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Total properties:
26
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09340148
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Filing Dt:
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06/28/1999
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Title:
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MASK PATTERN PREPARING METHOD AND PHOTOMASK
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09459648
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Filing Dt:
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12/13/1999
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Title:
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CHARGED BEAM LITHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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02/12/2002
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Application #:
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09533265
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Filing Dt:
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03/20/2000
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Title:
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Pattern writing method
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09810478
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Filing Dt:
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03/19/2001
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Publication #:
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Pub Dt:
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10/04/2001
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Title:
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CHARGED PARTICLE BEAM SYSTEM AND CHAMBER OF CHARGED PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
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11/15/2005
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Application #:
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09883945
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Filing Dt:
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06/20/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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SIZE CHECKING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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09/18/2007
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Application #:
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10360801
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/14/2003
| | | | |
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Title:
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PATTERN WRITING AND FORMING METHOD
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10394208
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Filing Dt:
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03/24/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM, LITHOGRAPHY METHOD USING CHARGED PARTICLE BEAM, METHOD OF CONTROLLING CHARGED PARTICLE BEAM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10397288
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Filing Dt:
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03/27/2003
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Publication #:
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Pub Dt:
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10/02/2003
| | | | |
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Title:
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ALIGNMENT APPARATUS FOR SUBSTRATES
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10602670
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Filing Dt:
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06/25/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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METHOD FOR CORRECTING A PROXIMITY EFFECT, AN EXPOSURE METHOD, A MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE AND A PROXIMITY CORRECTION MODULE
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10627702
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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04/15/2004
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10819201
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Filing Dt:
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04/07/2004
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Publication #:
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Pub Dt:
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09/30/2004
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Title:
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OPTICAL SYSTEM ADJUSTING METHOD FOR ENERGY BEAM APPARATUS
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10891121
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Filing Dt:
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07/15/2004
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Publication #:
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Pub Dt:
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12/30/2004
| | | | |
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Title:
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VARIABLY SHAPED BEAM EB WRITING SYSTEM
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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11012257
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Filing Dt:
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12/16/2004
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Publication #:
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Pub Dt:
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06/16/2005
| | | | |
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Title:
|
ALIGNMENT METHOD
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|
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Patent #:
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|
Issue Dt:
|
02/17/2009
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Application #:
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11038161
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Filing Dt:
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01/21/2005
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Publication #:
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Pub Dt:
|
09/15/2005
| | | | |
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Title:
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CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM CONTROL METHOD, SUBSTRATE INSPECTION METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11185945
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Filing Dt:
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07/21/2005
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Publication #:
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Pub Dt:
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02/02/2006
| | | | |
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Title:
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EXPOSURE MASK MANUFACTURING METHOD, DRAWING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND MASK BLANKS PRODUCT
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Patent #:
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|
Issue Dt:
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12/16/2008
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Application #:
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11197501
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Filing Dt:
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08/05/2005
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Publication #:
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Pub Dt:
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12/01/2005
| | | | |
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Title:
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SIZE CHECKING METHOD AND APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
05/05/2009
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Application #:
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11235411
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Filing Dt:
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09/26/2005
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Publication #:
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Pub Dt:
|
04/13/2006
| | | | |
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Title:
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CHARGED PARTICLE BEAM PROCESSING APPARATUS
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|
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Patent #:
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|
Issue Dt:
|
10/14/2008
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Application #:
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11239428
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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04/13/2006
| | | | |
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Title:
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SYSTEM, METHOD AND A PROGRAM FOR CORRECTING CONDITIONS FOR CONTROLLING A CHARGED PARTICLE BEAM FOR LITHOGRAPHY AND OBSERVATION, AND A PROGRAM AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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|
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Patent #:
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|
Issue Dt:
|
07/26/2011
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Application #:
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11268603
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Filing Dt:
|
11/08/2005
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Publication #:
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Pub Dt:
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07/13/2006
| | | | |
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Title:
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ELECTRON BEAM DRAWING APPARATUS, DEFLECTION AMPLIFIER, DEFLECTION CONTROL DEVICE, ELECTRON BEAM DRAWING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND ELECTRON BEAM DRAWING PROGRAM
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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11439989
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Filing Dt:
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05/25/2006
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Publication #:
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Pub Dt:
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11/30/2006
| | | | |
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Title:
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SEMICONDUCTOR MASK INSPECTION USING DIE-TO-DIE AND DIE-TO-DATABASE COMPARISONS
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|
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Patent #:
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Issue Dt:
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10/21/2008
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Application #:
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11501824
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Filing Dt:
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08/10/2006
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Publication #:
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Pub Dt:
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12/21/2006
| | | | |
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Title:
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DEMAGNIFICATION MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, STAGE PHASE MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, CONTROL METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
04/06/2010
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Application #:
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11710930
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Filing Dt:
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02/27/2007
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|
Publication #:
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Pub Dt:
|
10/04/2007
| | | | |
|
Title:
|
CHARGED BEAM DRAWING APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/17/2008
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Application #:
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11759057
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Filing Dt:
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06/06/2007
|
|
Publication #:
|
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Pub Dt:
|
10/04/2007
| | | | |
|
Title:
|
PATTERN WRITING AND FORMING APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/05/2012
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Application #:
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12468143
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Filing Dt:
|
05/19/2009
|
|
Publication #:
|
|
Pub Dt:
|
09/10/2009
| | | | |
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Title:
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EXPOSURE MASK MANUFACTURING METHOD, DRAWING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND MASK BLANKS PRODUCT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/10/2013
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Application #:
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12659396
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Filing Dt:
|
03/08/2010
|
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Publication #:
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Pub Dt:
|
09/09/2010
| | | | |
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Title:
|
EXPOSURE MASK MANUFACTURING METHOD, DRAWING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND MASK BLANKS PRODUCT
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|
|
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Patent #:
|
|
Issue Dt:
|
06/24/2014
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Application #:
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13183792
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Filing Dt:
|
07/15/2011
|
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Publication #:
|
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Pub Dt:
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01/26/2012
| | | | |
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Title:
|
PATTERN INSPECTION APPARATUS
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