Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 048107/0878 | |
| Pages: | 4 |
| | Recorded: | 01/23/2019 | | |
| Attorney Dkt #: | 201301156 US |
| Conveyance: | MERGER (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2021
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Application #:
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14912380
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Filing Dt:
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02/16/2016
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Publication #:
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Pub Dt:
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07/21/2016
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Title:
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SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR
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Assignee
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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ENTEGRIS, INC.
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129 CONCORD ROAD
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BILLERICA, MA 01821
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