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Reel/Frame:047509/0132   Pages: 3
Recorded: 11/13/2018
Attorney Dkt #:TEL-18060US/215909
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/05/2022
Application #:
16188671
Filing Dt:
11/13/2018
Publication #:
Pub Dt:
05/16/2019
Title:
CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS
Assignors
1
Exec Dt:
11/12/2018
2
Exec Dt:
11/12/2018
3
Exec Dt:
11/12/2018
Assignee
1
3-1 AKASAKA 5-CHOME
MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
ABELMAN, FRAYNE & SCHWAB
666 THIRD AVENUE, 10TH FLOOR
NEW YORK, NY 10017-5621

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