Patent Assignment Details
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| Reel/Frame: | 048644/0642 | |
| Pages: | 3 |
| | Recorded: | 03/20/2019 | | |
| Attorney Dkt #: | TEL-18084US/216102 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/17/2021
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Application #:
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16358828
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Filing Dt:
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03/20/2019
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Publication #:
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Pub Dt:
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09/26/2019
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Title:
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SUBSTRATE HEATING APPARATUS INCLUDING HEATER UNDER SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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Correspondence name and address
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ABELMAN, FRAYNE & SCHWAB/LEE
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666 THIRD AVENUE
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10TH FLOOR
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NEW YORK, NY 10017-4046
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