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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09082906
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Filing Dt:
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05/21/1998
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Title:
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PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09092391
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Filing Dt:
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06/05/1998
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Title:
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ELECTRICAL RESISTANCE HEATER FOR CRYSTAL GROWING APPARATUS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09093520
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Filing Dt:
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06/08/1998
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Title:
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COLLECTOR FOR AN AUTOMATED ON-LINE BATH ANALYSIS SYSTEM
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09097779
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Filing Dt:
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06/15/1998
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Title:
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PROCESS AND APPRATUS FOR PREPARATION OF SILICON CRYSTALS WITH REDUCED METAL CONTENT
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09107728
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Filing Dt:
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06/30/1998
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Title:
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SUSCEPTOR FOR BARREL REACTOR
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09167747
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Filing Dt:
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10/07/1998
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Title:
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CONTINUOUS OXIDATION PROCESS FOR CRYSTAL PULLING APPARATUS
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09172546
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Filing Dt:
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10/14/1998
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09245238
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Filing Dt:
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02/05/1999
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Title:
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TUNGSTEN DOPED CRUCIBLE AND METHOD FOR PREPARING SAME
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09250908
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Filing Dt:
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02/16/1999
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Title:
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AN EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09258478
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Filing Dt:
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02/26/1999
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Title:
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HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09276278
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Filing Dt:
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03/25/1999
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Title:
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METHOD FOR PROCESSING A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09287916
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Filing Dt:
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04/07/1999
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Title:
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METHOD AND SYSTEM OF CONTROLLING TAPER GROWTH IN A SEMICONDUCTOR CRYSTAL GROWTH PROCESS
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09344036
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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06/14/2001
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Title:
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PROCESS FOR PREPARING DEFECT FREE SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09344709
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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07/19/2001
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Title:
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PROCESS FOR GROWTH OF DEFECT FREE SILICON CRYSTALS OF ARBITRARILY LARGE DIAMETERS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09345934
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Filing Dt:
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07/01/1999
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Title:
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METHOD FOR THE SEPARATION, REGENERATION AND REFUSE OF AN EXHAUSTED GLYCOL-BASED SLURRY
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Patent #:
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Issue Dt:
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01/15/2002
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Application #:
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09352980
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Filing Dt:
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07/14/1999
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Title:
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PROCESS FOR FABRICATING SEMICONDUCTOR WAFERS WITH EXTERNAL GETTERING
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09366850
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Filing Dt:
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08/04/1999
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Title:
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NON-UNIFORM MINORITY CARRIER LIFETIME DISTRIBUTIONS IN HIGH PERFORMANCE SILICON POWER DEVICES
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09379383
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Filing Dt:
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08/23/1999
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Title:
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NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09384669
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Filing Dt:
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08/27/1999
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Title:
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PROCESS FOR PREPARING AN IDEAL OXYGEN PRECIPITATING SILICON WAFER
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09385108
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Filing Dt:
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08/27/1999
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Title:
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THERMALLY ANNEALED WAFERS HAVING IMPROVED INTERNAL GETTERING
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09387288
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Filing Dt:
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08/31/1999
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Title:
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SILICON ON INSULATOR STRUCTURE FROM LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09404428
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Filing Dt:
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09/23/1999
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR WAFERS TO BUILD IN BACK SURFACE DAMAGE
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09416998
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Filing Dt:
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10/13/1999
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Title:
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THERMALLY ANNEALED, LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09417610
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Filing Dt:
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10/13/1999
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Title:
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EPITAXIAL SILICON WAFERS SUBSTANTIALLY FREE OF GROWN - IN DEFECTS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09421187
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Filing Dt:
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10/19/1999
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Title:
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METHOD OF CONTROLLING GROWTH OF A SEMICONDUCTOR CRYSTAL TO AUTOMATICALLY TRANSITION FROM TAPER GROWTH TO TARGET DIAMETER GROWTH
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09432928
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Filing Dt:
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11/03/1999
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Title:
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METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09481080
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Filing Dt:
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01/11/2000
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Publication #:
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Pub Dt:
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01/10/2002
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Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09489481
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01/21/2000
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Title:
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Continuous oxidation process for crystal pulling Apparatus
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Patent #:
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Issue Dt:
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08/17/2004
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09502340
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02/10/2000
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Title:
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METHOD OF CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A LOCKED SEED LIFT GROWTH PROCESS
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Patent #:
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Issue Dt:
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02/05/2002
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09503566
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02/14/2000
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Title:
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Process for producing a silicon melt
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Patent #:
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04/23/2002
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09506105
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02/17/2000
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Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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Patent #:
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09/25/2001
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09512111
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02/24/2000
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Title:
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Silicon wafering process flow
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11/20/2001
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09521288
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03/08/2000
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Title:
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Barium doping of molten silicon for use in crystal growing process
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02/26/2002
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09521525
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03/08/2000
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Title:
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Strontium doping of molten silicon for use in crystal growing process
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09/03/2002
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09566890
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05/08/2000
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Title:
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MODIFIED SUSCEPTOR FOR USE IN CHEMICAL VAPOR DEPOSITION PROCESS
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01/15/2002
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09607389
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06/30/2000
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Title:
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Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
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07/29/2003
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09607391
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06/30/2000
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Title:
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METHOD AND APPARATUS FOR FORMING A SILICON WAFER WITH A DENUDED ZONE
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08/20/2002
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09608304
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06/30/2000
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NON-CONTAMINATING GAS-TIGHT VALVE FOR SEMICONDUCTOR APPLICATIONS
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12/18/2001
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09677909
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10/03/2000
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Radio frequency identification system and method for tracking silicon wafers
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03/30/2004
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09682677
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10/04/2001
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04/10/2003
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Title:
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POLISHING APPARATUS, POLISHING HEAD AND METHOD
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06/17/2003
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09704900
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11/02/2000
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Title:
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A PROCESS FOR THE PREPARATION OF AN IDEAL OXYGEN PRECIPITATING SILICON WAFER HAVING AN ASYMMETRICAL VACANCY CONCENTRATION PROFILE CAPABLE OF FORMING AN ENHANCED DENUDED ZONE
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04/29/2003
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09705092
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11/02/2000
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Title:
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LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
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01/29/2002
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09737715
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12/15/2000
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10/18/2001
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Title:
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Silicon on insulator structure having a low defect density handle wafer and process for the preparation thereof
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12/31/2002
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09853232
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05/11/2001
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Pub Dt:
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10/11/2001
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Title:
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PROCESS FOR GROWING SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS WHILE SUPPRESSING THE FORMATION OF AGGLOMERATED INTRINSIC POINT DEFECTS
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02/10/2004
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09871255
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05/31/2001
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05/09/2002
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Title:
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PROCESS FOR PREPARING LOW DEFECT DENSITY SILICON USING HIGH GROWTH RATES
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05/20/2003
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09874487
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06/05/2001
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11/15/2001
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Title:
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AN EPITAXIAL WAFER SUBSTANTIALLY FREE OF GROWN-IN DEFECTS
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12/16/2003
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09892002
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06/26/2001
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12/26/2002
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Title:
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CRYSTAL PULLER AND METHOD FOR GROWING MONOCRYSTALLINE SILICON INGOTS
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03/23/2004
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09928559
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08/13/2001
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Pub Dt:
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05/02/2002
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Title:
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METHOD AND APPARATUS FOR PROCESSING A SEMICONDUCTOR WAFER USING NOVEL FINAL POLISHING METHOD
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08/13/2002
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09929585
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08/14/2001
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01/03/2002
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Title:
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PROCESS FOR THE PREPARATION OF NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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04/27/2004
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10008812
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11/13/2001
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04/18/2002
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Title:
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METHOD FOR CONTROLLING GROWTH OF A SILICON CRYSTAL TO MINIMIZE GROWTH RATE AND DIAMETER DEVIATIONS
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03/07/2006
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10022967
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12/13/2001
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07/04/2002
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PROCESS FOR RECLAIMING SEMICONDUCTOR WAFERS AND RECLAIMED WAFERS
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08/26/2003
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10035456
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10/23/2001
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04/24/2003
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GRANULAR SEMICONDUCTOR MATERIAL TRANSPORT SYSTEM AND PROCESS
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02/01/2005
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10038084
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01/03/2002
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08/22/2002
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SOI structure having a device layer which is vacancy dominated and substantially free fo agglomerated vacancy type defects
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01/17/2006
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10039196
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01/02/2002
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09/05/2002
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SINGLE CRYSTAL SILICON HAVING IMPROVED GATE OXIDE INTEGRITY
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01/25/2005
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10054629
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01/22/2002
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08/01/2002
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LOW DEFECT DENSITY SILICON HAVING A VACANCY-DOMINATED CORE SUBSTANTIALLY FREE OF OXIDATION INDUCED STACKING FAULTS
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02/03/2004
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10067070
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02/04/2002
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11/21/2002
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PROCESS FOR PRODUCING THERMALLY ANNEALED WAFERS HAVING IMPROVED INTERNAL GETTERING
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06/01/2004
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10073506
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02/11/2002
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07/04/2002
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Title:
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THERMAL ANNEALING PROCESS FOR PRODUCING LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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06/01/2004
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10113378
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03/29/2002
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Pub Dt:
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11/28/2002
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Title:
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THERMAL ANNEALING PROCESS FOR PRODUCING SILICON WAFERS WITH IMPROVED SURFACE CHARACTERISTICS
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05/24/2005
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10120714
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04/11/2002
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03/20/2003
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Title:
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CONTROL OF OXYGEN PRECIPITATE FORMATION IN HIGH RESISTIVITY CZ SILICON
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08/16/2005
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10177444
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06/21/2002
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01/09/2003
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SILICON ON INSULATOR STRUTURE HAVING AN EPITAXIAL LAYER AND INTRINSIC GETTERING
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03/22/2005
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10204654
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11/04/2002
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11/13/2003
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CONTROLLED NECK GROWTH PROCESS FOR SINGLE CRYSTAL SILICON
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03/23/2004
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10217703
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08/13/2002
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12/19/2002
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Title:
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NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10229415
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Filing Dt:
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08/28/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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MODIFIED SUSCEPTOR FOR USE IN CHEMICAL VAPOR DEPOSITION PROCESS
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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10239669
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Filing Dt:
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12/03/2002
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Title:
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METHOD OF POLISHING WAFERS
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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10252479
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Filing Dt:
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09/23/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Title:
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ANALYTICAL METHOD TO MEASURE NITROGEN CONCENTRATION IN SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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10254945
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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02/06/2003
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Title:
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CRYSTAL PULLER FOR GROWING MONOCRYSTALLINE SILICON INGOTS
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10256759
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/03/2003
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Title:
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A SINGLE CRYSTAL SILICON INGOT HAVING A HIGH ARSENIC CONCENTRATION
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10260239
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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PROCESS FOR GROWING A SILICON CRYSTAL SEGMENT SUBSTANTIALLY FREE FROM AGGLOMERATED INTRINSIC POINT DEFECTS WHICH ALLOWS FOR VARIABILITY IN THE PROCESS CONDITIONS
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10296919
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Filing Dt:
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04/17/2003
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Title:
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WIRE SAW AND PROCESS FOR SLICING MULTIPLE SEMICONDUCTOR INGOTS
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10328481
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Filing Dt:
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12/23/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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IDEAL OXYGEN PRECIPITATING SILICON WAFERS WITH NITROGEN/CARBON STABILIZED OXYGEN PRECIPITATE NUCLEATION CENTERS AND PROCESS FOR MAKING THE SAME
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10373899
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Filing Dt:
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02/25/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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PROCESS FOR PRODUCING LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
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Patent #:
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Issue Dt:
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11/21/2006
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Application #:
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10432513
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Filing Dt:
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10/14/2003
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Title:
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SEMICONDUCTOR WAFER, POLISHING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10437141
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Filing Dt:
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05/13/2003
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Publication #:
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Pub Dt:
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01/08/2004
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Title:
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PROCESS FOR COOLING A SILICON INGOT HAVING A VACANCY DOMINATED REGION TO PRODUCE DEFECT FREE SILICON
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10441413
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Filing Dt:
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05/20/2003
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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SINGLE CRYSTAL SILICON WAFER HAVING AN EPITAXIAL LAYER SUBSTANTIALLY FREE FROM GROWN-IN DEFECTS
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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10460901
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Filing Dt:
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06/13/2003
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Publication #:
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Pub Dt:
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12/04/2003
| | | | |
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Title:
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PROCESS FOR THE PREPARATION OF AN IDEAL OXYGEN PRECIPITATING SILICON WAFER CAPABLE OF FORMING AN ENHANCED DENUDED ZONE
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10465528
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Filing Dt:
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06/19/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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FLUID SEALING SYSTEM FOR A CRYSTAL PULLER
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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10479301
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Filing Dt:
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03/23/2004
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Publication #:
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Pub Dt:
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07/29/2004
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Title:
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METHOD FOR TREATING AN EXHAUSTED GLYCOL-BASED SLURRY
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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10598851
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Filing Dt:
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05/10/2007
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Publication #:
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Pub Dt:
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01/24/2008
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Title:
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WAFER CLAMPING DEVICE FOR A DOUBLE SIDE GRINDER
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Patent #:
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Issue Dt:
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10/18/2005
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Application #:
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10615127
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Filing Dt:
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07/08/2003
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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PROCESS FOR PREPARING A STABILIZED IDEAL OXYGEN PRECIPITATING SILICON WAFER
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10699038
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Filing Dt:
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10/31/2003
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Publication #:
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Pub Dt:
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06/24/2004
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Title:
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PROCESS FOR PREPARING SINGLE CRYSTAL SILICON USING CRUCIBLE ROTATION TO CONTROL TEMPERATURE GRADIENT
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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10840854
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Filing Dt:
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05/07/2004
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Publication #:
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Pub Dt:
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11/10/2005
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Title:
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PROCESS FOR METALLIC CONTAMINATION REDUCTION IN SILICON WAFERS
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Patent #:
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Issue Dt:
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03/03/2009
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Application #:
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10898148
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Filing Dt:
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07/23/2004
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Publication #:
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Pub Dt:
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01/26/2006
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Title:
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PARTIALLY DEVITRIFIED CRUCIBLE
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Patent #:
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Issue Dt:
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02/15/2011
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Application #:
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10900938
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Filing Dt:
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07/27/2004
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Publication #:
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Pub Dt:
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02/02/2006
| | | | |
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Title:
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HIGH PURITY SILICON CARBIDE STRUCTURES
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Patent #:
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Issue Dt:
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07/10/2007
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Application #:
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10911965
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Filing Dt:
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08/05/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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PROCESS FOR MAKING NON-UNIFORM MINORITY CARRIER LIFETIME DISTRIBUTION IN HIGH PERFORMANCE SILICON POWER DEVICES
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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10930654
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Filing Dt:
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08/31/2004
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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SYSTEMS AND METHODS FOR MEASURING AND REDUCING DUST IN GRANULAR MATERIAL
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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11005987
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Filing Dt:
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12/07/2004
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Publication #:
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Pub Dt:
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07/14/2005
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Title:
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LOW DEFECT DENSITY SILICON HAVING A VACANCY-DOMINATED CORE SUBSTANTIALLY FREE OF OXIDATION INDUCED STACKING FAULTS
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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11026780
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Filing Dt:
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12/30/2004
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Publication #:
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Pub Dt:
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07/06/2006
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Title:
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CONTROLLING MELT-SOLID INTERFACE SHAPE OF A GROWING SILICON CRYSTAL USING A VARIABLE MAGNETIC FIELD
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11027360
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Filing Dt:
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12/30/2004
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Publication #:
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Pub Dt:
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07/06/2006
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Title:
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ELECTROMAGNETIC PUMPING OF LIQUID SILICON IN A CRYSTAL GROWING PROCESS
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Patent #:
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Issue Dt:
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04/25/2006
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Application #:
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11041593
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Filing Dt:
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01/24/2005
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Title:
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SEMICONDUCTOR WAFER BOAT FOR A VERTICAL FURNACE
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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11082267
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Filing Dt:
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03/17/2005
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Publication #:
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Pub Dt:
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07/21/2005
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Title:
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METHOD FOR CONTROLLING OF THERMAL DONOR FORMATION IN HIGH RESISTIVITY CZ SILICON
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Patent #:
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Issue Dt:
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10/07/2008
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Application #:
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11089102
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Filing Dt:
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03/24/2005
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Publication #:
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Pub Dt:
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07/28/2005
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Title:
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PROCESS FOR PREPARING SINGLE CRYSTAL SILICON HAVING IMPROVED GATE OXIDE INTEGRITY
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11107444
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Filing Dt:
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04/15/2005
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Publication #:
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Pub Dt:
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10/19/2006
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Title:
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MODIFIED SUSCEPTOR FOR BARREL REACTOR
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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11152362
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Filing Dt:
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06/14/2005
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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SILICON WAFER ETCHING PROCESS AND COMPOSITION
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Patent #:
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Issue Dt:
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12/16/2008
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Application #:
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11155104
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Filing Dt:
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06/17/2005
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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MELTER ASSEMBLY AND METHOD FOR CHARGING A CRYSTAL FORMING APPARATUS WITH MOLTEN SOURCE MATERIAL
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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11155105
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Filing Dt:
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06/17/2005
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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MELTER ASSEMBLY AND METHOD FOR CHARGING A CRYSTAL FORMING APPARATUS WITH MOLTEN SOURCE MATERIAL
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11155385
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Filing Dt:
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06/17/2005
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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MELTER ASSEMBLY AND METHOD FOR CHARGING A CRYSTAL FORMING APPARATUS WITH MOLTEN SOURCE MATERIAL
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Patent #:
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Issue Dt:
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02/03/2009
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Application #:
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11270790
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Filing Dt:
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11/09/2005
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Publication #:
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Pub Dt:
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05/10/2007
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Title:
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ARSENIC AND PHOSPHORUS DOPED SILICON WAFER SUBSTRATES HAVING INTRINSIC GETTERING
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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11408503
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Title:
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SILICON STRUCTURES WITH IMPROVED RESISTANCE TO RADIATION EVENTS
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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11436688
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Filing Dt:
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05/18/2006
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Publication #:
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Pub Dt:
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11/23/2006
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Title:
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HIGH RESISTIVITY SILICON STRUCTURE AND A PROCESS FOR THE PREPARATION THEREOF
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Patent #:
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Issue Dt:
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07/14/2009
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Application #:
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11614129
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Filing Dt:
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12/21/2006
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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METHOD OF POLISHING A SEMICONDUCTOR WAFER
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