Patent Assignment Details
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| Reel/Frame: | 046869/0110 | |
| Pages: | 4 |
| | Recorded: | 09/13/2018 | | |
| Attorney Dkt #: | 025176US01CIP |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16007876
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Filing Dt:
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06/13/2018
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Publication #:
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Pub Dt:
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12/06/2018
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Title:
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SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER USING REACTIVE GAS PRECURSOR
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP
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24 GREENWAY PLAZA, SUITE 1600
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HOUSTON, TX 77046
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