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Reel/Frame:048915/0520   Pages: 3
Recorded: 04/17/2019
Attorney Dkt #:180588US02
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/05/2021
Application #:
16374239
Filing Dt:
04/03/2019
Publication #:
Pub Dt:
10/03/2019
Title:
SELF-ALIGNED INTERCONNECT PATTERNING FOR BACK-END-OF-LINE (BEOL) STRUCTURES INCLUDING SELF-ALIGNED VIA THROUGH THE UNDERLYING INTERLEVEL METAL LAYER
Assignors
1
Exec Dt:
04/05/2019
2
Exec Dt:
04/05/2019
Assignee
1
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondence name and address
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD.
AUSTIN, TX 78741

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