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Total properties:
57
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Patent #:
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Issue Dt:
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05/06/2014
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Application #:
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12273028
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Filing Dt:
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11/18/2008
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Publication #:
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Pub Dt:
|
05/21/2009
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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12363059
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Filing Dt:
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01/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
08/06/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12367751
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Filing Dt:
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02/09/2009
|
|
Publication #:
|
|
Pub Dt:
|
08/20/2009
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND CEILING INSULATING PART
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Patent #:
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Issue Dt:
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12/09/2014
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Application #:
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12389431
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Filing Dt:
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02/20/2009
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|
Publication #:
|
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Pub Dt:
|
09/17/2009
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
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|
Patent #:
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|
Issue Dt:
|
12/11/2012
|
Application #:
|
12423582
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Filing Dt:
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04/14/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/22/2009
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Title:
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INFORMATION MANAGING METHOD, INFORMATION MANAGING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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03/19/2013
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Application #:
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12498639
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Filing Dt:
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07/07/2009
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|
Publication #:
|
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Pub Dt:
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02/04/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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|
Issue Dt:
|
06/03/2014
|
Application #:
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12510572
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Filing Dt:
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07/28/2009
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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09/10/2013
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Application #:
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12537017
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Filing Dt:
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08/06/2009
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Publication #:
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Pub Dt:
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03/04/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/26/2013
|
Application #:
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12548752
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Filing Dt:
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08/27/2009
|
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Publication #:
|
|
Pub Dt:
|
03/04/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/11/2013
|
Application #:
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12568175
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Filing Dt:
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09/28/2009
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Publication #:
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Pub Dt:
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04/01/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/09/2013
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Application #:
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12609541
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Filing Dt:
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10/30/2009
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Publication #:
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Pub Dt:
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05/20/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND TEMPERATURE CONTROLLING METHOD
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Patent #:
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Issue Dt:
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05/21/2013
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12619050
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Filing Dt:
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11/16/2009
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Publication #:
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Pub Dt:
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06/17/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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12631152
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Filing Dt:
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12/04/2009
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Publication #:
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Pub Dt:
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06/10/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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01/08/2013
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12632295
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Filing Dt:
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12/07/2009
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Publication #:
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Pub Dt:
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06/17/2010
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Title:
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Patent #:
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01/22/2013
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12647929
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12/28/2009
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08/05/2010
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Title:
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Patent #:
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07/09/2013
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12704910
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02/12/2010
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Publication #:
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Pub Dt:
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08/19/2010
| | | | |
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Title:
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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12707008
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Filing Dt:
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02/17/2010
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Publication #:
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Pub Dt:
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08/19/2010
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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04/29/2014
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12713585
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Filing Dt:
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02/26/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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Patent #:
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01/08/2013
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12717389
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Filing Dt:
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03/04/2010
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Publication #:
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Pub Dt:
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09/09/2010
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Title:
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Patent #:
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Issue Dt:
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09/30/2014
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12748920
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Filing Dt:
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03/29/2010
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Publication #:
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Pub Dt:
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01/27/2011
| | | | |
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Title:
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Patent #:
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12/08/2015
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05/19/2010
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12/02/2010
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Title:
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04/01/2014
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06/24/2010
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01/13/2011
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05/28/2013
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06/28/2010
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12/30/2010
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Title:
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03/26/2013
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06/28/2010
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01/06/2011
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06/23/2015
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07/19/2010
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Pub Dt:
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01/27/2011
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Title:
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07/30/2010
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02/03/2011
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01/19/2016
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08/24/2010
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03/10/2011
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01/28/2014
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09/01/2010
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03/24/2011
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09/17/2013
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09/17/2010
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04/07/2011
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02/23/2012
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12/06/2011
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03/29/2012
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12/06/2011
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03/29/2012
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03/21/2013
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09/03/2013
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09/17/2012
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01/17/2013
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05/06/2014
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11/06/2012
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03/14/2013
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06/03/2014
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05/16/2013
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11/20/2018
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08/13/2013
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12/12/2013
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10/28/2014
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10/18/2013
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05/01/2014
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12/08/2015
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02/19/2014
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06/19/2014
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09/20/2016
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07/14/2014
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10/30/2014
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07/05/2016
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04/01/2015
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07/23/2015
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Title:
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07/05/2016
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07/23/2015
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07/05/2016
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07/30/2015
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07/05/2016
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07/30/2015
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07/30/2015
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07/30/2015
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07/30/2015
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07/05/2016
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14681318
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04/08/2015
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08/06/2015
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10/18/2016
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05/28/2015
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09/17/2015
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05/03/2016
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08/27/2015
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12/24/2015
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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07/05/2016
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15011896
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02/01/2016
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05/26/2016
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10/25/2016
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15082145
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03/28/2016
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07/21/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE FOR FORMING FILM INCLUDING AT LEAST TWO DIFFERENT ELEMENTS
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Patent #:
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Issue Dt:
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09/13/2016
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Application #:
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15082156
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Filing Dt:
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03/28/2016
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Publication #:
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Pub Dt:
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07/21/2016
| | | | |
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE FOR FORMING FILM INCLUDING AT LEAST TWO DIFFERENT ELEMENTS
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Patent #:
|
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Issue Dt:
|
09/13/2016
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Application #:
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15082167
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Filing Dt:
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03/28/2016
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Publication #:
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Pub Dt:
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07/21/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE FOR FORMING FILM INCLUDING AT LEAST TWO DIFFERENT ELEMENTS
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Patent #:
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Issue Dt:
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11/08/2016
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Application #:
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15182722
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Filing Dt:
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06/15/2016
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Publication #:
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Pub Dt:
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10/13/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS CAPABLE OF FORMING FILMS INCLUDING AT LEAST TWO DIFFERENT ELEMENTS
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Patent #:
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Issue Dt:
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07/17/2018
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Application #:
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15216908
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Filing Dt:
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07/22/2016
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Publication #:
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Pub Dt:
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11/10/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS FOR FORMING FILM INCLUDING AT LEAST TWO DIFFERENT ELEMENTS
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