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Reel/Frame:048658/0249   Pages: 9
Recorded: 03/21/2019
Attorney Dkt #:3012-CN1
Conveyance: CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Total properties: 35
1
Patent #:
6426117
Issue Dt:
07/30/2002
Application #:
09554443
Filing Dt:
05/10/2000
Title:
METHOD FOR FORMING A THREE-COMPONENT NITRIDE FILM CONTAINING METAL AND SILICON
2
Patent #:
6623799
Issue Dt:
09/23/2003
Application #:
09554444
Filing Dt:
07/13/2000
Title:
CHEMICAL VAPOR DEPOSITION METHOD USING A CATALYST ON A SUBSTRATE SURFACE
3
Patent #:
6432205
Issue Dt:
08/13/2002
Application #:
09554535
Filing Dt:
05/12/2000
Title:
GAS FEEDING SYSTEM FOR CHEMICAL VAPOR DEPOSITION REACTOR AND METHOD OF CONTROLLING THE SAME
4
Patent #:
6380081
Issue Dt:
04/30/2002
Application #:
09718837
Filing Dt:
11/20/2000
Title:
METHOD OF VAPORIZING LIQUID SOURCES AND APPARATUS THEREFOR
5
Patent #:
6645574
Issue Dt:
11/11/2003
Application #:
09719103
Filing Dt:
12/06/2000
Title:
METHOD OF FORMING A THIN FILM
6
Patent #:
6720262
Issue Dt:
04/13/2004
Application #:
09738213
Filing Dt:
12/15/2000
Publication #:
US20010019891
Pub Dt:
09/06/2001
Title:
METHOD OF FORMING COPPER INTERCONNECTIONS AND THIN FILMS USING CHEMICAL VAPOR DEPOSITION WITH CATALYST
7
Patent #:
6539891
Issue Dt:
04/01/2003
Application #:
09763238
Filing Dt:
02/14/2001
Title:
CHEMICAL DEPOSITION REACTOR AND METHOD OF FORMING A THIN FILM USING THE SAME
8
Patent #:
7141278
Issue Dt:
11/28/2006
Application #:
10297867
Filing Dt:
07/15/2003
Publication #:
US20040009307
Pub Dt:
01/15/2004
Title:
THIN FILM FORMING METHOD
9
Patent #:
7138336
Issue Dt:
11/21/2006
Application #:
10486311
Filing Dt:
02/06/2004
Publication #:
US20040231799
Pub Dt:
11/25/2004
Title:
PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) EQUIPMENT AND METHOD OF FORMING A CONDUCTING THIN FILM USING THE SAME THEREOF
10
Patent #:
7485349
Issue Dt:
02/03/2009
Application #:
11552898
Filing Dt:
10/25/2006
Publication #:
US20070048455
Pub Dt:
03/01/2007
Title:
THIN FILM FORMING METHOD
11
Patent #:
7541284
Issue Dt:
06/02/2009
Application #:
11706607
Filing Dt:
02/14/2007
Publication #:
US20070190782
Pub Dt:
08/16/2007
Title:
METHOD OF DEPOSITING RU FILMS HAVING HIGH DENSITY
12
Patent #:
7708969
Issue Dt:
05/04/2010
Application #:
11775111
Filing Dt:
07/09/2007
Publication #:
US20080056975
Pub Dt:
03/06/2008
Title:
METHOD OF FORMING METAL OXIDE
13
Patent #:
7976898
Issue Dt:
07/12/2011
Application #:
11857294
Filing Dt:
09/18/2007
Publication #:
US20080069955
Pub Dt:
03/20/2008
Title:
ATOMIC LAYER DEPOSITION APPARATUS
14
Patent #:
8273408
Issue Dt:
09/25/2012
Application #:
12250827
Filing Dt:
10/14/2008
Publication #:
US20090104777
Pub Dt:
04/23/2009
Title:
METHODS OF DEPOSITING A RUTHENIUM FILM
15
Patent #:
8282735
Issue Dt:
10/09/2012
Application #:
12324178
Filing Dt:
11/26/2008
Publication #:
US20090136665
Pub Dt:
05/28/2009
Title:
ATOMIC LAYER DEPOSITION APPARATUS
16
Patent #:
8347813
Issue Dt:
01/08/2013
Application #:
12332234
Filing Dt:
12/10/2008
Publication #:
US20090155452
Pub Dt:
06/18/2009
Title:
THIN FILM DEPOSITION APPARATUS AND METHOD THEREOF
17
Patent #:
8092606
Issue Dt:
01/10/2012
Application #:
12334135
Filing Dt:
12/12/2008
Publication #:
US20090156015
Pub Dt:
06/18/2009
Title:
DEPOSITION APPARATUS
18
Patent #:
8273178
Issue Dt:
09/25/2012
Application #:
12393377
Filing Dt:
02/26/2009
Publication #:
US20090217871
Pub Dt:
09/03/2009
Title:
THIN FILM DEPOSITION APPARATUS AND METHOD OF MAINTAINING THE SAME
19
Patent #:
8076242
Issue Dt:
12/13/2011
Application #:
12433629
Filing Dt:
04/30/2009
Publication #:
US20090278224
Pub Dt:
11/12/2009
Title:
METHODS OF FORMING AN AMORPHOUS SILICON THIN FILM
20
Patent #:
9371583
Issue Dt:
06/21/2016
Application #:
12577885
Filing Dt:
10/13/2009
Publication #:
US20100089320
Pub Dt:
04/15/2010
Title:
PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITING METHOD USING THE SAME
21
Patent #:
8778083
Issue Dt:
07/15/2014
Application #:
12841139
Filing Dt:
07/21/2010
Publication #:
US20110020545
Pub Dt:
01/27/2011
Title:
LATERAL-FLOW DEPOSITION APPARATUS AND METHOD OF DEPOSITING FILM BY USING THE APPARATUS
22
Patent #:
8252691
Issue Dt:
08/28/2012
Application #:
13085531
Filing Dt:
04/13/2011
Publication #:
US20110256727
Pub Dt:
10/20/2011
Title:
METHOD OF FORMING SEMICONDUCTOR PATTERNS
23
Patent #:
8215264
Issue Dt:
07/10/2012
Application #:
13171899
Filing Dt:
06/29/2011
Publication #:
US20110308460
Pub Dt:
12/22/2011
Title:
ATOMIC LAYER DEPOSITION APPARATUS
24
Patent #:
8747948
Issue Dt:
06/10/2014
Application #:
13346470
Filing Dt:
01/09/2012
Publication #:
US20120114856
Pub Dt:
05/10/2012
Title:
DEPOSITION APPARATUS
25
Patent #:
9145609
Issue Dt:
09/29/2015
Application #:
13439178
Filing Dt:
04/04/2012
Publication #:
US20120272900
Pub Dt:
11/01/2012
Title:
LATERAL FLOW ATOMIC LAYER DEPOSITION DEVICE
26
Patent #:
9062375
Issue Dt:
06/23/2015
Application #:
13587061
Filing Dt:
08/16/2012
Publication #:
US20130045331
Pub Dt:
02/21/2013
Title:
LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHOD USING THE SAME
27
Patent #:
8545940
Issue Dt:
10/01/2013
Application #:
13598998
Filing Dt:
08/30/2012
Publication #:
US20130052348
Pub Dt:
02/28/2013
Title:
ATOMIC LAYER DEPOSITION APPARATUS
28
Patent #:
9029244
Issue Dt:
05/12/2015
Application #:
13624609
Filing Dt:
09/21/2012
Publication #:
US20130029477
Pub Dt:
01/31/2013
Title:
APPARATUS INCLUDING 4-WAY VALVE FOR FABRICATING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING VALVE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE APPARATUS
29
Patent #:
9406502
Issue Dt:
08/02/2016
Application #:
14685697
Filing Dt:
04/14/2015
Publication #:
US20150221497
Pub Dt:
08/06/2015
Title:
APPARATUS INCLUDING 4-WAY VALVE FOR FABRICATING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING VALVE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE APPARATUS
30
Patent #:
9879342
Issue Dt:
01/30/2018
Application #:
14696551
Filing Dt:
04/27/2015
Publication #:
US20150225851
Pub Dt:
08/13/2015
Title:
LATERAL FLOW ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHOD USING THE SAME
31
Patent #:
9963783
Issue Dt:
05/08/2018
Application #:
15157692
Filing Dt:
05/18/2016
Publication #:
US20160258062
Pub Dt:
09/08/2016
Title:
PLASMA PROCESSING MEMBER, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITING METHOD USING THE SAME
32
Patent #:
9702041
Issue Dt:
07/11/2017
Application #:
15176684
Filing Dt:
06/08/2016
Publication #:
US20160281234
Pub Dt:
09/29/2016
Title:
APPARATUS INCLUDING 4-WAY VALVE FOR FABRICATING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING VALVE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE APPARATUS
33
Patent #:
D614152
Issue Dt:
04/20/2010
Application #:
29331021
Filing Dt:
01/16/2009
Title:
SUBSTRATE TRANSFER DEVICE FOR SEMICONDUCTOR DEPOSITION APPARATUS
34
Patent #:
D606952
Issue Dt:
12/29/2009
Application #:
29331022
Filing Dt:
01/16/2009
Title:
PLASMA INDUCING PLATE FOR SEMICONDUCTOR DEPOSITION APPARATUS
35
Patent #:
D614593
Issue Dt:
04/27/2010
Application #:
29331023
Filing Dt:
01/16/2009
Title:
SUBSTRATE SUPPORT FOR SEMICONDUCTOR DEPOSITION APPARATUS
Assignor
1
ASM GENITECH KOREA, LTD.
Exec Dt:
10/10/2016
Assignee
1
ASM KOREA LTD.
514 SAMEUN-RI, JIKSAN-EUP, SEOBUK-GU, CHUNGCHEONGNAM-DO
CHEONAN-SI, KOREA, REPUBLIC OF
Correspondence name and address
LEX IP MEISTER, PLLC
5180 PARKSTONE DRIVE, SUITE 175
CHANTILLY, VA 20151

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