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11/15/2001
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11/06/2003
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01/15/2004
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01/15/2004
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01/15/2004
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07/01/2004
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02/05/2004
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02/05/2004
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02/26/2004
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Title:
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METHOD OF FORMING A RECESSED STRUCTURE EMPLOYING A REVERSE TONE PROCESS
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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10946574
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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PATTERNING SUBSTRATES EMPLOYING MULTI-FILM LAYERS DEFINING ETCH-DIFFERENTIAL INTERFACES
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Patent #:
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Issue Dt:
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07/10/2007
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Application #:
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10946577
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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REVERSE TONE PATTERNING ON SURFACES HAVING SURFACE PLANARITY PERTURBATIONS
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Patent #:
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Issue Dt:
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07/17/2007
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Application #:
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10951014
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Filing Dt:
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09/27/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Title:
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METHOD OF COMPENSATING FOR A VOLUMETRIC SHRINKAGE OF A MATERIAL DISPOSED UPON A SUBSTRATE TO FORM A SUBSTANTIALLY PLANAR STRUCTURE THEREFROM
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11000321
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Filing Dt:
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11/30/2004
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Publication #:
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Pub Dt:
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06/01/2006
| | | | |
Title:
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INTERFEROMETRIC ANALYSIS METHOD FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11000331
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Filing Dt:
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11/30/2004
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Publication #:
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Pub Dt:
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06/15/2006
| | | | |
Title:
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INTERFEROMETRIC ANALYSIS FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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11011480
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Filing Dt:
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12/13/2004
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Publication #:
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Pub Dt:
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06/15/2006
| | | | |
Title:
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METHOD AND SYSTEM FOR BEAM EXPANSION IN A DISPLAY DEVICE
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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11047428
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Filing Dt:
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01/31/2005
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Publication #:
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Pub Dt:
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08/03/2006
| | | | |
Title:
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CHUCKING SYSTEM FOR NANO-MANUFACTURING
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Patent #:
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Issue Dt:
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12/29/2009
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Application #:
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11047499
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Filing Dt:
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01/31/2005
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Publication #:
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Pub Dt:
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08/03/2006
| | | | |
Title:
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METHOD OF RETAINING A SUBSTRATE TO A WAFER CHUCK
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Patent #:
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Issue Dt:
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12/11/2007
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Application #:
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11068171
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Filing Dt:
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02/28/2005
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Publication #:
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Pub Dt:
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05/25/2006
| | | | |
Title:
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COMPOSITION TO REDUCE ADHESION BETWEEN A CONFORMABLE REGION AND A MOLD
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11101139
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Filing Dt:
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04/07/2005
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
Title:
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SYSTEM FOR CONTROLLING A VOLUME OF MATERIAL ON A MOLD
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11101140
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Filing Dt:
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04/07/2005
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
Title:
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METHOD FOR FAST FILLING OF TEMPLATES FOR IMPRINT LITHOGRAPHY USING ON TEMPLATE DISPENSE
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Patent #:
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Issue Dt:
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12/22/2009
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Application #:
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11108208
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Filing Dt:
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04/18/2005
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Publication #:
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Pub Dt:
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08/03/2006
| | | | |
Title:
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METHOD OF SEPARATING A MOLD FROM A SOLIDIFIED LAYER DISPOSED ON A SUBSTRATE
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Patent #:
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Issue Dt:
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03/04/2008
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Application #:
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11126946
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Filing Dt:
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05/11/2005
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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FORMATION OF DISCONTINUOUS FILMS DURING AN IMPRINT LITHOGRAPHY PROCESS
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|
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11127041
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Filing Dt:
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05/11/2005
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Publication #:
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Pub Dt:
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04/13/2006
| | | | |
Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
|
07/17/2007
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Application #:
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11136885
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Filing Dt:
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05/25/2005
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Publication #:
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|
Pub Dt:
|
12/01/2005
| | | | |
Title:
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SUBSTRATE SUPPORT SYSTEM
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Patent #:
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|
Issue Dt:
|
08/21/2007
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Application #:
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11136886
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Filing Dt:
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05/25/2005
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Publication #:
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Pub Dt:
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12/01/2005
| | | | |
Title:
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SUBSTRATE SUPPORT METHOD
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Patent #:
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Issue Dt:
|
11/20/2007
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Application #:
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11142808
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
|
01/05/2006
| | | | |
Title:
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SYSTEM FOR VARYING DIMENSIONS OF A SUBSTRATE DURING NANOSCALE MANUFACTURING
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Patent #:
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Issue Dt:
|
09/02/2008
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Application #:
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11142834
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
Title:
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METHOD OF VARYING DIMENSIONS OF A SUBSTRATE DURING NANO-SCALE MANUFACTURING
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Patent #:
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Issue Dt:
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06/17/2008
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Application #:
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11142838
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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12/15/2005
| | | | |
Title:
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COMPLIANT DEVICE FOR NANO-SCALE MANUFACTURING
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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11142839
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Filing Dt:
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06/01/2005
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Publication #:
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Pub Dt:
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01/05/2006
| | | | |
Title:
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APPARATUS TO VARY DIMENSIONS OF A SUBSTRATE DURING NANO-SCALE MANUFACTURING
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Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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11143092
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Filing Dt:
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06/02/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
Title:
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Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
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Patent #:
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Issue Dt:
|
08/14/2007
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Application #:
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11184664
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Filing Dt:
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07/19/2005
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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METHOD OF CONTROLLING THE CRITICAL DIMENSION OF STRUCTURES FORMED ON A SUBSTRATE
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Patent #:
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|
Issue Dt:
|
07/20/2010
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Application #:
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11187406
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Filing Dt:
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07/22/2005
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Publication #:
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Pub Dt:
|
01/25/2007
| | | | |
Title:
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COMPOSITION FOR ADHERING MATERIALS TOGETHER
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Patent #:
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Issue Dt:
|
10/15/2013
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Application #:
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11187407
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Filing Dt:
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07/22/2005
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Publication #:
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Pub Dt:
|
01/25/2007
| | | | |
Title:
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METHOD FOR ADHERING MATERIALS TOGETHER
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Patent #:
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Issue Dt:
|
07/27/2010
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Application #:
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11202653
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Filing Dt:
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08/11/2005
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Publication #:
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Pub Dt:
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06/15/2006
| | | | |
Title:
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GENERAL DIFFRACTIVE OPTICS METHOD FOR EXPANDING AN EXIT PUPIL
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Patent #:
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Issue Dt:
|
02/23/2010
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Application #:
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11211766
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Filing Dt:
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08/25/2005
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Publication #:
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Pub Dt:
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03/29/2007
| | | | |
Title:
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SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE
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Patent #:
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Issue Dt:
|
03/02/2010
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Application #:
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11231580
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Filing Dt:
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09/21/2005
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
Title:
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METHOD TO CONTROL AN ATMOSTPHERE BETWEEN A BODY AND A SUBSTRATE
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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11231616
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Filing Dt:
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09/21/2005
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
Title:
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SYSTEM TO CONTROL AN ATMOSPHERE BETWEEN A BODY AND A SUBSTRATE
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Patent #:
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Issue Dt:
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08/21/2007
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Application #:
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11240708
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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04/05/2007
| | | | |
Title:
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ETCHING TECHNIQUE TO PLANARIZE A MULTI-LAYER STRUCTURE
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Patent #:
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Issue Dt:
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11/23/2010
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Application #:
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11244428
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Filing Dt:
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10/05/2005
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Publication #:
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Pub Dt:
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08/10/2006
| | | | |
Title:
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METHOD OF PROVIDING DESIRABLE WETTING AND RELEASE CHARACTERSTICS BETWEEN A MOLD AND A POLYMERIZABLE COMPOSITION
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Patent #:
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Issue Dt:
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04/15/2008
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Application #:
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11292394
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Filing Dt:
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11/30/2005
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Publication #:
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Pub Dt:
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06/01/2006
| | | | |
Title:
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ELIMINATING PRINTABILITY OF SUB-RESOLUTION DEFECTS IN IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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09/28/2010
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Application #:
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11292568
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Filing Dt:
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12/01/2005
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Publication #:
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Pub Dt:
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06/07/2007
| | | | |
Title:
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TECHNIQUE FOR SEPARATING A MOLD FROM SOLIDIFIED IMPRINTING MATERIAL
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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11298244
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Filing Dt:
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12/09/2005
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Publication #:
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Pub Dt:
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05/11/2006
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Title:
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METHOD OF FORMING A COMPLIANT TEMPLATE FOR UV IMPRINTING
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11303777
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Filing Dt:
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12/16/2005
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Publication #:
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Pub Dt:
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06/07/2007
| | | | |
Title:
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BIFURCATED CONTACT PRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11347198
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Filing Dt:
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02/03/2006
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Publication #:
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Pub Dt:
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07/20/2006
| | | | |
Title:
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SCATTEROMETRY ALIGNMENT FOR IMPRINT LITHOGRAPHY
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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11389731
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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08/10/2006
| | | | |
Title:
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IMPRINT LITHOGRAPHY SUBSTRATE PROCESSING TOOL FOR MODULATING SHAPES OF SUBSTRATES
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Patent #:
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Issue Dt:
|
11/10/2015
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Application #:
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11418885
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Filing Dt:
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05/05/2006
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Publication #:
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Pub Dt:
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02/08/2007
| | | | |
Title:
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Methods for fabricating nano and microparticles for drug delivery
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Patent #:
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Issue Dt:
|
02/17/2009
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Application #:
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11470829
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Filing Dt:
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09/07/2006
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Publication #:
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Pub Dt:
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02/01/2007
| | | | |
Title:
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FORMATION OF CONDUCTIVE TEMPLATES EMPLOYING INDIUM TIN OXIDE
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11508765
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Filing Dt:
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08/23/2006
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Publication #:
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Pub Dt:
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04/24/2008
| | | | |
Title:
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COMPOSITION FOR AN ETCHING MASK COMPRISING A SILICON-CONTAINING MATERIAL
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11560266
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Filing Dt:
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11/15/2006
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Publication #:
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Pub Dt:
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05/15/2008
| | | | |
Title:
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Methods and Compositions for Providing Preferential Adhesion and Release of Adjacent Surfaces
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Patent #:
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Issue Dt:
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08/28/2007
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Application #:
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11560928
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Filing Dt:
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11/17/2006
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Publication #:
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Pub Dt:
|
05/03/2007
| | | | |
Title:
|
POSITIVE TONE BI-LAYER IMPRINT LITHOGRAPHY METHOD
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