Patent Assignment Details
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| Reel/Frame: | 048379/0320 | |
| Pages: | 8 |
| | Recorded: | 02/20/2019 | | |
| Attorney Dkt #: | SPST-26US2 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/24/2019
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Application #:
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15467973
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Filing Dt:
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03/23/2017
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Publication #:
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Pub Dt:
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10/05/2017
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Title:
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Process and Apparatus for Processing a Nitride Structure Without Silica Deposition
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| AKASAKA BIZ TOWER |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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WOOD HERRON & EVANS LLP
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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