Patent Assignment Details
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| Reel/Frame: | 048462/0498 | |
| Pages: | 7 |
| | Recorded: | 02/28/2019 | | |
| Attorney Dkt #: | HITACHI13-0002605US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/08/2020
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Application #:
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16286292
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Filing Dt:
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02/26/2019
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Publication #:
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Pub Dt:
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08/29/2019
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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