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Reel/Frame:052062/0224   Pages: 10
Recorded: 03/10/2020
Attorney Dkt #:13904US01
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/01/2022
Application #:
16813855
Filing Dt:
03/10/2020
Publication #:
Pub Dt:
09/24/2020
Title:
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR DETECTING A PRESENCE OF A FOCUS RING ON A STAGE
Assignors
1
Exec Dt:
03/05/2020
2
Exec Dt:
03/05/2020
3
Exec Dt:
03/05/2020
4
Exec Dt:
03/05/2020
Assignee
1
3-1, AKASAKA 5-CHOME
MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
XSENSUS LLP
200 DAINGERFIELD ROAD
SUITE 201
ALEXANDRIA, VA 22314

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