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Total properties:
20
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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10512616
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Filing Dt:
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10/26/2004
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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METHOD OF GENERATING EXTREME ULTRAVIOLET RADIATION
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Patent #:
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Issue Dt:
|
07/08/2008
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Application #:
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10536918
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Filing Dt:
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01/09/2006
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Publication #:
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Pub Dt:
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06/29/2006
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Title:
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GAS DISCHARGE LAMP FOR EXTREME UV RADIATION
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Patent #:
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Issue Dt:
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04/14/2009
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Application #:
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10548243
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Filing Dt:
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09/06/2005
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Publication #:
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Pub Dt:
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01/04/2007
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Title:
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METHOD AND DEVICE FOR THE GENERATION OF A PLASMA THROUGH ELECTRIC DISCHARGE IN A DISCHARGE SPACE
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Patent #:
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Issue Dt:
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12/02/2008
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Application #:
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10548966
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Filing Dt:
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09/12/2005
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Publication #:
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Pub Dt:
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09/14/2006
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Title:
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DEVICE FOR AND METHOD OF GENERATING EXTREME ULTRAVIOLET AND/OR SOFT-X-RAY RADIATION BY MEANS OF A PLASMA
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Patent #:
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Issue Dt:
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02/03/2015
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Application #:
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10557384
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Filing Dt:
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09/29/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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METHOD AND DEVICE FOR CLEANING AT LEAST ONE OPTICAL COMPONENT
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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10566963
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Filing Dt:
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01/26/2006
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Publication #:
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Pub Dt:
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12/07/2006
| | | | |
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Title:
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METHOD OF CLEANING AT LEAST ONE SURFACE OF AN OPTICAL DEVICE DISPOSED IN A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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10/05/2010
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Application #:
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10596441
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Filing Dt:
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08/21/2008
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Publication #:
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Pub Dt:
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12/04/2008
| | | | |
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Title:
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METHOD AND DEVICE FOR GENERATING EUV RADIATION AND/OR SOFT X-RAY RADIATION
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Patent #:
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|
Issue Dt:
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06/08/2010
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Application #:
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11572238
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Filing Dt:
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01/17/2007
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Publication #:
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Pub Dt:
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01/15/2009
| | | | |
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Title:
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OPTICAL SYSTEM HAVING A CLEARNING ARRANGEMENT
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Patent #:
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Issue Dt:
|
03/30/2010
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Application #:
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11719881
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Filing Dt:
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05/22/2007
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Publication #:
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Pub Dt:
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07/02/2009
| | | | |
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Title:
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METHOD AND APPARATUS FOR GENERATING RADIATION IN THE WAVELENGTH RANGE FROM ABOUT 1 NM TO ABOUT 30 NM, AND USE IN A LITHOGRAPHY DEVICE OR IN METROLOGY
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11914773
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Filing Dt:
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11/19/2007
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Publication #:
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Pub Dt:
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08/07/2008
| | | | |
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Title:
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GAS DISCHARGE SOURCE, IN PARTICULAR FOR EUV RADIATION
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|
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Patent #:
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|
Issue Dt:
|
10/28/2014
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Application #:
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11917207
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Filing Dt:
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12/12/2007
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Publication #:
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Pub Dt:
|
09/04/2008
| | | | |
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Title:
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DEBRIS MITIGATION SYSTEM WITH IMPROVED GAS DISTRIBUTION
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|
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Patent #:
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|
Issue Dt:
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01/17/2012
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Application #:
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11993040
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Filing Dt:
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12/19/2007
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Publication #:
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Pub Dt:
|
03/04/2010
| | | | |
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Title:
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METHOD OF CLEANING AND AFTER TREATMENT OF OPTICAL SURFACES IN AN IRRADIATION UNIT
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/13/2011
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Application #:
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11993048
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Filing Dt:
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12/19/2007
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|
Publication #:
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Pub Dt:
|
03/04/2010
| | | | |
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Title:
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METHOD OF CLEANING OPTICAL SURFACES OF AN IRRADIATION UNIT IN A TWO-STEP PROCESS
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|
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Patent #:
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Issue Dt:
|
10/18/2011
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Application #:
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12300858
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Filing Dt:
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11/14/2008
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Publication #:
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Pub Dt:
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08/20/2009
| | | | |
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Title:
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METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV AND/OR SOFT X-RAY LAMP AND A CORRESPONDING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
11/01/2011
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Application #:
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12438956
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Filing Dt:
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07/15/2009
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Publication #:
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Pub Dt:
|
12/17/2009
| | | | |
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Title:
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METHOD OF CLEANING A SURFACE REGION COVERED WITH CONTAMINANT OR UNDESIRABLE MATERIAL
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/01/2011
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Application #:
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12439696
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Filing Dt:
|
03/03/2009
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|
Publication #:
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Pub Dt:
|
10/08/2009
| | | | |
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Title:
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EUV PLASMA DISCHARGE LAMP WITH CONVEYOR BELT ELECTRODES
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|
|
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Patent #:
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|
Issue Dt:
|
08/18/2015
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Application #:
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12602798
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Filing Dt:
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05/06/2010
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Publication #:
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Pub Dt:
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09/23/2010
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Title:
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OPTICAL DEVICE AND METHOD OF IN SITU TREATING AN EUV OPTICAL COMPONENT TO ENHANCE A REDUCED REFLECTIVITY
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|
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Patent #:
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|
Issue Dt:
|
10/18/2011
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Application #:
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12674951
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Filing Dt:
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02/24/2010
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Publication #:
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Pub Dt:
|
06/09/2011
| | | | |
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Title:
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ELECTRODE DEVICE FOR GAS DISCHARGE SOURCES AND METHOD OF OPERATING A GAS DISCHARGE SOURCE HAVING THIS ELECTRODE DEVICE
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|
|
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Patent #:
|
|
Issue Dt:
|
07/24/2012
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Application #:
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12747520
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Filing Dt:
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06/11/2010
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Publication #:
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Pub Dt:
|
10/21/2010
| | | | |
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Title:
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GAS DISCHARGE SOURCE FOR GENERATING EUV-RADIATION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/25/2012
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Application #:
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12918827
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Filing Dt:
|
08/23/2010
|
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Publication #:
|
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Pub Dt:
|
01/06/2011
| | | | |
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Title:
|
DEBRIS MITIGATION DEVICE WITH ROTATING FOIL TRAP AND DRIVE ASSEMBLY
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|
