Patent Assignment Details
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| Reel/Frame: | 047881/0078 | |
| Pages: | 4 |
| | Recorded: | 01/02/2019 | | |
| Attorney Dkt #: | 201502699 PCT US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/27/2021
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Application #:
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15777837
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Filing Dt:
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05/21/2018
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Publication #:
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Pub Dt:
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11/22/2018
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Title:
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Composition and Process for Selectively Etching P-Doped Polysilicon Relative to Silicon Nitride
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Assignee
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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ENTEGRIS, INC.
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129 CONCORD ROAD
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BILLERICA, MA 01821
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