Dt:
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06/02/2003
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Title:
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ELECTROPLATING TOOL FOR SEMICONDUCTOR MANUFACTURE HAVING ELECTRIC FIELD CONTROL
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10453118
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06/03/2003
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Title:
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METHOD OF INCORPORATING NITROGEN INTO METAL SILICATE BASED DIELECTRICS BY ENERGIZED NITROGEN ION BEAMS
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Patent #:
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Issue Dt:
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04/12/2005
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10454027
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06/04/2003
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Publication #:
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Pub Dt:
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12/09/2004
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Title:
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METHOD TO SELECTIVELY IDENTIFY RELIABILITY RISK DIE BASED ON CHARACTERISTICS OF LOCAL REGIONS ON THE WAFER
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10454133
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Filing Dt:
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06/04/2003
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Publication #:
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Pub Dt:
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12/09/2004
| | | | |
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Title:
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INCREASED QUALITY FACTOR OF A VARACTOR IN AN INTEGRATED CIRCUIT VIA A HIGH CONDUCTIVE REGION IN A WELL
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Patent #:
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Issue Dt:
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09/30/2008
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Application #:
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10455489
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Filing Dt:
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06/04/2003
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Publication #:
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Pub Dt:
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12/09/2004
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Title:
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STRAINED-SILICON FOR CMOS DEVICE USING AMORPHOUS SILICON DEPOSITION OR SILICON EPITAXIAL GROWTH
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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10458141
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Filing Dt:
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06/09/2003
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Title:
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COMPOSITE SPACER SCHEME WITH LOW OVERLAPPED PARASITIC CAPACITANCE
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10459072
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Filing Dt:
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06/11/2003
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Title:
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METHOD FOR COMPOSING A DIELECTRIC LAYER WITHIN AN INTERCONNECT STRUCTURE OF A MULTILAYER SEMICONDUCTOR DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10463158
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Filing Dt:
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06/16/2003
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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Integrated inductor in semiconductor manufacturing
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Patent #:
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Issue Dt:
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07/05/2011
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Application #:
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10505197
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Filing Dt:
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06/10/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Title:
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MONITORING AND CONTROL OF A FABRICATION PROCESS
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10513121
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Filing Dt:
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10/27/2004
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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MULTI-LAYER INDUCTOR FORMED IN A SEMICONDUCTOR SUBSTRATE AND HAVING A CORE OF FERROMAGNETIC MATERIAL
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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10598213
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Filing Dt:
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08/21/2006
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Publication #:
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Pub Dt:
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08/14/2008
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Title:
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BIPOLAR JUNCTION TRANSISTOR HAVING A HIGH GERMANIUM CONCENTRATION IN A SILICON-GERMANIUM LAYER AND A METHOD FOR FORMING THE BIPOLAR JUNCTION TRANSISTOR
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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10603041
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Filing Dt:
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06/24/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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DEFINE VIA IN DUAL DAMASCENE PROCESS
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10607116
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Filing Dt:
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06/26/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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METHOD AND APPARATUS TO ADD SLURRY TO A POLISHING SYSTEM
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10607353
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Filing Dt:
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06/26/2003
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Title:
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METHOD AND APPARATUS FOR REMOVING WATER VAPOR AS A BYPRODUCT OF CHEMICAL REACTION IN A WAFER PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10614307
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Filing Dt:
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07/02/2003
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Publication #:
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Pub Dt:
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01/06/2005
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Title:
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INTEGRATED CIRCUIT WITH INDUCTOR HAVING HORIZONTAL MAGNETIC FLUX LINES
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Patent #:
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Issue Dt:
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01/24/2006
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Application #:
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10615558
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Filing Dt:
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07/08/2003
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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HARD MASK REMOVAL
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10619058
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Filing Dt:
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07/14/2003
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Publication #:
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Pub Dt:
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01/22/2004
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Title:
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METHOD OF ION IMPLANTATION FOR ACHIEVING DESIRED DOPANT CONCENTRATION
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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10623082
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Filing Dt:
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07/17/2003
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Title:
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INTER-LAYER INTERCONNECTION STRUCTURE FOR LARGE ELECTRICAL CONNECTIONS
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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10629496
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Filing Dt:
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07/29/2003
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Title:
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SELECTIVE HIGH K DIELECTRICS REMOVAL
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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10631528
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Filing Dt:
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07/31/2003
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Title:
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METHOD AND APPARATUS FOR REDUCING MICROTRENCHING FOR BORDERLESS VIAS CREATED IN A DUAL DAMASCENE PROCESS
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10637385
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Filing Dt:
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08/08/2003
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Publication #:
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Pub Dt:
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02/10/2005
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Title:
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METHOD TO IMPROVE THE CONTROL OF ELECTRO-POLISHING BY USE OF A PLATING ELECTRODE AN ELECTROLYTE BATH
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10638248
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Filing Dt:
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08/08/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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HIGH-DENSITY INTER-DIE INTERCONNECT STRUCTURE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10640530
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Filing Dt:
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08/13/2003
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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Residual oxygen reduction system
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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10641768
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Filing Dt:
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08/14/2003
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Title:
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METHOD AND STRUCTURE FOR CREATING ULTRA LOW RESISTANCE DAMASCENE COPPER WIRING
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10643687
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Filing Dt:
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08/19/2003
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Publication #:
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Pub Dt:
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05/13/2004
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Title:
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HIGH-K DIELECTRIC GATE MATERIAL UNIQUELY FORMED
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Patent #:
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Issue Dt:
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07/17/2007
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Application #:
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10644116
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Filing Dt:
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08/20/2003
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Publication #:
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Pub Dt:
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02/24/2005
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Title:
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WHOLE-WAFER PHOTOEMISSION ANALYSIS
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10646997
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Filing Dt:
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08/22/2003
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Publication #:
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Pub Dt:
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02/24/2005
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Title:
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A SPIRAL INDUCTOR FORMED IN A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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10649140
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Filing Dt:
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08/27/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Title:
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METHOD OF MAKING ULTRA THIN BODY VERTICAL REPLACEMENT GATE MOSFET
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10650395
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Filing Dt:
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08/28/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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HIGH QUALITY FACTOR SPIRAL INDUCTOR THAT UTILIZES ACTIVE NEGATIVE CAPACITANCE
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10652369
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Filing Dt:
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08/29/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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VOLTAGE CONTRAST MONITOR FOR INTEGRATED CIRCUIT DEFECTS
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Patent #:
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Issue Dt:
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05/30/2006
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Application #:
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10655050
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Filing Dt:
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09/04/2003
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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PHASE-SHIFTING MASK AND SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10658017
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Filing Dt:
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09/08/2003
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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METHOD OF TRANSLATING A NET DESCRIPTION OF AN INTEGRATED CIRCUIT DIE
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10658168
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Filing Dt:
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09/08/2003
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Publication #:
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Pub Dt:
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03/24/2005
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Title:
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METHOD OF QUALIFYING A PROCESS TOOL WITH WAFER DEFECT MAPS
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10659134
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Filing Dt:
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09/10/2003
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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APPARATUS AND METHOD OF MANUFACTURE FOR INTEGRATED CIRCUIT AND CMOS DEVICE INCLUDING EPITAXIALLY GROWN DIELECTRIC ON SILICON CARBIDE
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Patent #:
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Issue Dt:
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07/25/2006
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Application #:
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10668021
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Filing Dt:
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09/22/2003
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Publication #:
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Pub Dt:
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03/24/2005
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Title:
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PAD CONDITIONER SETUP
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10668875
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Filing Dt:
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09/23/2003
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Publication #:
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Pub Dt:
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03/24/2005
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Title:
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HIGH PERFORMANCE VOLTAGE CONTROL DIFFUSION RESISTOR
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10669398
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Filing Dt:
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09/24/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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HIGH DOPANT CONENTRATION DIFFUSED RESISTOR AND METHOD OF MANUFACTURE THEREFOR
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10675569
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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BYPASS LOOP GAS FLOW CALIBRATION
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Patent #:
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Issue Dt:
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08/28/2007
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Application #:
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10675572
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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REAL-TIME GATE ETCH CRITICAL DIMENSION CONTROL BY OXYGEN MONITORING
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Patent #:
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Issue Dt:
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07/07/2009
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Application #:
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10675575
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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07/01/2004
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Title:
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IN-SITU REMOVAL OF SURFACE IMPURITIES PRIOR TO ARSENIC-DOPED POLYSILICON DEPOSITION IN THE FABRICATION OF A HETEROJUNCTION BIPOLAR TRANSISTOR
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10675581
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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ALTERNATING PULSE DUAL-BEAM APPARATUS, METHODS AND SYSTEMS FOR VOLTAGE CONTRAST BEHAVIOR ASSESSMENT OF MICROCIRCUITS
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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10675633
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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METAL-OXIDE-SEMICONDUCTOR DEVICE INCLUDING A BURIED LIGHTLY-DOPED DRAIN REGION
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10676602
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Filing Dt:
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10/01/2003
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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SUBSTRATE-BIASED I/O AND POWER ESD PROTECTION CIRCUITS IN DEEP-SUBMICRON TWIN-WELL PROCESS
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10676934
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Filing Dt:
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09/30/2003
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Title:
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PROCESS FOR REDUCING IMPURITY LEVELS, STRESS, AND RESISTIVITY, AND INCREASING GRAIN SIZE OF COPPER FILLER IN TRENCHES AND VIAS OF INTEGRATED CIRCUIT STRUCTURES TO ENHANCE ELECTRICAL PERFORMANCE OF COPPER FILLER
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Patent #:
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Issue Dt:
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12/06/2005
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Application #:
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10680503
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Filing Dt:
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10/06/2003
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Title:
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METHOD OF REDUCING PROCESS PLASMA DAMAGE USING OPTICAL SPECTROSCOPY
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10684713
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Filing Dt:
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10/14/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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MULTIPLE OPERATING VOLTAGE VERTICAL REPLACEMENT-GATE (VRG) TRANSISTOR
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