Total properties:
18
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Patent #:
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Issue Dt:
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06/02/2020
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Application #:
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15706871
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Filing Dt:
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09/18/2017
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Publication #:
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Pub Dt:
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01/24/2019
| | | | |
Title:
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SUBSTRATE PROCESSING SYSTEM
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Patent #:
|
|
Issue Dt:
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03/02/2021
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Application #:
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15866120
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Filing Dt:
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01/09/2018
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Publication #:
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Pub Dt:
|
03/21/2019
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2019
|
Application #:
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15881249
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Filing Dt:
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01/26/2018
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Publication #:
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|
Pub Dt:
|
03/14/2019
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
|
|
Issue Dt:
|
02/19/2019
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Application #:
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15903947
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Filing Dt:
|
02/23/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
|
|
Issue Dt:
|
01/14/2020
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Application #:
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15927476
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Filing Dt:
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03/21/2018
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Publication #:
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Pub Dt:
|
08/08/2019
| | | | |
Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
|
|
Issue Dt:
|
11/06/2018
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Application #:
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15940618
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Filing Dt:
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03/29/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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|
Patent #:
|
|
Issue Dt:
|
02/02/2021
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Application #:
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15982804
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Filing Dt:
|
05/17/2018
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Publication #:
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|
Pub Dt:
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11/22/2018
| | | | |
Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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|
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Patent #:
|
|
Issue Dt:
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04/21/2020
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Application #:
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15989657
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Filing Dt:
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05/25/2018
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Publication #:
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|
Pub Dt:
|
12/06/2018
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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16034959
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Filing Dt:
|
07/13/2018
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Publication #:
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|
Pub Dt:
|
01/24/2019
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER
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Patent #:
|
|
Issue Dt:
|
06/16/2020
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Application #:
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16046682
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Filing Dt:
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07/26/2018
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Publication #:
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Pub Dt:
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11/15/2018
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
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|
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Patent #:
|
|
Issue Dt:
|
03/09/2021
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Application #:
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16103611
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Filing Dt:
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08/14/2018
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Publication #:
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|
Pub Dt:
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01/03/2019
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
16109417
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Filing Dt:
|
08/22/2018
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Publication #:
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|
Pub Dt:
|
12/20/2018
| | | | |
Title:
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GAS SUPPLY NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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|
|
Patent #:
|
|
Issue Dt:
|
06/23/2020
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Application #:
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16111505
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Filing Dt:
|
08/24/2018
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Publication #:
|
|
Pub Dt:
|
01/03/2019
| | | | |
Title:
|
POWER GENERATION SYSTEM, MANAGEMENT DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
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16115179
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Filing Dt:
|
08/28/2018
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Publication #:
|
|
Pub Dt:
|
12/20/2018
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2022
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Application #:
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16136496
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Filing Dt:
|
09/20/2018
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Publication #:
|
|
Pub Dt:
|
01/17/2019
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING COVER
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|
|
Patent #:
|
|
Issue Dt:
|
08/31/2021
|
Application #:
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16139784
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Filing Dt:
|
09/24/2018
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Publication #:
|
|
Pub Dt:
|
01/24/2019
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
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|
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Patent #:
|
|
Issue Dt:
|
02/09/2021
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Application #:
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16141563
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Filing Dt:
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09/25/2018
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Publication #:
|
|
Pub Dt:
|
01/31/2019
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS HAVING GAS GUIDE CAPABLE OF SUPPRESSING GAS DIFFUSION
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
16144723
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Filing Dt:
|
09/27/2018
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Publication #:
|
|
Pub Dt:
|
07/18/2019
| | | | |
Title:
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
|
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