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Total properties:
18
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Patent #:
|
|
Issue Dt:
|
10/19/2010
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Application #:
|
11058616
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Filing Dt:
|
02/16/2005
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|
Publication #:
|
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Pub Dt:
|
07/07/2005
| | | | |
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Title:
|
PATTERN INSPECTION APPARATUS AND METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/14/2010
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Application #:
|
11434797
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Filing Dt:
|
05/17/2006
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|
Publication #:
|
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Pub Dt:
|
11/02/2006
| | | | |
|
Title:
|
PATTERN INSPECTION APPARATUS AND METHOD
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|
|
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Patent #:
|
|
Issue Dt:
|
07/19/2011
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Application #:
|
11987766
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Filing Dt:
|
12/04/2007
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|
Publication #:
|
|
Pub Dt:
|
06/05/2008
| | | | |
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Title:
|
PATTERN INSPECTION APPARATUS AND METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/16/2013
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Application #:
|
12637331
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Filing Dt:
|
12/14/2009
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|
Publication #:
|
|
Pub Dt:
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06/24/2010
| | | | |
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Title:
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DEFECT AND CRITICAL DIMENSION ANALYSIS SYSTEMS AND METHODS FOR A SEMICONDUCTOR LITHOGRAPHIC PROCESS
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|
|
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Patent #:
|
|
Issue Dt:
|
04/03/2012
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Application #:
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12725141
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Filing Dt:
|
03/16/2010
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Publication #:
|
|
Pub Dt:
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08/26/2010
| | | | |
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Title:
|
SYSTEM AND METHOD FOR A SEMICONDUCTOR LITHOGRAPHIC PROCESS CONTROL USING STATISTICAL INFORMATION IN DEFECT IDENTIFICATION
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|
|
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Patent #:
|
|
Issue Dt:
|
10/25/2011
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Application #:
|
12852314
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Filing Dt:
|
08/06/2010
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|
Publication #:
|
|
Pub Dt:
|
12/02/2010
| | | | |
|
Title:
|
PATTERN INSPECTION APPARATUS AND METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/09/2012
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Application #:
|
13152227
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Filing Dt:
|
06/02/2011
|
|
Publication #:
|
|
Pub Dt:
|
09/29/2011
| | | | |
|
Title:
|
PATTERN INSPECTION APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/24/2019
|
Application #:
|
15071526
|
Filing Dt:
|
03/16/2016
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|
Publication #:
|
|
Pub Dt:
|
09/21/2017
| | | | |
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Title:
|
SECONDARY PARTICLE DETECTION SYSTEM OF SCANNING ELECTRON MICROSCOPE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2017
|
Application #:
|
15195136
|
Filing Dt:
|
06/28/2016
|
|
Title:
|
IMAGE GENERATION APPARATUS
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
15195145
|
Filing Dt:
|
06/28/2016
|
|
Publication #:
|
|
Pub Dt:
|
12/28/2017
| | | | |
|
Title:
|
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2019
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Application #:
|
15196218
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Filing Dt:
|
06/29/2016
|
|
Publication #:
|
|
Pub Dt:
|
01/04/2018
| | | | |
|
Title:
|
Method Of Utilizing Information On Shape Of Frequency Distribution Of Inspection Result In A Pattern Inspection Apparatus
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
15486251
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Filing Dt:
|
04/12/2017
|
|
Publication #:
|
|
Pub Dt:
|
10/18/2018
| | | | |
|
Title:
|
Method And Apparatus For Integrated Circuit Pattern Inspection With Automatically Set Inspection Areas
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
16009660
|
Filing Dt:
|
06/15/2018
|
|
Publication #:
|
|
Pub Dt:
|
01/24/2019
| | | | |
|
Title:
|
METHOD OF VISUALIZING DEFECT USING DESIGN DATA AND DEFECT DETECTION METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/24/2019
|
Application #:
|
16011006
|
Filing Dt:
|
06/18/2018
|
|
Publication #:
|
|
Pub Dt:
|
01/17/2019
| | | | |
|
Title:
|
IMAGING SYSTEM AND IMAGING METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/2020
|
Application #:
|
16013232
|
Filing Dt:
|
06/20/2018
|
|
Publication #:
|
|
Pub Dt:
|
01/24/2019
| | | | |
|
Title:
|
PATTERN DEFECT DETECTION METHOD
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
16018810
|
Filing Dt:
|
06/26/2018
|
|
Publication #:
|
|
Pub Dt:
|
01/03/2019
| | | | |
|
Title:
|
PATTERN EDGE DETECTION METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/2019
|
Application #:
|
16021017
|
Filing Dt:
|
06/28/2018
|
|
Publication #:
|
|
Pub Dt:
|
01/03/2019
| | | | |
|
Title:
|
METHOD OF VERIFYING OPERATION PARAMETER OF SCANNING ELECTRON MICROSCOPE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/2020
|
Application #:
|
16116700
|
Filing Dt:
|
08/29/2018
|
|
Publication #:
|
|
Pub Dt:
|
02/28/2019
| | | | |
|
Title:
|
IMAGE GENERATION METHOD
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|
