Patent Assignment Details
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| Reel/Frame: | 047454/0660 | |
| Pages: | 3 |
| | Recorded: | 11/08/2018 | | |
| Attorney Dkt #: | 021887US01CON |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/09/2021
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Application #:
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16180784
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Filing Dt:
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11/05/2018
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Publication #:
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Pub Dt:
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03/07/2019
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Title:
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CONDITIONING REMOTE PLASMA SOURCE FOR ENHANCED PERFORMANCE HAVING REPEATABLE ETCH AND DEPOSITION RATES
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP - - APPLIED MA
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24 GREENWAY PLAZA, SUITE 1600
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HOUSTON, TX 77046
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