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Patent #:
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NONE
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Issue Dt:
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Application #:
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13402294
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Filing Dt:
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02/22/2012
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Publication #:
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Pub Dt:
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09/06/2012
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Title:
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SUBSTRATE PROCESSING SYSTEM, MANAGEMENT APPARATUS, DATA ANALYSIS METHOD
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Patent #:
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Issue Dt:
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05/14/2019
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Application #:
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13847209
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Filing Dt:
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03/19/2013
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Publication #:
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Pub Dt:
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09/26/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE PROGRAM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13850735
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Filing Dt:
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03/26/2013
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Publication #:
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Pub Dt:
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10/10/2013
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND EVAPORATION SYSTEM
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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14128804
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Filing Dt:
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03/10/2014
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Publication #:
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Pub Dt:
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06/26/2014
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Title:
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SUBSTRATE PROCESSING DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14140837
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Filing Dt:
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12/26/2013
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Publication #:
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Pub Dt:
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07/03/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND VAPORIZATION SYSTEM
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Patent #:
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Issue Dt:
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10/04/2022
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Application #:
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14293469
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Filing Dt:
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06/02/2014
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Publication #:
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Pub Dt:
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12/04/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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14388648
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Filing Dt:
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09/26/2014
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Publication #:
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Pub Dt:
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04/09/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS, METHOD OF MAINTAINING SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14408164
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Filing Dt:
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12/15/2014
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Publication #:
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Pub Dt:
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05/28/2015
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Title:
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SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, DATA PROCESSING METHOD, AND STORAGE MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14431152
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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09/10/2015
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Title:
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INTEGRATED MANAGEMENT SYSTEM, MANAGEMENT DEVICE, METHOD OF DISPLAYING INFORMATION FOR SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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07/02/2019
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Application #:
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14615073
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Filing Dt:
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02/05/2015
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Publication #:
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Pub Dt:
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08/06/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INSULATOR, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14650074
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Filing Dt:
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06/05/2015
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Publication #:
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Pub Dt:
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12/24/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND CONTROL PROGRAM
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Patent #:
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Issue Dt:
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07/28/2020
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Application #:
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14765774
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Filing Dt:
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08/04/2015
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Publication #:
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Pub Dt:
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12/24/2015
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Title:
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CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND CLEANING COMPLETION DETERMINING METHOD
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Patent #:
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Issue Dt:
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05/14/2019
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Application #:
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14790393
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Filing Dt:
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07/02/2015
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Publication #:
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Pub Dt:
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01/14/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Application #:
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14801984
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Filing Dt:
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07/17/2015
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Pub Dt:
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11/12/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Application #:
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14804653
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Filing Dt:
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07/21/2015
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Publication #:
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Pub Dt:
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01/28/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/31/2020
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Application #:
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14826756
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Filing Dt:
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08/14/2015
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Publication #:
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Pub Dt:
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02/25/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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09/03/2019
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14838682
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Filing Dt:
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08/28/2015
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Publication #:
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Pub Dt:
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12/24/2015
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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11/20/2018
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14845985
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Filing Dt:
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09/04/2015
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Publication #:
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Pub Dt:
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03/10/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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Application #:
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14848634
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09/09/2015
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Publication #:
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Pub Dt:
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03/17/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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NONE
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14856312
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09/16/2015
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Pub Dt:
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01/07/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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04/23/2019
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14903072
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01/06/2016
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Pub Dt:
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06/30/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, GAS-PURGING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM CONTAINING ABNORMALITY-PROCESSING PROGRAM
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05/14/2019
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14946965
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11/20/2015
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Pub Dt:
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03/17/2016
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Title:
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MANAGEMENT APPARATUS, SUBSTRATE PROCESSING SYSTEM AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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NONE
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14949714
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11/23/2015
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Pub Dt:
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03/17/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND FURNACE LID
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Patent #:
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07/16/2019
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14988078
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01/05/2016
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Pub Dt:
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07/07/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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NONE
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15006174
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01/26/2016
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Pub Dt:
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09/22/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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03/12/2019
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15052137
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02/24/2016
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Pub Dt:
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08/25/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
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08/25/2020
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15057954
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03/01/2016
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Publication #:
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Pub Dt:
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07/14/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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07/30/2019
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15067467
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03/11/2016
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Pub Dt:
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07/07/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND RECORDING MEDIUM
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Patent #:
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NONE
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15073084
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03/17/2016
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Pub Dt:
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09/29/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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15075707
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Filing Dt:
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03/21/2016
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Pub Dt:
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10/06/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
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Patent #:
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NONE
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15085459
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Filing Dt:
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03/30/2016
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Publication #:
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Pub Dt:
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11/03/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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15097382
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Filing Dt:
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04/13/2016
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Pub Dt:
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11/03/2016
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15128139
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Filing Dt:
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09/22/2016
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Publication #:
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Pub Dt:
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03/30/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING COVER
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Patent #:
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10/23/2018
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15141580
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Filing Dt:
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04/28/2016
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Publication #:
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Pub Dt:
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08/18/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
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Patent #:
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06/08/2021
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15175389
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06/07/2016
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Publication #:
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Pub Dt:
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12/15/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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05/11/2021
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Application #:
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15175533
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Filing Dt:
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06/07/2016
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Publication #:
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Pub Dt:
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12/15/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15187300
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Filing Dt:
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06/20/2016
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Publication #:
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Pub Dt:
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12/29/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
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Patent #:
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Issue Dt:
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12/24/2019
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15191151
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Filing Dt:
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06/23/2016
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Publication #:
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Pub Dt:
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10/13/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS AND GUIDE PORTION
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Issue Dt:
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05/19/2020
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Application #:
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15220979
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Filing Dt:
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07/27/2016
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Publication #:
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Pub Dt:
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02/02/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15255352
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Filing Dt:
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09/02/2016
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Publication #:
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Pub Dt:
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03/23/2017
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/17/2019
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15260907
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Filing Dt:
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09/09/2016
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Publication #:
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Pub Dt:
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12/29/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS INCLUDING HEATING AND COOLING DEVICE, AND CEILING PART INCLUDED IN THE SAME
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Patent #:
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NONE
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Application #:
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15273875
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Filing Dt:
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09/23/2016
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Publication #:
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Pub Dt:
|
01/12/2017
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/21/2019
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15275854
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Filing Dt:
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09/26/2016
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Publication #:
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Pub Dt:
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03/30/2017
| | | | |
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15366697
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Filing Dt:
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12/01/2016
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Publication #:
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Pub Dt:
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06/08/2017
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/31/2020
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Application #:
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15376944
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Filing Dt:
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12/13/2016
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Publication #:
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Pub Dt:
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06/15/2017
| | | | |
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15383903
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Filing Dt:
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12/19/2016
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Publication #:
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Pub Dt:
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04/06/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/25/2018
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Application #:
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15386859
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Filing Dt:
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12/21/2016
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Publication #:
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Pub Dt:
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04/13/2017
| | | | |
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE-PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15386994
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Filing Dt:
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12/21/2016
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Publication #:
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Pub Dt:
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06/29/2017
| | | | |
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15388815
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Filing Dt:
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12/22/2016
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Publication #:
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Pub Dt:
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06/29/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15401529
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Filing Dt:
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01/09/2017
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Publication #:
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Pub Dt:
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04/27/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15421162
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Filing Dt:
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01/31/2017
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Publication #:
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Pub Dt:
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08/03/2017
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Title:
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METHOD OF PROCESSING SUBSTRATE RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/04/2020
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15422018
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02/01/2017
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08/03/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS
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06/01/2021
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15432112
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02/14/2017
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08/17/2017
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SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE
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07/27/2021
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15444434
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02/28/2017
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10/05/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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01/22/2019
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15444878
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02/28/2017
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09/07/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS CAPABLE OF ADJUSTING FLOW RATE OF INERT GAS SUPPLIED TO SUBSTRATE
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08/25/2020
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15456646
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03/13/2017
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09/21/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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09/15/2020
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15458294
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03/14/2017
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09/21/2017
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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NONE
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15459772
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03/15/2017
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06/29/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS
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11/13/2018
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15460557
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03/16/2017
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10/05/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING AIR GAP BETWEEN WIRINGS FOR LOW DIELECTRIC CONSTANT
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10/22/2019
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15460603
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03/16/2017
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07/06/2017
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Title:
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PROCESSING APPARATUS, CONTROLLER AND PROCESSING SYSTEM
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04/16/2019
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15463085
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03/20/2017
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Pub Dt:
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10/12/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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05/14/2019
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15463243
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03/20/2017
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Pub Dt:
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11/30/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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NONE
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15464816
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03/21/2017
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07/06/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING PLASMA TO MODIFY SURFACE OF SILICON-CONTAINING FILMS EXPOSED IN TRENCH STRUCTURE, AND RECORDING MEDIUM
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02/01/2022
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15468906
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03/24/2017
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10/05/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND RECORDING MEDIUM
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11/17/2020
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15472450
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03/29/2017
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07/13/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS
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08/10/2021
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15472736
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03/29/2017
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10/19/2017
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Title:
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SUBSTRATE PROCESSING IN A PROCESS CHAMBER FOR SEMICONDUCTOR MANUFACTURING AND APPARATUS MANAGEMENT CONTROLLER WITH ERROR ANALYSIS
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11/13/2018
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15474138
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03/30/2017
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10/19/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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NONE
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15499559
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04/27/2017
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09/21/2017
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SUBSTRATE PROCESSING APPARATUS
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10/20/2020
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15513027
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03/21/2017
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10/12/2017
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Title:
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SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, AND REACTION TUBE
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NONE
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15513415
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03/22/2017
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10/26/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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04/30/2019
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15546136
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12/15/2017
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05/10/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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01/28/2020
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15591806
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05/10/2017
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08/24/2017
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Title:
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SUBSTRATE PROCESSING APPARATUS
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08/20/2019
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15613807
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06/05/2017
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12/07/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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02/05/2019
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15620280
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06/12/2017
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12/21/2017
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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04/14/2020
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15623887
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06/15/2017
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10/05/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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07/02/2019
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15627828
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06/20/2017
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Pub Dt:
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10/12/2017
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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10/22/2019
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15630472
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06/22/2017
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10/05/2017
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND RECORDING MEDIUM
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01/08/2019
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15631371
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06/23/2017
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12/28/2017
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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12/17/2019
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15632678
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06/26/2017
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10/12/2017
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SUBSTRATE PROCESSING APPARATUS
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12/24/2019
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15642791
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07/06/2017
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10/19/2017
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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07/21/2020
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15656862
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07/21/2017
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02/01/2018
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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01/14/2020
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15658584
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07/25/2017
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02/01/2018
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TEACHING JIG, SUBSTRATE PROCESSING APPARATUS, AND TEACHING METHOD
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02/25/2020
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15659967
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07/26/2017
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02/01/2018
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SUBSTRATE PROCESSING APPARATUS, LID COVER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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04/16/2019
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15665698
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08/01/2017
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02/08/2018
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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07/16/2019
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15665917
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08/01/2017
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11/23/2017
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SUBSTRATE TREATMENT APPARATUS INCLUDING REACTION TUBE WITH OPENED LOWER END, FURNACE OPENING MEMBER, AND FLANGE CONFIGURED TO COVER UPPER SURFACE OF THE FURNACE OPENING MEMBER
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07/04/2023
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15667106
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08/02/2017
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02/08/2018
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SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULATION MECHANISM
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12/25/2018
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15679366
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08/17/2017
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03/29/2018
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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09/03/2019
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15682730
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08/22/2017
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12/07/2017
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SUBSTRATE-PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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10/30/2018
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15687717
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08/28/2017
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08/16/2018
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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NONE
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15687950
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08/28/2017
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09/27/2018
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SUBSTRATE PROCESSING APPARATUS
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05/11/2021
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15692187
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08/31/2017
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03/29/2018
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SUBSTRATE PROCESSING APPARATUS, NOZZLE BASE, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
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10/27/2020
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15696220
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09/06/2017
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08/09/2018
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SUBSTRATE PROCESSING APPARATUS
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07/12/2022
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15697818
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09/07/2017
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03/15/2018
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SUBSTRATE PROCESSING APPARATUS
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12/18/2018
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15701977
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09/12/2017
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06/14/2018
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SUBSTRATE PROCESSING APPARATUS
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11/06/2018
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15704603
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09/14/2017
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06/28/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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NONE
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15706028
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09/15/2017
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03/29/2018
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SUBSTRATE PROCESSING APPARATUS AND HEAT INSULATING PIPE STRUCTURE
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05/21/2019
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15708326
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09/19/2017
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01/25/2018
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SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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12/08/2020
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15708597
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09/19/2017
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05/03/2018
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SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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09/17/2019
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15789311
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10/20/2017
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02/08/2018
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND THERMOCOUPLE SUPPORT
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06/14/2022
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15816125
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11/17/2017
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05/24/2018
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REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
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