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10/27/2015
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14490882
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Filing Dt:
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09/19/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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05/17/2016
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14491709
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09/19/2014
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Pub Dt:
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09/24/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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10/20/2015
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14498023
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Filing Dt:
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09/26/2014
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Pub Dt:
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04/02/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/22/2016
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Application #:
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14498392
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Filing Dt:
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09/26/2014
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Pub Dt:
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06/04/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14503707
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Filing Dt:
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10/01/2014
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Publication #:
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Pub Dt:
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07/02/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/24/2015
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Application #:
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14553222
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Filing Dt:
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11/25/2014
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Publication #:
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Pub Dt:
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05/28/2015
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Title:
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Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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14597372
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Filing Dt:
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01/15/2015
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Publication #:
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Pub Dt:
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05/07/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14614625
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Filing Dt:
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02/05/2015
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Publication #:
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Pub Dt:
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05/28/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14622126
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Filing Dt:
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02/13/2015
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Publication #:
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Pub Dt:
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06/11/2015
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Title:
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Method of Manufacturing Semiconductor Device
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Patent #:
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Issue Dt:
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09/01/2015
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Application #:
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14623495
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Filing Dt:
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02/16/2015
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Publication #:
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Pub Dt:
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06/11/2015
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Title:
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SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SYSTEM OF PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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05/15/2018
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Application #:
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14636712
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Filing Dt:
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03/03/2015
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Publication #:
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Pub Dt:
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06/25/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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09/13/2016
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Application #:
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14636927
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Filing Dt:
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03/03/2015
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Publication #:
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Pub Dt:
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11/12/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
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Patent #:
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Issue Dt:
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12/27/2016
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Application #:
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14647290
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Filing Dt:
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05/26/2015
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Publication #:
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Pub Dt:
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10/22/2015
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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11/22/2016
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Application #:
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14661103
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Filing Dt:
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03/18/2015
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Publication #:
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Pub Dt:
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07/09/2015
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Title:
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Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium and Method of Manufacturing Semiconductor Device
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Patent #:
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Issue Dt:
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03/14/2017
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Application #:
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14667691
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14667692
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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12/22/2015
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Application #:
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14668563
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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09/17/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/10/2016
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Application #:
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14668702
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Filing Dt:
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03/25/2015
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Publication #:
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Pub Dt:
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07/16/2015
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14669764
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Filing Dt:
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03/26/2015
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Publication #:
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Pub Dt:
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03/31/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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06/14/2016
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Application #:
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14680587
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Filing Dt:
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04/07/2015
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Publication #:
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Pub Dt:
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10/29/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/17/2016
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Application #:
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14680841
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Filing Dt:
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04/07/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
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Patent #:
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Issue Dt:
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06/21/2016
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Application #:
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14690936
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Filing Dt:
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04/20/2015
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Publication #:
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Pub Dt:
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08/13/2015
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Title:
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BATCH-TYPE REMOTE PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/04/2016
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Application #:
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14706221
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Filing Dt:
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05/07/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Title:
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Method of Manufacturing Semiconductor Device and Substrate Processing Method
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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14706223
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Filing Dt:
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05/07/2015
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Publication #:
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Pub Dt:
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08/20/2015
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Title:
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Method of Manufacturing Semiconductor Device and Substrate Processing Method
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Patent #:
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Issue Dt:
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09/19/2017
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Application #:
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14711551
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Filing Dt:
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05/13/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Title:
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METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/10/2015
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Application #:
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14747631
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Filing Dt:
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06/23/2015
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Publication #:
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Pub Dt:
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10/15/2015
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING AND PROCESSING METHODS AND APPARATUSES FOR FORMING A FILM
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Patent #:
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Issue Dt:
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09/12/2017
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Application #:
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14803336
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Filing Dt:
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07/20/2015
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Publication #:
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Pub Dt:
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11/12/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/05/2016
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Application #:
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14833480
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Filing Dt:
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08/24/2015
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Publication #:
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Pub Dt:
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12/17/2015
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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14852046
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Filing Dt:
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09/11/2015
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Publication #:
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Pub Dt:
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12/31/2015
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
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Patent #:
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Issue Dt:
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08/16/2016
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Application #:
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14874967
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Filing Dt:
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10/05/2015
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Publication #:
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Pub Dt:
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01/28/2016
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/12/2017
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Application #:
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14947523
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Filing Dt:
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11/20/2015
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Publication #:
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Pub Dt:
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05/26/2016
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Title:
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Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
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Patent #:
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Issue Dt:
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09/05/2017
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Application #:
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14956018
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Filing Dt:
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12/01/2015
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Publication #:
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Pub Dt:
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03/24/2016
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/28/2017
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Application #:
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15013721
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Filing Dt:
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02/02/2016
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Publication #:
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Pub Dt:
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06/02/2016
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Title:
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Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
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Patent #:
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Issue Dt:
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11/28/2017
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Application #:
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15023232
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Filing Dt:
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03/18/2016
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Publication #:
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Pub Dt:
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08/11/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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08/14/2018
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Application #:
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15042648
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Filing Dt:
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02/12/2016
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Publication #:
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Pub Dt:
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06/16/2016
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Title:
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Method of Manufacturing Semiconductor Device Including Silicon Nitride Layer for Inhibiting Excessive Oxidation of Polysilicon Film
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Patent #:
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Issue Dt:
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11/01/2016
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Application #:
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15058718
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Filing Dt:
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03/02/2016
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Title:
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Method of Manufacturing Semiconductor Device
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Patent #:
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Issue Dt:
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04/03/2018
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Application #:
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15059591
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Filing Dt:
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03/03/2016
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Publication #:
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Pub Dt:
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09/29/2016
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Title:
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Method of Manufacturing Semiconductor Device
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Patent #:
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Issue Dt:
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12/05/2017
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Application #:
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15248833
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Filing Dt:
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08/26/2016
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Publication #:
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Pub Dt:
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12/15/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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15260037
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Filing Dt:
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09/08/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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15266081
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Filing Dt:
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09/15/2016
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Publication #:
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Pub Dt:
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01/05/2017
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Title:
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Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
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Patent #:
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Issue Dt:
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03/28/2017
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Application #:
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15273330
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Filing Dt:
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09/22/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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05/15/2018
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Application #:
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15335221
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Filing Dt:
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10/26/2016
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Publication #:
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Pub Dt:
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02/16/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/20/2017
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Application #:
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15385133
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Filing Dt:
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12/20/2016
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING 3D STRUCTURE
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Patent #:
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Issue Dt:
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03/27/2018
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15388982
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Filing Dt:
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12/22/2016
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Publication #:
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Pub Dt:
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03/29/2018
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Title:
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Method of Manufacturing Semiconductor Device
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Patent #:
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07/03/2018
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15629989
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06/22/2017
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12/28/2017
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Title:
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Method of Manufacturing Semiconductor Device
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05/15/2018
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15673121
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08/09/2017
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Publication #:
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Pub Dt:
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03/22/2018
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Title:
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Method of Manufacturing Semiconductor Device
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06/29/2010
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29327478
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11/06/2008
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Title:
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REACTION TUBE
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02/23/2010
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29327745
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11/12/2008
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Title:
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REACTION TUBE
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10/13/2015
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29467526
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09/20/2013
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Title:
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BOAT FOR SUBSTRATE PROCESSING APPARATUS
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09/29/2015
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29467533
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09/20/2013
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Title:
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BOAT FOR SUBSTRATE PROCESSING APPARATUS
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