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Patent Assignment Details

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Reel/Frame:	047082/0912			Pages:	4
		Recorded:	10/05/2018
Attorney Dkt #:	121719-0007
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 10

Patent #:	6576063	Issue Dt:	06/10/2003	Application #:	09768663	Filing Dt:	01/24/2001
Publication #:	US20010029112	Pub Dt:	10/11/2001
Title:	APPARATUS AND METHOD FOR USE IN MANUFACTURING A SEMICONDUCTOR DEVICE

Patent #:	6514869	Issue Dt:	02/04/2003	Application #:	09924538	Filing Dt:	08/09/2001
Publication #:	US20020034862	Pub Dt:	03/21/2002
Title:	METHOD FOR USE IN MANUFACTURING A SEMICONDUCTOR DEVICE

Patent #:	6744018	Issue Dt:	06/01/2004	Application #:	10259762	Filing Dt:	09/30/2002
Publication #:	US20030183613	Pub Dt:	10/02/2003
Title:	SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Patent #:	7033937	Issue Dt:	04/25/2006	Application #:	10342011	Filing Dt:	01/14/2003
Publication #:	US20030124876	Pub Dt:	07/03/2003
Title:	APPARATUS AND METHOD FOR USE IN MANUFACTURING A SEMICONDUCTOR DEVICE

Patent #:	7622007	Issue Dt:	11/24/2009	Application #:	10549933	Filing Dt:	09/11/2006
Publication #:	US20070034158	Pub Dt:	02/15/2007
Title:	SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING METHOD

Patent #:	7808396	Issue Dt:	10/05/2010	Application #:	11991093	Filing Dt:	04/23/2008
Publication #:	US20090072990	Pub Dt:	03/19/2009
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	8673076	Issue Dt:	03/18/2014	Application #:	12578012	Filing Dt:	10/13/2009
Publication #:	US20100081288	Pub Dt:	04/01/2010
Title:	SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING METHOD

Patent #:	9318316	Issue Dt:	04/19/2016	Application #:	12625712	Filing Dt:	11/25/2009
Publication #:	US20100130024	Pub Dt:	05/27/2010
Title:	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS FOR FORMING THIN FILM CONTAINING AT LEAST TWO DIFFERENT ELEMENTS

Patent #:	RE43023	Issue Dt:	12/13/2011	Application #:	12724026	Filing Dt:	03/15/2010
Title:	DUAL LOADING PORT SEMICONDUCTOR PROCESSING EQUIPMENT

Patent #:	8409988	Issue Dt:	04/02/2013	Application #:	13115578	Filing Dt:	05/25/2011
Publication #:	US20110294280	Pub Dt:	12/01/2011
Title:	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS

Assignor

Exec Dt:

10/04/2018

Assignee

3-4, KANDAKAJI-CHO, CHIYODA-KU

TOKYO, JAPAN 1010045

Correspondence name and address
	MORGAN, LEWIS & BOCKIUS LLP
	1400 PAGE MILL ROAD
	PALO ALTO, CA 94304

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