Patent Assignment Details
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| Reel/Frame: | 050962/0916 | |
| Pages: | 8 |
| | Recorded: | 11/08/2019 | | |
| Attorney Dkt #: | 6500-103445-03 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/12/2022
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Application #:
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16679052
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Filing Dt:
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11/08/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Title:
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ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EXPOSURE TOOL
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Assignee
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| SHINAGAWA INTERCITY TOWER C, 2-15-3 |
| KONAN, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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Correspondence name and address
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KLARQUIST SPARKMAN, LLP
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121 SW SALMON STREET, SUITE 1600
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ONE WORLD TRADE CENTER
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PORTLAND, OR 97204
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05/15/2024 04:51 AM
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