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Reel/Frame:045998/0047   Pages: 4
Recorded: 06/06/2018
Attorney Dkt #:05542-1198002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
15980621
Filing Dt:
05/15/2018
Publication #:
Pub Dt:
09/13/2018
Title:
ION-ION PLASMA ATOMIC LAYER ETCH PROCESS AND REACTOR
Assignors
1
Exec Dt:
03/31/2015
2
Exec Dt:
03/26/2015
3
Exec Dt:
03/27/2015
4
Exec Dt:
03/27/2015
5
Exec Dt:
03/29/2015
6
Exec Dt:
03/27/2015
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
DAVID J. GOREN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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