Patent Assignment Details
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| Reel/Frame: | 048419/0103 | |
| Pages: | 10 |
| | Recorded: | 02/24/2019 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
5
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Patent #:
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Issue Dt:
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08/15/2017
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Application #:
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14883634
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Filing Dt:
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10/15/2015
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Publication #:
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Pub Dt:
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06/30/2016
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Title:
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EXPOSURE APPARATUS AND EXPOSURE METHOD
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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15099619
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Filing Dt:
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04/15/2016
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Publication #:
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Pub Dt:
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10/27/2016
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Title:
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DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
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08/14/2018
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Application #:
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15335448
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Filing Dt:
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10/27/2016
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Publication #:
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Pub Dt:
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07/27/2017
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Title:
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CHARGED PARTICLE BEAM LENS APPARATUS, CHARGED PARTICLE BEAM COLUMN, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
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09/25/2018
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Application #:
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15461829
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Filing Dt:
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03/17/2017
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Publication #:
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Pub Dt:
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11/09/2017
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Title:
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MULTICOLUMN CHARGED PARTICLE BEAM EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
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04/09/2019
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Application #:
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15671112
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Filing Dt:
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08/07/2017
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Publication #:
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Pub Dt:
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12/14/2017
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Title:
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EXPOSURE APPARATUS AND EXPOSURE METHOD
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Assignee
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| 1-6-2, MARUNOUCHI, CHIYODA-KU |
| TOKYO, JAPAN 100-0005 |
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Correspondence name and address
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RYUKA USA LLP
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111 NORTH MARKET STREET
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SUITE 300
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SAN JOSE, CA 95113
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