Patent Assignment Details
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Reel/Frame: | 046525/0322 | |
| Pages: | 8 |
| | Recorded: | 07/11/2018 | | |
Attorney Dkt #: | 170037-00327 |
Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE THIRD INVENTOR NAME PREVIOUSLY RECORDED AT REEL: 046296 FRAME: 0590. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/29/2021
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Application #:
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16030323
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Filing Dt:
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07/09/2018
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Publication #:
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Pub Dt:
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02/21/2019
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Title:
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Precursor Supply Unit, Substrate Processing System, and Method of Fabricating Semiconductor Device Using the Same
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Assignee
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129, SAMSUNG-RO, YEONGTONG-GU |
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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Correspondence name and address
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WARD AND SMITH, P.A.
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5430 WADE PARK BLVD
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WADE II, SUITE 400
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RALEIGH, NC 27636-3009
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