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Patent #:
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Issue Dt:
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07/04/2017
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Application #:
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14490239
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Filing Dt:
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09/18/2014
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Publication #:
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Pub Dt:
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04/02/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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14493828
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Filing Dt:
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09/23/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14494085
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Filing Dt:
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09/23/2014
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Publication #:
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Pub Dt:
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10/15/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
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Patent #:
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Issue Dt:
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11/29/2016
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Application #:
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14495226
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Filing Dt:
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09/24/2014
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Publication #:
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Pub Dt:
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03/26/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY ALTERNATIVELY INCREASING AND DECREASING PRESSURE OF PROCESS CHAMBER
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Patent #:
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Issue Dt:
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06/30/2015
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Application #:
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14495388
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Filing Dt:
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09/24/2014
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Publication #:
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Pub Dt:
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04/02/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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02/28/2017
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Application #:
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14496660
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Filing Dt:
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09/25/2014
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Publication #:
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Pub Dt:
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04/23/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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14499952
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Filing Dt:
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09/29/2014
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Publication #:
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Pub Dt:
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04/02/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/23/2017
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Application #:
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14500338
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Filing Dt:
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09/29/2014
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14501606
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Filing Dt:
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09/30/2014
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Publication #:
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Pub Dt:
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04/23/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/23/2015
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Application #:
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14502044
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Filing Dt:
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09/30/2014
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Publication #:
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Pub Dt:
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06/04/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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03/07/2017
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Application #:
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14551900
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Filing Dt:
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11/24/2014
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Publication #:
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Pub Dt:
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06/04/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/29/2016
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Application #:
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14566989
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Filing Dt:
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12/11/2014
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Publication #:
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Pub Dt:
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08/06/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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03/08/2016
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Application #:
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14582646
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Filing Dt:
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12/24/2014
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Publication #:
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Pub Dt:
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07/02/2015
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Title:
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FILM FORMING METHOD AND RECORDING MEDIUM FOR PERFORMING THE METHOD
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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14591544
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Filing Dt:
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01/07/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/30/2016
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Application #:
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14595046
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Filing Dt:
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01/12/2015
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Publication #:
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Pub Dt:
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05/07/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14601634
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Filing Dt:
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01/21/2015
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Publication #:
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Pub Dt:
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07/23/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, INCLUDING FILM HAVING UNIFORM THICKNESS
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Patent #:
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Issue Dt:
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03/07/2017
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Application #:
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14605157
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Filing Dt:
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01/26/2015
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Publication #:
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Pub Dt:
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05/14/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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14608937
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Filing Dt:
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01/29/2015
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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02/20/2018
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Application #:
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14613926
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Filing Dt:
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02/04/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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14619318
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Filing Dt:
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02/11/2015
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Publication #:
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Pub Dt:
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08/13/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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03/07/2017
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Application #:
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14622115
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Filing Dt:
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02/13/2015
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Publication #:
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Pub Dt:
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08/20/2015
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Title:
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CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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02/13/2018
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Application #:
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14628963
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Filing Dt:
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02/23/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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10/18/2016
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Application #:
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14629338
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Filing Dt:
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02/23/2015
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL AND METHOD OF MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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14629345
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Filing Dt:
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02/23/2015
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL, METHOD AND APPARATUS FOR MANUFACTURING THE SAME
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Patent #:
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Issue Dt:
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04/04/2017
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Application #:
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14634280
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Filing Dt:
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02/27/2015
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Publication #:
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Pub Dt:
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09/10/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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03/28/2017
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Application #:
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14638396
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Filing Dt:
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03/04/2015
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Publication #:
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Pub Dt:
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06/25/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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02/23/2016
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Application #:
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14661970
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Filing Dt:
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03/18/2015
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Publication #:
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Pub Dt:
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07/09/2015
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/09/2016
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Application #:
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14665781
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Filing Dt:
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03/23/2015
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Publication #:
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Pub Dt:
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09/24/2015
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Title:
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REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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14666969
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Filing Dt:
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03/24/2015
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Publication #:
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Pub Dt:
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10/01/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/16/2016
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Application #:
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14667063
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Filing Dt:
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03/24/2015
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Publication #:
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Pub Dt:
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10/01/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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14667323
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Filing Dt:
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03/24/2015
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Publication #:
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Pub Dt:
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09/24/2015
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14668714
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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14668721
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/02/2016
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Application #:
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14668725
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14669462
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Filing Dt:
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03/26/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/15/2017
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Application #:
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14671211
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Filing Dt:
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03/27/2015
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Publication #:
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Pub Dt:
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03/03/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/20/2018
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Application #:
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14671504
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Filing Dt:
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03/27/2015
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Publication #:
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Pub Dt:
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10/22/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, USING HYDROCARBON AND HALOGEN-BASED PRECURSORS, SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SAME, AND RECORDING MEDIUM COMPRISING HYDROCARBON AND HALOGEN-BASED PRECURSORS
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Patent #:
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Issue Dt:
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01/16/2018
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Application #:
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14672795
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Filing Dt:
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03/30/2015
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Publication #:
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Pub Dt:
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01/07/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/03/2016
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Application #:
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14677199
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Filing Dt:
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04/02/2015
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Publication #:
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Pub Dt:
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10/08/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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02/16/2016
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Application #:
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14681055
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Filing Dt:
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04/07/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14681065
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Filing Dt:
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04/07/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14681067
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Filing Dt:
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04/07/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/16/2017
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Application #:
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14697274
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Filing Dt:
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04/27/2015
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Publication #:
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Pub Dt:
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08/13/2015
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Title:
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METHOD OF FORMING METAL-CONTAINING FILM
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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14708004
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Filing Dt:
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05/08/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14719097
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Filing Dt:
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05/21/2015
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Publication #:
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Pub Dt:
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09/10/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/09/2016
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Application #:
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14725865
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Filing Dt:
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05/29/2015
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Publication #:
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Pub Dt:
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09/17/2015
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Title:
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METHOD OF MANUFACTURING A SIOCN FILM, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/22/2017
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Application #:
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14728728
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Filing Dt:
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06/02/2015
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Publication #:
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Pub Dt:
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12/10/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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07/12/2016
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Application #:
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14747674
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Filing Dt:
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06/23/2015
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Publication #:
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Pub Dt:
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10/08/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/17/2016
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Application #:
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14752131
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Filing Dt:
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06/26/2015
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Publication #:
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Pub Dt:
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12/31/2015
| | | | |
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Title:
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CLEANING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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10/10/2017
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Application #:
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14778170
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Filing Dt:
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09/18/2015
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Publication #:
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Pub Dt:
|
09/29/2016
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|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2017
|
Application #:
|
14781074
|
Filing Dt:
|
09/29/2015
|
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14791990
|
Filing Dt:
|
07/06/2015
|
|
Publication #:
|
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Pub Dt:
|
10/29/2015
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2017
|
Application #:
|
14794519
|
Filing Dt:
|
07/08/2015
|
|
Publication #:
|
|
Pub Dt:
|
01/14/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/22/2018
|
Application #:
|
14804604
|
Filing Dt:
|
07/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
01/28/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING FORMING A FILM CONTAINING A FIRST ELEMENT, A SECOND ELEMENT AND CARBON, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/21/2017
|
Application #:
|
14805104
|
Filing Dt:
|
07/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
11/26/2015
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2018
|
Application #:
|
14805506
|
Filing Dt:
|
07/22/2015
|
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
14807670
|
Filing Dt:
|
07/23/2015
|
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/2016
|
Application #:
|
14810996
|
Filing Dt:
|
07/28/2015
|
|
Publication #:
|
|
Pub Dt:
|
08/11/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2016
|
Application #:
|
14832496
|
Filing Dt:
|
08/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
02/25/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/2017
|
Application #:
|
14838793
|
Filing Dt:
|
08/28/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2017
|
Application #:
|
14839179
|
Filing Dt:
|
08/28/2015
|
|
Publication #:
|
|
Pub Dt:
|
12/24/2015
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
14856244
|
Filing Dt:
|
09/16/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/17/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14856881
|
Filing Dt:
|
09/17/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
|
Title:
|
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2018
|
Application #:
|
14859855
|
Filing Dt:
|
09/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
04/07/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2017
|
Application #:
|
14859924
|
Filing Dt:
|
09/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2016
|
Application #:
|
14861051
|
Filing Dt:
|
09/22/2015
|
|
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2016
|
Application #:
|
14864167
|
Filing Dt:
|
09/24/2015
|
|
Publication #:
|
|
Pub Dt:
|
01/14/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2017
|
Application #:
|
14886768
|
Filing Dt:
|
10/19/2015
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/09/2018
|
Application #:
|
14914142
|
Filing Dt:
|
02/24/2016
|
|
Publication #:
|
|
Pub Dt:
|
07/21/2016
| | | | |
|
Title:
|
MAINTENANCE METHOD OF SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM CAPABLE OF READING MAINTENANCE PROGRAM OF SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2016
|
Application #:
|
14929973
|
Filing Dt:
|
11/02/2015
|
|
Publication #:
|
|
Pub Dt:
|
05/19/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, GAS SUPPLY SYSTEM, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
14939901
|
Filing Dt:
|
11/12/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2016
|
Application #:
|
14958517
|
Filing Dt:
|
12/03/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
14975987
|
Filing Dt:
|
12/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14979898
|
Filing Dt:
|
12/28/2015
|
|
Publication #:
|
|
Pub Dt:
|
03/30/2017
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2017
|
Application #:
|
14994334
|
Filing Dt:
|
01/13/2016
|
|
Publication #:
|
|
Pub Dt:
|
07/14/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/28/2018
|
Application #:
|
15010333
|
Filing Dt:
|
01/29/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/04/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2016
|
Application #:
|
15010682
|
Filing Dt:
|
01/29/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/04/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
15011033
|
Filing Dt:
|
01/29/2016
|
|
Publication #:
|
|
Pub Dt:
|
06/02/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
15011117
|
Filing Dt:
|
01/29/2016
|
|
Publication #:
|
|
Pub Dt:
|
06/02/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
15015461
|
Filing Dt:
|
02/04/2016
|
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
15024539
|
Filing Dt:
|
03/24/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2018
|
Application #:
|
15051740
|
Filing Dt:
|
02/24/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
15053489
|
Filing Dt:
|
02/25/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2017
|
Application #:
|
15066081
|
Filing Dt:
|
03/10/2016
|
|
Publication #:
|
|
Pub Dt:
|
03/30/2017
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
15067790
|
Filing Dt:
|
03/11/2016
|
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
15070387
|
Filing Dt:
|
03/15/2016
|
|
Publication #:
|
|
Pub Dt:
|
09/29/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2017
|
Application #:
|
15070640
|
Filing Dt:
|
03/15/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/03/2017
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2017
|
Application #:
|
15078253
|
Filing Dt:
|
03/23/2016
|
|
Publication #:
|
|
Pub Dt:
|
07/14/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2017
|
Application #:
|
15084847
|
Filing Dt:
|
03/30/2016
|
|
Publication #:
|
|
Pub Dt:
|
07/21/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2018
|
Application #:
|
15124915
|
Filing Dt:
|
09/09/2016
|
|
Publication #:
|
|
Pub Dt:
|
01/19/2017
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2018
|
Application #:
|
15141580
|
Filing Dt:
|
04/28/2016
|
|
Publication #:
|
|
Pub Dt:
|
08/18/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/2017
|
Application #:
|
15170352
|
Filing Dt:
|
06/01/2016
|
|
Publication #:
|
|
Pub Dt:
|
12/08/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2017
|
Application #:
|
15190578
|
Filing Dt:
|
06/23/2016
|
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND GAS SUPPLY SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2017
|
Application #:
|
15191055
|
Filing Dt:
|
06/23/2016
|
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2017
|
Application #:
|
15195086
|
Filing Dt:
|
06/28/2016
|
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/2017
|
Application #:
|
15202168
|
Filing Dt:
|
07/05/2016
|
|
Publication #:
|
|
Pub Dt:
|
10/27/2016
| | | | |
|
Title:
|
METHOD OF MANUFACTURING A SIOCN FILM, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2018
|
Application #:
|
15204781
|
Filing Dt:
|
07/07/2016
|
|
Publication #:
|
|
Pub Dt:
|
01/12/2017
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2018
|
Application #:
|
15211583
|
Filing Dt:
|
07/15/2016
|
|
Publication #:
|
|
Pub Dt:
|
02/23/2017
| | | | |
|
Title:
|
GAS SUPPLY NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2017
|
Application #:
|
15216956
|
Filing Dt:
|
07/22/2016
|
|
Publication #:
|
|
Pub Dt:
|
01/26/2017
| | | | |
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
15223020
|
Filing Dt:
|
07/29/2016
|
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
