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Reel/Frame:049903/0727   Pages: 3
Recorded: 07/30/2019
Attorney Dkt #:17EL-010C1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/09/2021
Application #:
16526165
Filing Dt:
07/30/2019
Publication #:
Pub Dt:
11/21/2019
Title:
METHOD OF CLEANING A SUBSTRATE PROCESSING APPARATUS AND THE SUBSTRATE PROCESSING APPARATUS PERFORMING THE METHOD
Assignors
1
Exec Dt:
10/03/2017
2
Exec Dt:
10/03/2017
3
Exec Dt:
10/10/2017
4
Exec Dt:
09/28/2017
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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