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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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08994089
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Filing Dt:
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12/19/1997
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Title:
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DIFFUSION BARRIERS BETWEEN NOBLE METAL ELECTRODES AND METALLIZATION LAYERS, AND INTEGRATED CIRCUIT AND SEMICONDUCTOR DEVICES COMPRISING SAME
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09012679
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Filing Dt:
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01/23/1998
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Title:
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TANTALUM AMIDE PRECORSORS FOR DEPOSITION OF TANTALUM NITRIDE ON A SUBTRATE
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09172675
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Filing Dt:
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10/15/1998
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Title:
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AUTOMATIC DILUTION SYSTEM FOR HIGH-RESOLUTION PARTICLE SIZE ANALYSIS
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09174055
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Filing Dt:
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10/15/1998
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Title:
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SAFETY SYSTEM FOR GAS PURIFIER
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09174619
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Filing Dt:
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10/19/1998
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Title:
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SURFACE MODIFIED POROUS MEMBRANE AND PROCESS
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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09185992
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Filing Dt:
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11/04/1998
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Title:
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WAFER CARRIER BOX HINGE
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Patent #:
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Issue Dt:
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11/30/1999
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Application #:
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09189672
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Filing Dt:
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11/11/1998
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Title:
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ADVANCED WAFER SHIPPER
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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09197984
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Filing Dt:
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11/23/1998
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Title:
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TEXTURED BI-BASED OXIDE CERAMIC FILMS
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09208541
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Filing Dt:
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12/09/1998
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Title:
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LOW TEMPERATURE CVD PROCESSES FOR PREPARING FERROELECTRIC FILMS USING BI ALCOXIDES
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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09210912
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Filing Dt:
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12/14/1998
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Title:
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METHOD OF CONTROLLED CHEMICAL VAPOR DEPOSITION OF A METAL OXIDE CERAMIC LAYER
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09215655
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Filing Dt:
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12/16/1998
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Title:
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SELECTIVE SILICON OXIDE ETCHANT FORMULATION INCLUDING FLUORIDE SALT, CHELATING AGENT, AND GLYCOL SOLVENT
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09216673
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Filing Dt:
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12/18/1998
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Title:
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LIQUID DELIVERY MOCVD PROCESS FOR DEPOSITION OF HIGH FREQUENCY DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09218563
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Filing Dt:
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12/21/1998
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Title:
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SPUTTERING PROCESS FOR THE CONFORMAL DEPOSITION OF A METALLIZATION OR INSULATING LAYER
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09218992
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Filing Dt:
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12/22/1998
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Title:
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INDIUM SOURCE REAGENT COMPOSITIONS, AND USE THEREOF FOR DEPOSITION OF INDIUM-CONTAINING FILMS ON SUBSTRATES AND ION IMPLANTTION OF INDIUM-DOPED SHALLOW JUNCTION MICROELECTRONICS STRUCTURES
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09221745
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Filing Dt:
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12/28/1998
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Title:
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CLIPLESS TRAY
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09226372
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Filing Dt:
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01/06/1999
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Title:
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DOOR GUIDE FOR A WAFER CONTAINER
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09251890
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Filing Dt:
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02/19/1999
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Title:
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SCALABLE LEAD ZIRCONIUM TITANATE(PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09272132
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Filing Dt:
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03/19/1999
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Title:
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SMIF CONTAINER INCLUDING A RETICLE SUPPORT STRUCTURE
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09274723
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Filing Dt:
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03/23/1999
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Title:
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LIQUID CHEMICAL DISPENSING SYSTEM WITH PRESSURIZATION
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Patent #:
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Issue Dt:
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07/18/2000
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Application #:
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09300994
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Filing Dt:
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04/28/1999
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM
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Patent #:
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Issue Dt:
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12/05/2000
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Application #:
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09307650
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Filing Dt:
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05/07/1999
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Title:
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METHOD OF AND SYSTEM FOR SUB-ATMOSPHERIC GAS DELIVERY WITH BACKFLOW CONTROL
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09315600
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Filing Dt:
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05/20/1999
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Title:
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PROCESS FOR THE REMOVAL OF WATER FROM EVACUATED CHAMBERS OR FROM GASES
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09317989
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Filing Dt:
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05/25/1999
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Title:
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COMPOSITE SUBSTRATE CARRIER
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Patent #:
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Issue Dt:
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04/11/2000
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Application #:
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09327842
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Filing Dt:
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06/08/1999
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Title:
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DELIVERY SYSTEM AND MANIFOLD
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09330316
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Filing Dt:
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06/10/1999
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Title:
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INTEGRATED HEATED GETTER PURIFIER SYSTEM
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09349314
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Filing Dt:
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07/08/1999
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Title:
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CUSHIONED WAFER CONTAINER
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09356020
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Filing Dt:
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07/16/1999
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Title:
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AUTO-SWITCHING GAS DELIVERY SYSTEM UTILIZING SUB-ATMOSPHERIC PRESSURE GAS SUPPLY VESSELS
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09369644
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Filing Dt:
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08/06/1999
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Title:
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REJUVENABLE AMBIENT TEMPERATURE PURIFIER
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09416353
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Filing Dt:
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10/12/1999
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Title:
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PLANARIZATION COMPOSITION FOR REMOVING METAL FILMS
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09440917
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Filing Dt:
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11/16/1999
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Title:
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POST CHEMICAL-MECHANICAL PLANARIZATION (CMP) CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09461693
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Filing Dt:
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12/14/1999
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Title:
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INTEGRATED CIRCUIT DEVICES AND METHODS EMPLOYING AMORPHOUS SILICON CARBIDE RESISTOR MATERIALS
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09462690
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Filing Dt:
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09/01/2000
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Title:
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BULK CHEMICAL DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09463124
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Filing Dt:
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04/06/2000
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Title:
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LIQUID DELIVERY SYSTEM COMPRISING UPSTREAM PRESSURE CONTROL MEANS
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09469700
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Filing Dt:
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12/22/1999
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Title:
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LOW TEMPERATURE PROCESS FOR HIGH DENSITY THIN FILM INTEGRATED CAPACITORS AND AMORPHOUSLY FRUSTRATED FERROELECTRIC MATERIALS THEREFOR
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09475387
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Filing Dt:
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12/30/1999
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Title:
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CHEMICAL DELIVERY AND CONTAINMENT SYSTEM EMPLOYING MOBILE SHIPPING CRATE
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09476080
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Filing Dt:
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12/30/1999
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Title:
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MULTI-COMPONENT MIXTURES FOR MANUFACTURE OF SEMI-CONDUCTORS
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09487637
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Filing Dt:
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01/19/2000
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Title:
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Self-regenerative process for contaminant removal from liquid and supercritical CO2 fluid streams
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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09523745
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Filing Dt:
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03/13/2000
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Title:
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WAFER CONTAINER WITH MINIMAL CONTACT
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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09529496
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Filing Dt:
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03/03/2003
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Title:
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AMMONIUM BORATE CONTAINING COMPOSITIONS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09532268
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Filing Dt:
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03/22/2000
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Title:
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Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09551018
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Filing Dt:
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04/18/2000
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Title:
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SILICON REAGENTS AND LOW TEMPERATURE CVD METHOD OF FORMING SILICON-CONTAINING GATE DIELECTRIC MATERIALS USING SAME
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09552347
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Filing Dt:
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04/19/2000
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Title:
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Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09587883
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Filing Dt:
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06/06/2000
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Title:
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POST CHEMICAL-MECHANICAL PLANARIZATION (CMP) CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09603597
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Filing Dt:
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06/26/2000
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Title:
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Stable hydride source compositions for manufacture of semiconductor devices and structures
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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09614649
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Filing Dt:
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07/12/2000
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Title:
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GAS PURIFICATION SYSTEM WITH AN INTEGRATED HYDROGEN SORPTION AND FILTER ASSEMBLY
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09620007
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Filing Dt:
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07/20/2000
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Title:
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SENSOR USABLE IN ULTRA PURE AND HIGHLY CORROSIVE ENVIRONMENTS
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09624478
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Filing Dt:
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07/24/2000
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Title:
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FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09635880
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Filing Dt:
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08/10/2000
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09695361
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Filing Dt:
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10/24/2000
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Title:
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Method for sub-atmospheric gas delivery with backflow control
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09699100
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Filing Dt:
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10/27/2000
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Title:
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SELF-REGENERATIVE PROCESS FOR CONTAMINANT REMOVAL FROM AMMONIA
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09708985
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Filing Dt:
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11/07/2000
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Title:
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SEMICONDUCTOR MANUFACTURING SYSTEM WITH GETTER SAFETY DEVICE
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09727023
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Filing Dt:
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11/29/2000
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Publication #:
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Pub Dt:
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04/05/2001
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Title:
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Fabrication of electron emitters coated with material such as carbon
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09781859
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Filing Dt:
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02/12/2001
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Title:
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POST CHEMICAL-MECHANICAL PLANARIZATION (CMP) CLEANING COMPOSITION
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09783919
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Filing Dt:
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02/15/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM FEATURING EX SITU STRAIN GAUGE PRESSURE MONITORING ASSEMBLY
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09790769
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Filing Dt:
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02/21/2001
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Publication #:
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Pub Dt:
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11/22/2001
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Title:
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Molecular contamination control system
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09796038
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Filing Dt:
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02/28/2001
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Publication #:
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Pub Dt:
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11/29/2001
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Title:
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DISPOSABLE FLUID SEPARATION DEVICE AND MANIFOLD ASSEMBLY DESIGN WITH EASY CHANGE-OUT FEATURE
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09800539
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
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09/12/2002
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Title:
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DOUBLE CHAMBER ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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09800643
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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THERMAL REGULATION OF AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09801543
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Filing Dt:
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03/07/2001
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Publication #:
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Pub Dt:
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07/19/2001
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Title:
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BORIC ACID CONTAINING COMPOSITIONS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09817805
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Filing Dt:
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03/26/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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DOOR GUIDE FOR A WAFER CONTAINER
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09824382
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Filing Dt:
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04/02/2001
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Title:
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Method for purification of lens gases used in photolithography
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09839475
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Filing Dt:
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04/19/2001
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Publication #:
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Pub Dt:
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01/23/2003
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Title:
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CLEANING COMPOSITIONS
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Patent #:
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Issue Dt:
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05/25/2004
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Application #:
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09848955
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Filing Dt:
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05/04/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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FILTERS EMPLOYING BOTH ACIDIC POLYMERS AND PHYSICAL-ADSORPTION MEDIA
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09851499
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Filing Dt:
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05/08/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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SHOCK RESISTANT VARIABLE LOAD TOLERANT WAFER SHIPPER
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09862560
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Filing Dt:
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05/22/2001
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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PROCESS FOR MAKING CARBON FOAM INDUCED BY PROCESS DEPRESSURIZATION
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09874084
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Filing Dt:
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06/05/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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09880472
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Filing Dt:
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06/13/2001
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12/19/2002
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Title:
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LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE
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02/04/2003
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09887761
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06/22/2001
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06/24/2003
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09889960
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07/24/2001
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Title:
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07/26/2005
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09889961
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07/24/2001
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Title:
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SKINNED HOLLOW FIBER MEMBRANE AND METHOD OF MANUFACTURE
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10/12/2004
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09890109
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07/26/2001
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Title:
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MICROPOROUS HOLLOW FIBER MEMBRANES FROM PERFLUORINATED THERMOPLASTIC POLYMERS
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12/16/2003
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09890111
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07/26/2001
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Title:
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03/25/2008
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09890290
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07/27/2001
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Title:
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10/21/2003
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09894442
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06/28/2001
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11/08/2001
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Title:
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FILTER HOUSING
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02/04/2003
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09902519
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07/10/2001
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06/06/2002
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Title:
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SMIF CONTAINER INCLUDING AN ELECTROSTATIC DISSIPATIVE RETICLE SUPPORT STRUCTURE
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08/22/2006
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09907282
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07/17/2001
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02/07/2002
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Title:
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07/24/2007
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09913977
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08/20/2001
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10/29/2002
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09924866
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08/08/2001
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08/17/2004
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09925766
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08/09/2001
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02/20/2003
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Title:
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PROCESS FOR MAKING POROUS GRAPHITE AND ARTICLES PRODUCED THEREFROM
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01/10/2006
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09928860
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08/13/2001
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02/07/2002
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02/18/2003
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09930815
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08/15/2001
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04/18/2002
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10/05/2004
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09935805
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08/23/2001
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03/13/2003
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10/12/2004
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09954231
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09/17/2001
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03/20/2003
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05/19/2009
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09954284
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09/17/2001
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06/06/2002
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03/22/2005
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09954831
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09/18/2001
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12/12/2002
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01/02/2007
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09960606
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09/21/2001
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05/02/2002
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BLOW MOLDED DRUM
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05/20/2003
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10007490
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12/05/2001
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09/19/2002
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05/18/2004
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10013305
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11/13/2001
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09/12/2002
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TRANSPORT MODULE
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09/19/2006
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10015326
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12/13/2001
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06/26/2003
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11/05/2002
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11/12/2001
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05/02/2002
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07/15/2003
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10020268
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11/12/2001
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06/12/2003
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12/16/2003
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10020761
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12/13/2001
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08/08/2002
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07/20/2004
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10023493
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12/17/2001
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06/19/2003
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06/07/2005
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10042849
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01/08/2002
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12/12/2002
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09/16/2003
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01/10/2002
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07/10/2003
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11/11/2003
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02/19/2002
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10/03/2002
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09/20/2005
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03/18/2002
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06/29/2010
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05/03/2002
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01/02/2003
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03/13/2007
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11/06/2003
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03/02/2004
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11/06/2003
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