Patent Assignment Details
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Reel/Frame: | 046100/0935 | |
| Pages: | 3 |
| | Recorded: | 06/15/2018 | | |
Attorney Dkt #: | 081468-0459654 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/23/2021
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Application #:
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16062919
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Filing Dt:
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06/15/2018
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Publication #:
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Pub Dt:
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12/27/2018
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Title:
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METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
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Assignee
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW PITTMAN LLP
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P.O. BOX 10500
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MCLEAN, VA 22102
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05/12/2024 03:42 PM
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