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Patent #:
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Issue Dt:
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02/09/1999
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Application #:
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08619840
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Filing Dt:
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03/19/1996
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Title:
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COMPOSITION OF AND PROCESS FOR FORMING POLYALPHAOLEFIN DRAG REDUCING AGENTS
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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09032865
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Filing Dt:
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03/02/1998
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Title:
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COMPOSITION AND METHOD OF REMOVING ODORS
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09081964
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Filing Dt:
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05/20/1998
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYALPHAOLEFIN DRAG REDUCING AGENTS
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Patent #:
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Issue Dt:
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12/19/2000
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Application #:
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09141897
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Filing Dt:
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08/28/1998
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Title:
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COMPOSITION AND METHOD FOR SELECTIVELY ETCHING A SILICON NITRIDE FILM
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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09226326
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Filing Dt:
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01/06/1999
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Title:
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SYSTEM FOR MAGNETORHEOLOGICAL FINISHING OF SUBSTRATES
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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09235886
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Filing Dt:
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01/22/1999
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Title:
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VALVE ASSEMBLY WITH FLUSH AND SAMPLE CAPABILITY
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09307123
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Filing Dt:
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05/07/1999
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION OF BARRIERS OR LINERS FOR COPPER METALLURGY
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Patent #:
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Issue Dt:
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12/19/2000
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Application #:
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09396247
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Filing Dt:
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09/15/1999
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYALPHAOLEFIN DRAG REDUCING AGENTS USING A HALOHYDROCARBON
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09396285
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Filing Dt:
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09/15/1999
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYALPHAOLEFIN DRAG REDUCING AGENTS USING NON-METALLOCENE CATALYSTS AND ALKYLALUMINOXANE
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09405249
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Filing Dt:
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09/27/1999
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Title:
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CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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10/14/2003
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Application #:
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09409798
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Filing Dt:
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09/30/1999
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Title:
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CHEMICAL-MECHANICAL PLANARIZATION OF METALLURGY
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09425473
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Filing Dt:
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10/22/1999
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Title:
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COMPOSITION AND METHOD FOR POLISHING RIGID DISKS
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09428965
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Filing Dt:
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11/04/1999
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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USE OF CSOH IN A DIELECTRIC CMP SLURRY
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09440401
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Filing Dt:
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11/15/1999
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09440525
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Filing Dt:
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11/15/1999
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09472961
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Filing Dt:
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12/28/1999
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Title:
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SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09534303
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Filing Dt:
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03/23/2000
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Title:
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Cleaning compositions and use thereof containing ammonium hydroxide and fluorosurfactant
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09542774
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Filing Dt:
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04/04/2000
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Title:
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METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN AMINO ACID-CONTAINING COMPOSITION
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09562298
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Filing Dt:
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05/01/2000
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09609480
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Filing Dt:
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07/05/2000
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Title:
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SILANE CONTAINING POLISHING COMPOSITION FOR CMP
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09609882
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Filing Dt:
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07/05/2000
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Title:
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POLISHING COMPOSITION FOR METAL CMP
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09609884
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Filing Dt:
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07/05/2000
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Title:
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CMP COMPOSITION CONTAINING SILANE MODIFIED ABRASIVE PARTICLES
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09625142
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Filing Dt:
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07/25/2000
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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09636246
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Filing Dt:
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08/10/2000
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Title:
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POLISHING SYSTEM WITH STOPPING COMPOUND AND METHOD OF ITS USE
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09652416
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Filing Dt:
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08/31/2000
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Title:
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Composition and method for selectively etching a silicon nitride film
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09656665
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Filing Dt:
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09/07/2000
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Title:
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METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN OXIDIZED HALIDE-CONTAINING POLISHING SYSTEM
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09690585
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Filing Dt:
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10/17/2000
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Title:
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METHOD OF POLISHING A MEMORY OR RIGID DISK WITH AN AMMONIA- AND/OR HALIDE-CONTAINING COMPOSITION
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09718658
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Filing Dt:
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11/22/2000
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Title:
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APPARATUS AND METHOD FOR ABRASIVE JET FINISHING OF DEEPLY CONCAVE SURFACES USING MAGNETORHEOLOGICAL FLUID
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09728779
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Filing Dt:
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12/01/2000
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Title:
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Chemical-mechanical polishing method
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Patent #:
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Issue Dt:
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03/29/2005
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09737905
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12/15/2000
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Pub Dt:
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06/20/2002
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Title:
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METHOD OF POLISHING OR PLANARIZING A SUBSTRATE
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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09760544
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Filing Dt:
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01/16/2001
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Publication #:
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Pub Dt:
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05/31/2001
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYOLEFINS AND DRAG REDUCING COMPOSITIONS COMPRISING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYOLEFINS
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09766759
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01/22/2001
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Title:
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CATALYTIC REACTIVE PAD FOR METAL CMP
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09775282
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02/01/2001
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Publication #:
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Pub Dt:
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08/01/2002
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Title:
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SYSTEM FOR MAGNETORHEOLOGICAL FINISHING OF SUBSTRATES
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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09788082
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02/16/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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POLISHING DISK WITH END-POINT DETECTION PORT
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Patent #:
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Issue Dt:
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10/18/2005
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09862245
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05/22/2001
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Pub Dt:
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11/28/2002
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Title:
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DELIVERY SYSTEM FOR MAGNETORHEOLOGICAL FLUID
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03/14/2006
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09877341
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06/08/2001
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12/26/2002
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Title:
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DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS AND PROCESSES FOR FORMING DRAG REDUCING AGENT SLURRIES HAVING ALFOL ALCOHOLS
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07/08/2003
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09961934
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09/24/2001
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03/27/2003
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Title:
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RARE EARTH SALT/OXIDIZER-BASED CMP METHOD
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11/09/2004
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09962784
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09/25/2001
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05/30/2002
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Title:
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ALPHA OLEFIN MONOMER PARTITIONING AGENTS FOR DRAG REDUCING AGENTS AND METHODS OF FORMING DRAG REDUCING AGENTS USING ALPHA OLEFIN MONOMER PARTITIONING AGENTS
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03/04/2003
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10022308
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12/18/2001
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09/12/2002
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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08/30/2005
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10022317
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12/18/2001
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Pub Dt:
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06/27/2002
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Title:
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POLISHING SLURRIES FOR COPPER AND ASSOCIATED MATERIALS
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03/16/2004
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10033152
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10/24/2001
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04/24/2003
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Title:
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BORON-CONTAINING POLISHING SYSTEM AND METHOD
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05/04/2004
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10047763
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01/15/2002
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Pub Dt:
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11/21/2002
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Title:
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METHODS FOR FORMING AMORPHOUS ULTRA-HIGH MOLECULAR WEIGHT POLYOLEFINS FOR USE AS DRAG REDUCING AGENTS
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02/28/2006
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10051241
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01/18/2002
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07/24/2003
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Title:
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CMP SYSTEMS AND METHODS UTILIZING AMINE-CONTAINING POLYMERS
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03/04/2003
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10054059
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01/22/2002
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Title:
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08/17/2004
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10073844
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02/11/2002
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Title:
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ANIONIC ABRASIVE PARTICLES TREATED WITH POSITIVELY CHARGED POLYELECTROLYTES FOR CMP
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01/11/2005
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10083985
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02/27/2002
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09/05/2002
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Title:
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METHOD FOR MANUFACTURING A POLISHING PAD HAVING A COMPRESSED TRANSLUCENT REGION
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01/27/2004
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10092406
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03/05/2002
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09/11/2003
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Title:
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METHANOL-CONTAINING SILICA-BASED CMP COMPOSITIONS
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05/27/2003
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10099492
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03/15/2002
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10/10/2002
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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03/16/2010
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10142681
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05/10/2002
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11/13/2003
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Title:
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COMPOSITIONS AND METHODS FOR DIELECTRIC CMP
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04/01/2003
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10154231
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05/23/2002
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11/14/2002
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Title:
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CLEANING SOLUTION FOR SEMICONDUCTOR SURFACES FOLLOWING CHEMICAL-MECHANICAL POLISHING
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12/13/2005
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10165100
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06/07/2002
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12/11/2003
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Title:
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CMP COMPOSITIONS FOR LOW-K DIELECTRIC MATERIALS
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09/01/2009
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10170785
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06/12/2002
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12/19/2002
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BULK POLYMERIZATION REACTOR METHODS
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11/02/2004
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10199704
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07/19/2002
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01/22/2004
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POLISHING COMPOSITION CONTAINING CONDUCTING POLYMER
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06/08/2004
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10213631
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08/06/2002
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02/12/2004
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UNIFORM THIN FILMS PRODUCED BY MAGNETORHEOLOGICAL FINISHING
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11/02/2004
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10231047
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08/30/2002
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04/17/2003
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SLURRY FOR MECHANICAL POLISHING (CMP) OF METALS AND USE THEREOF
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11/23/2004
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10246280
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09/18/2002
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07/03/2003
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Title:
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METHOD FOR COPPER CMP USING POLYMERIC COMPLEXING AGENTS
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08/30/2005
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10269864
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10/11/2002
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Pub Dt:
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12/11/2003
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Title:
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CMP METHOD UTILIZING AMPHIPHILIC NONIONIC SURFACTANTS
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07/05/2005
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10281782
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10/28/2002
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Publication #:
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11/27/2003
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Title:
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MICROPOROUS POLISHING PADS
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10/14/2008
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10282489
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10/28/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Title:
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TRANSPARENT MICROPOROUS MATERIALS FOR CMP
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11/04/2003
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10295836
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11/18/2002
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Title:
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POLISHING COMPOSITIONS AND USE THEREOF
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10/18/2005
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10303236
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11/25/2002
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06/26/2003
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METHOD FOR SELF-CALIBRATED SUB-APERTURE STITCHING FOR SURFACE FIGURE MEASUREMENT
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Issue Dt:
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01/11/2005
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Application #:
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10324634
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Filing Dt:
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12/19/2002
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Publication #:
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Pub Dt:
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09/04/2003
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Title:
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CHEMICAL MECHANICAL POLISHING SYSTEMS AND METHODS FOR THEIR USE
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10353512
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Filing Dt:
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01/29/2003
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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METHOD OF POLISHING A MULTI-LAYER SUBSTRATE
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Patent #:
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Issue Dt:
|
02/08/2005
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Application #:
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10353542
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Filing Dt:
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01/29/2003
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Publication #:
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Pub Dt:
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09/11/2003
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Title:
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METHOD OF USING A POLISHING SYSTEM
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Patent #:
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Issue Dt:
|
11/01/2005
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Application #:
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10361520
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Filing Dt:
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02/10/2003
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Publication #:
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Pub Dt:
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08/12/2004
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Title:
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CMP PAD WITH COMPOSITE TRANSPARENT WINDOW
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10364243
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Filing Dt:
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02/11/2003
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Publication #:
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Pub Dt:
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08/12/2004
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Title:
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MIXED-ABRASIVE POLISHING COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10368275
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Filing Dt:
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02/18/2003
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Title:
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CATALYST/OXIDIZER-BASED CMP SYSTEM FOR ORGANIC POLYMER FILMS
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10376172
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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CMP METHOD FOR NOBLE METALS
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10419580
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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COATED METAL OXIDE PARTICLES FOR CMP
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10419659
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
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Title:
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POLISHING COMPOSITION FOR METAL CMP
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10463680
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
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Title:
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
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Patent #:
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Issue Dt:
|
02/14/2006
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Application #:
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10463721
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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ULTRASONIC WELDING METHOD FOR THE MANUFACTURE OF A POLISHING PAD COMPRISING AN OPTICALLY TRANSMISSIVE REGION
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Patent #:
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Issue Dt:
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02/14/2006
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Application #:
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10463730
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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POLISHING PAD WITH ORIENTED PORE STRUCTURE
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Patent #:
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Issue Dt:
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10/28/2008
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Application #:
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10543848
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Filing Dt:
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07/29/2005
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Publication #:
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Pub Dt:
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09/07/2006
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Title:
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METHOD OF POLISHING A SILICON-CONTAINING DIELECTRIC
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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10568727
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Filing Dt:
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02/17/2006
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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10610407
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Filing Dt:
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06/30/2003
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Publication #:
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Pub Dt:
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12/30/2004
| | | | |
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Title:
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CMP OF NOBLE METALS
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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10616335
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07/09/2003
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRY USEFUL FOR COPPER SUBSTRATES
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Patent #:
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Issue Dt:
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02/03/2009
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10660379
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09/11/2003
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Pub Dt:
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03/17/2005
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Title:
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CHEMICAL-MECHANICAL POLISHING COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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07/03/2007
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10660687
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09/11/2003
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Pub Dt:
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04/07/2005
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Title:
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SYSTEM FOR THE PREFERENTIAL REMOVAL OF SILICON OXIDE
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Issue Dt:
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03/27/2007
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10666797
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09/19/2003
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Pub Dt:
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03/24/2005
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Title:
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POLISHING PAD WITH RECESSED WINDOW
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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10743840
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Filing Dt:
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12/22/2003
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Pub Dt:
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06/23/2005
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Title:
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METHOD FOR CALIBRATING THE GEOMETRY OF A MULTI-AXIS METROLOGY SYSTEM
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10/30/2007
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10753138
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01/07/2004
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Pub Dt:
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07/07/2005
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Title:
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CHEMICAL-MECHANICAL POLISHING OF METALS IN AN OXIDIZED FORM
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Issue Dt:
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08/14/2007
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10755154
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01/09/2004
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Pub Dt:
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07/14/2005
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Title:
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POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER
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05/24/2005
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10792183
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03/03/2004
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Pub Dt:
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09/02/2004
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Title:
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MICROPOROUS POLISHING PADS
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Issue Dt:
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05/31/2005
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10792344
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03/03/2004
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09/16/2004
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Title:
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MICROPOROUS POLISHING PADS
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08/30/2005
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10792348
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03/03/2004
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09/02/2004
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MICROPOROUS POLISHING PADS
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03/27/2007
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10807064
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03/23/2004
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Pub Dt:
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09/29/2005
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Title:
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CMC POROUS PAD WITH COMPONENT-FILLED PORES
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06/13/2006
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10807079
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03/23/2004
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09/29/2005
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LOW SURFACE ENERGY CMP PAD
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04/17/2007
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10808827
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03/25/2004
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09/29/2005
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POLISHING PAD COMPRISING HYDROPHOBIC REGION AND ENDPOINT DETECTION PORT
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09/16/2008
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10810070
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03/25/2004
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01/13/2005
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CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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01/24/2006
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10826580
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04/16/2004
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10/07/2004
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ALCOHOL ABSORBED POLYALPHAOLEFIN DRAG REDUCING AGENTS
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05/17/2005
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10845804
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05/14/2004
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12/30/2004
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12/11/2007
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10855276
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05/27/2004
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11/18/2004
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07/24/2007
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10869397
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06/16/2004
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12/22/2005
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METHOD OF POLISHING A TUNGSTEN-CONTAINING SUBSTRATE
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04/03/2007
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10869605
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06/16/2004
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12/22/2005
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CONTINUOUS CONTOUR POLISHING OF A MULTI-MATERIAL SURFACE
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05/27/2008
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10897192
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07/21/2004
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01/26/2006
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METHODS FOR PRODUCING IN-SITU GROOVES IN CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS, AND NOVEL CMP PAD DESIGNS
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01/09/2007
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10901420
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07/28/2004
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02/02/2006
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POLISHING COMPOSITION FOR NOBLE METALS
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12/13/2011
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10931908
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09/01/2004
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03/02/2006
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POLISHING PAD WITH MICROPOROUS REGIONS
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07/21/2009
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10963108
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10/12/2004
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04/13/2006
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CMP COMPOSITION WITH A POLYMER ADDITIVE FOR POLISHING NOBLE METALS
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10/18/2011
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10974460
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10/27/2004
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04/27/2006
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Title:
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METAL ION-CONTAINING CMP COMPOSITION AND METHOD FOR USING THE SAME
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