Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 047281/0370 | |
| Pages: | 3 |
| | Recorded: | 08/09/2018 | | |
| Attorney Dkt #: | N00421-03-1-0002 |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
2
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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12114373
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Filing Dt:
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05/02/2008
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Publication #:
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Pub Dt:
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03/12/2009
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Title:
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PHOTOLITHOGRAPHIC MASK EXHIBITING ENHANCED LIGHT TRANSMISSION DUE TO UTILIZING SUB-WAVELENGTH APERTURE ARRAYS FOR IMAGING PATTERNS IN NANO-LITHOGRAPHY
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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12114409
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Filing Dt:
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05/02/2008
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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STEPPER SYSTEM FOR ULTRA-HIGH RESOLUTION PHOTOLITHOGRAPHY USING PHOTOLITHOGRAPHIC MASK EXHIBITING ENHANCED LIGHT TRANSMISSION DUE TO UTILIZING SUB-WAVELENGTH APERTURE ARRAYS
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Assignee
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| 47076 LILJENCRANTZ ROAD |
| BLDG. 435 |
| PATUXENT RIVER, MARYLAND 20670 |
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Correspondence name and address
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TANYA BASHIOUM
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47076 LILJENCRANTZ ROAD
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BLDG 435
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PATUXENT RIVER, MD 20670
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