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Reel/Frame:048008/0206   Pages: 23
Recorded: 12/31/2018
Attorney Dkt #:HKEI TO KEC -SCHEDULE D
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 350
Page 1 of 4
Pages: 1 2 3 4
1
Patent #:
6238512
Issue Dt:
05/29/2001
Application #:
09234488
Filing Dt:
01/21/1999
Title:
PLASMA GENERATION APPARATUS
2
Patent #:
6380684
Issue Dt:
04/30/2002
Application #:
09573253
Filing Dt:
05/18/2000
Title:
PLASMA GENERATING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
3
Patent #:
6527884
Issue Dt:
03/04/2003
Application #:
09708204
Filing Dt:
11/07/2000
Title:
HYDROGEN ANNEALING PROCESS AND APPARATUS THEREFOR
4
Patent #:
6727654
Issue Dt:
04/27/2004
Application #:
09756873
Filing Dt:
01/10/2001
Publication #:
US20020047536
Pub Dt:
04/25/2002
Title:
PLASMA PROCESSING APPARATUS
5
Patent #:
6555421
Issue Dt:
04/29/2003
Application #:
09758238
Filing Dt:
01/12/2001
Publication #:
US20010008782
Pub Dt:
07/19/2001
Title:
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
6
Patent #:
6875280
Issue Dt:
04/05/2005
Application #:
09780951
Filing Dt:
02/09/2001
Publication #:
US20010025600
Pub Dt:
10/04/2001
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
7
Patent #:
6548404
Issue Dt:
04/15/2003
Application #:
09819653
Filing Dt:
03/29/2001
Publication #:
US20010026963
Pub Dt:
10/04/2001
Title:
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
8
Patent #:
6828235
Issue Dt:
12/07/2004
Application #:
09819690
Filing Dt:
03/29/2001
Publication #:
US20020020344
Pub Dt:
02/21/2002
Title:
SEMICONDUCTOR MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS
9
Patent #:
6540465
Issue Dt:
04/01/2003
Application #:
09823280
Filing Dt:
03/29/2001
Publication #:
US20010052325
Pub Dt:
12/20/2001
Title:
SUBSTRATE PROCESSING APPARATUS
10
Patent #:
6641350
Issue Dt:
11/04/2003
Application #:
09834913
Filing Dt:
04/16/2001
Publication #:
US20010038783
Pub Dt:
11/08/2001
Title:
DUAL LOADING PORT SEMICONDUCTOR PROCESSING EQUIPMENT
11
Patent #:
7225046
Issue Dt:
05/29/2007
Application #:
09901577
Filing Dt:
07/11/2001
Publication #:
US20020064138
Pub Dt:
05/30/2002
Title:
SEMICONDUCTOR MANUFACTURING APPARATUS, REMOTE CONTROL SYSTEM THEREFOR, AND REMOTE OPERATION DEVICE
12
Patent #:
6540469
Issue Dt:
04/01/2003
Application #:
09945643
Filing Dt:
09/05/2001
Publication #:
US20020037210
Pub Dt:
03/28/2002
Title:
SUBSTRATE PROCESSING APPARATUS
13
Patent #:
6576481
Issue Dt:
06/10/2003
Application #:
09962112
Filing Dt:
09/26/2001
Publication #:
US20020072211
Pub Dt:
06/13/2002
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
14
Patent #:
6638860
Issue Dt:
10/28/2003
Application #:
09963382
Filing Dt:
09/27/2001
Publication #:
US20020037645
Pub Dt:
03/28/2002
Title:
METHOD AND APPARATUS FOR PROCESSING SUBSTRATES AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
15
Patent #:
6461961
Issue Dt:
10/08/2002
Application #:
09963665
Filing Dt:
09/27/2001
Publication #:
US20020055254
Pub Dt:
05/09/2002
Title:
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES WITH RUTHENIUM FILMS FORMED BY CVD USING AN OXYGEN-CONTAINING REACTANT GAS
16
Patent #:
6746908
Issue Dt:
06/08/2004
Application #:
09964863
Filing Dt:
09/28/2001
Publication #:
US20020055080
Pub Dt:
05/09/2002
Title:
TEMPERATURE CONTROLLING METHOD, THERMAL TREATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
17
Patent #:
6541344
Issue Dt:
04/01/2003
Application #:
09981629
Filing Dt:
10/16/2001
Publication #:
US20020072165
Pub Dt:
06/13/2002
Title:
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
18
Patent #:
6503079
Issue Dt:
01/07/2003
Application #:
10041617
Filing Dt:
01/10/2002
Publication #:
US20020094502
Pub Dt:
07/18/2002
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
19
Patent #:
7472387
Issue Dt:
12/30/2008
Application #:
10050101
Filing Dt:
01/18/2002
Publication #:
US20020111708
Pub Dt:
08/15/2002
Title:
SYSTEM FOR SUPPLYING SEMICONDUCTOR MANUFACTURING SYSTEM CONTROL PROGRAMS
20
Patent #:
6482753
Issue Dt:
11/19/2002
Application #:
10095072
Filing Dt:
03/12/2002
Publication #:
US20020168854
Pub Dt:
11/14/2002
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
21
Patent #:
6495473
Issue Dt:
12/17/2002
Application #:
10098472
Filing Dt:
03/18/2002
Publication #:
US20020168877
Pub Dt:
11/14/2002
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
22
Patent #:
6872636
Issue Dt:
03/29/2005
Application #:
10100922
Filing Dt:
03/20/2002
Publication #:
US20020168866
Pub Dt:
11/14/2002
Title:
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE
23
Patent #:
6664184
Issue Dt:
12/16/2003
Application #:
10175471
Filing Dt:
06/18/2002
Publication #:
US20030017701
Pub Dt:
01/23/2003
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE HAVING AN ETCHING TREATMENT
24
Patent #:
6863734
Issue Dt:
03/08/2005
Application #:
10197398
Filing Dt:
07/18/2002
Publication #:
US20030022402
Pub Dt:
01/30/2003
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
25
Patent #:
6864463
Issue Dt:
03/08/2005
Application #:
10210558
Filing Dt:
07/31/2002
Publication #:
US20030027364
Pub Dt:
02/06/2003
Title:
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING METHOD
26
Patent #:
6767752
Issue Dt:
07/27/2004
Application #:
10212146
Filing Dt:
08/06/2002
Publication #:
US20030040198
Pub Dt:
02/27/2003
Title:
TEMPERATURE CONTROL METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
27
Patent #:
6686281
Issue Dt:
02/03/2004
Application #:
10234520
Filing Dt:
09/05/2002
Publication #:
US20030119288
Pub Dt:
06/26/2003
Title:
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND A SUBSTRATE PROCESSING APPARATUS
28
Patent #:
6905963
Issue Dt:
06/14/2005
Application #:
10255715
Filing Dt:
09/27/2002
Publication #:
US20030077920
Pub Dt:
04/24/2003
Title:
FABRICATION OF B-DOPED SILICON FILM BY LPCVD METHOD USING BCI3 AND SIH4 GASES
29
Patent #:
6720274
Issue Dt:
04/13/2004
Application #:
10291474
Filing Dt:
11/12/2002
Publication #:
US20030092283
Pub Dt:
05/15/2003
Title:
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND A SUBSTRATE PROCESSING APPARATUS
30
Patent #:
7077913
Issue Dt:
07/18/2006
Application #:
10345190
Filing Dt:
01/16/2003
Publication #:
US20030150386
Pub Dt:
08/14/2003
Title:
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE
31
Patent #:
6949474
Issue Dt:
09/27/2005
Application #:
10359127
Filing Dt:
02/06/2003
Publication #:
US20040007185
Pub Dt:
01/15/2004
Title:
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR MANUFACTURE SYSTEM
32
Patent #:
6884738
Issue Dt:
04/26/2005
Application #:
10372245
Filing Dt:
02/25/2003
Publication #:
US20030181060
Pub Dt:
09/25/2003
Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
33
Patent #:
6790793
Issue Dt:
09/14/2004
Application #:
10375130
Filing Dt:
02/28/2003
Publication #:
US20030224615
Pub Dt:
12/04/2003
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
34
Patent #:
6787481
Issue Dt:
09/07/2004
Application #:
10375131
Filing Dt:
02/28/2003
Publication #:
US20040009678
Pub Dt:
01/15/2004
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
35
Patent #:
6737613
Issue Dt:
05/18/2004
Application #:
10395179
Filing Dt:
03/25/2003
Publication #:
US20030183614
Pub Dt:
10/02/2003
Title:
HEAT TREATMENT APPARATUS AND METHOD FOR PROCESSING SUBSTRATES
36
Patent #:
6905549
Issue Dt:
06/14/2005
Application #:
10411092
Filing Dt:
04/11/2003
Publication #:
US20030213435
Pub Dt:
11/20/2003
Title:
VERTICAL TYPE SEMICONDUCTOR DEVICE PRODUCING APPARATUS
37
Patent #:
6825126
Issue Dt:
11/30/2004
Application #:
10422859
Filing Dt:
04/25/2003
Publication #:
US20040043544
Pub Dt:
03/04/2004
Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
38
Patent #:
7737034
Issue Dt:
06/15/2010
Application #:
10517765
Filing Dt:
02/03/2006
Publication #:
US20060205213
Pub Dt:
09/14/2006
Title:
SUBSTRATE TREATING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
39
Patent #:
7524766
Issue Dt:
04/28/2009
Application #:
10521248
Filing Dt:
04/11/2005
Publication #:
US20050250341
Pub Dt:
11/10/2005
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
40
Patent #:
7667301
Issue Dt:
02/23/2010
Application #:
10528069
Filing Dt:
07/10/2006
Publication #:
US20070194411
Pub Dt:
08/23/2007
Title:
THERMAL TREATMENT APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE
41
Patent #:
8057599
Issue Dt:
11/15/2011
Application #:
10528137
Filing Dt:
12/12/2005
Publication #:
US20060150904
Pub Dt:
07/13/2006
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
42
Patent #:
7824496
Issue Dt:
11/02/2010
Application #:
10548877
Filing Dt:
06/16/2006
Publication #:
US20070170088
Pub Dt:
07/26/2007
Title:
CONTAINER, CONTAINER PRODUCING METHOD, SUBSTRATE PROCESSING DEVICE, AND SEMICONDUCTOR DEVICE PRODUCING METHOD
43
Patent #:
7534730
Issue Dt:
05/19/2009
Application #:
10549938
Filing Dt:
01/03/2007
Publication #:
US20070157882
Pub Dt:
07/12/2007
Title:
PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
44
Patent #:
7346273
Issue Dt:
03/18/2008
Application #:
10550202
Filing Dt:
10/20/2005
Publication #:
US20060188240
Pub Dt:
08/24/2006
Title:
SUBSTRATE PROCESSING EQUIPMENT
45
Patent #:
7494941
Issue Dt:
02/24/2009
Application #:
10571349
Filing Dt:
07/12/2006
Publication #:
US20070032045
Pub Dt:
02/08/2007
Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING APPARATUS
46
Patent #:
7958842
Issue Dt:
06/14/2011
Application #:
10571898
Filing Dt:
10/15/2007
Publication #:
US20080153308
Pub Dt:
06/26/2008
Title:
SUBSTRATE PROCESSING APPARATUS
47
Patent #:
7955991
Issue Dt:
06/07/2011
Application #:
10572396
Filing Dt:
06/06/2007
Publication #:
US20070259532
Pub Dt:
11/08/2007
Title:
PRODUCING METHOD OF A SEMICONDUCTOR DEVICE USING CVD PROCESSING
48
Patent #:
7455734
Issue Dt:
11/25/2008
Application #:
10574568
Filing Dt:
08/07/2006
Publication #:
US20070007646
Pub Dt:
01/11/2007
Title:
SUBSTRATE PROCESSING APPARATUS , SUBSTRATE HOLDER, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
49
Patent #:
7531467
Issue Dt:
05/12/2009
Application #:
10574571
Filing Dt:
04/28/2006
Publication #:
US20070042581
Pub Dt:
02/22/2007
Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
50
Patent #:
7556839
Issue Dt:
07/07/2009
Application #:
10587500
Filing Dt:
07/27/2006
Publication #:
US20070178669
Pub Dt:
08/02/2007
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR PROCESSING SUBSTRATE
51
Patent #:
8197638
Issue Dt:
06/12/2012
Application #:
10589490
Filing Dt:
05/22/2007
Publication #:
US20080017111
Pub Dt:
01/24/2008
Title:
SEMICONDUCTOR MANUFACTURING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES
52
Patent #:
7491662
Issue Dt:
02/17/2009
Application #:
10590521
Filing Dt:
08/24/2006
Publication #:
US20070184636
Pub Dt:
08/09/2007
Title:
SUBSTRATE PROCESSING APPARATUS
53
Patent #:
7950348
Issue Dt:
05/31/2011
Application #:
10592348
Filing Dt:
10/11/2007
Publication #:
US20080153309
Pub Dt:
06/26/2008
Title:
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING METHOD
54
Patent #:
9111972
Issue Dt:
08/18/2015
Application #:
10593282
Filing Dt:
04/22/2008
Publication #:
US20080236488
Pub Dt:
10/02/2008
Title:
Substrate Processing Apparatus and Manufacturing Method for a Semiconductor Device
55
Patent #:
6927165
Issue Dt:
08/09/2005
Application #:
10674345
Filing Dt:
10/01/2003
Publication #:
US20040177926
Pub Dt:
09/16/2004
Title:
METHOD AND APPARATUS FOR PROCESSING SUBSTRATES AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
56
Patent #:
7112819
Issue Dt:
09/26/2006
Application #:
10829300
Filing Dt:
04/22/2004
Publication #:
US20050001212
Pub Dt:
01/06/2005
Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
57
Patent #:
7003219
Issue Dt:
02/21/2006
Application #:
10915463
Filing Dt:
08/11/2004
Publication #:
US20050008352
Pub Dt:
01/13/2005
Title:
SUBSTRATE PROCESSING METHOD
58
Patent #:
7553518
Issue Dt:
06/30/2009
Application #:
11296440
Filing Dt:
12/08/2005
Publication #:
US20060081334
Pub Dt:
04/20/2006
Title:
SUBSTRATE PROCESSING METHOD
59
Patent #:
7501347
Issue Dt:
03/10/2009
Application #:
11446137
Filing Dt:
06/05/2006
Publication #:
US20060281298
Pub Dt:
12/14/2006
Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
60
Patent #:
7648578
Issue Dt:
01/19/2010
Application #:
11547137
Filing Dt:
12/08/2006
Title:
SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
61
Patent #:
7865070
Issue Dt:
01/04/2011
Application #:
11578963
Filing Dt:
08/02/2007
Publication #:
US20080267598
Pub Dt:
10/30/2008
Title:
HEAT TREATING APPARATUS
62
Patent #:
7891975
Issue Dt:
02/22/2011
Application #:
11658160
Filing Dt:
01/23/2007
Publication #:
US20070297876
Pub Dt:
12/27/2007
Title:
HEAT TREATMENT APPARATUS AND METHOD OF MANUFACTURING SUBSTRATE
63
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8257013
Issue Dt:
09/04/2012
Application #:
11662198
Filing Dt:
05/09/2007
Publication #:
US20080019809
Pub Dt:
01/24/2008
Title:
SUBSTRATE TREATMENT APPARATUS
64
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8963051
Issue Dt:
02/24/2015
Application #:
11662573
Filing Dt:
06/14/2007
Publication #:
US20080190910
Pub Dt:
08/14/2008
Title:
Heat Treatment Apparatus and Method of Manufacturing Substrates
65
Patent #:
7751922
Issue Dt:
07/06/2010
Application #:
11662631
Filing Dt:
04/03/2007
Publication #:
US20080127467
Pub Dt:
06/05/2008
Title:
SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING OF A SEMICONDUCTOR DEVICE
66
Patent #:
7579276
Issue Dt:
08/25/2009
Application #:
11663179
Filing Dt:
05/03/2007
Publication #:
US20070264840
Pub Dt:
11/15/2007
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
67
Patent #:
7577493
Issue Dt:
08/18/2009
Application #:
11663198
Filing Dt:
05/29/2007
Publication #:
US20080046110
Pub Dt:
02/21/2008
Title:
TEMPERATURE REGULATING METHOD, THERMAL PROCESSING SYSTEM AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
68
Patent #:
7795156
Issue Dt:
09/14/2010
Application #:
11664287
Filing Dt:
08/10/2007
Publication #:
US20070298622
Pub Dt:
12/27/2007
Title:
PRODUCING METHOD OF SEMICONDUCTOR DEVICE
69
Patent #:
7892983
Issue Dt:
02/22/2011
Application #:
11664726
Filing Dt:
11/29/2007
Publication #:
US20080166882
Pub Dt:
07/10/2008
Title:
SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTOR DEVICE
70
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7731797
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06/08/2010
Application #:
11665217
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10/02/2007
Publication #:
US20080134977
Pub Dt:
06/12/2008
Title:
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
71
Patent #:
7779785
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08/24/2010
Application #:
11666360
Filing Dt:
11/30/2007
Publication #:
US20080124945
Pub Dt:
05/29/2008
Title:
PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
72
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8293646
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10/23/2012
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11667078
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10/21/2008
Publication #:
US20090117752
Pub Dt:
05/07/2009
Title:
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
73
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8028652
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10/04/2011
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11688730
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03/20/2007
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US20070246355
Pub Dt:
10/25/2007
Title:
BATCH-TYPE REMOTE PLASMA PROCESSING APPARATUS
74
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7432215
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10/07/2008
Application #:
11762033
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06/12/2007
Publication #:
US20070238292
Pub Dt:
10/11/2007
Title:
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
75
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8453600
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06/04/2013
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11792864
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04/25/2008
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US20090071405
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03/19/2009
Title:
Substrate Processing Apparatus
76
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8251012
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08/28/2012
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Assignor
1
HITACHI KOKUSAI ELECTRIC INC.
Exec Dt:
12/05/2018
Assignee
1
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondence name and address
VOLPE & KOENIG, P.C.
30 SOUTH 17TH STREET
SUITE 1800
PHILADELPHIA, PA 19103

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