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Reel/Frame:	052259/0227			Pages:	68
		Recorded:	03/30/2020
Attorney Dkt #:	T&A-GENERAL/Z-1830(USMA)
Conveyance:	CHANGE OF NAME AND ADDRESS

Total properties: 2251
Page 3 of 23
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Patent #:	7381951	Issue Dt:	06/03/2008	Application #:	11209759	Filing Dt:	08/24/2005
Publication #:	US20060043293	Pub Dt:	03/02/2006
Title:	CHARGED PARTICLE BEAM ADJUSTMENT METHOD AND APPARATUS

Patent #:	7307253	Issue Dt:	12/11/2007	Application #:	11211650	Filing Dt:	08/26/2005
Publication #:	US20060043294	Pub Dt:	03/02/2006
Title:	SCANNING ELECTRON MICROSCOPE

Patent #:	7126140	Issue Dt:	10/24/2006	Application #:	11213750	Filing Dt:	08/30/2005
Publication #:	US20060017021	Pub Dt:	01/26/2006
Title:	MULTI-ELECTRON BEAM EXPOSURE METHOD AND APPARATUS

Patent #:	7408760	Issue Dt:	08/05/2008	Application #:	11221815	Filing Dt:	09/09/2005
Publication #:	US20060056131	Pub Dt:	03/16/2006
Title:	CHARGED PARTICLE BEAM APPLICATION SYSTEM

Patent #:	8071025	Issue Dt:	12/06/2011	Application #:	11221837	Filing Dt:	09/09/2005
Publication #:	US20060062692	Pub Dt:	03/23/2006
Title:	AUTOMATIC ANALYZER

Patent #:	7116817	Issue Dt:	10/03/2006	Application #:	11235136	Filing Dt:	09/27/2005
Publication #:	US20060018532	Pub Dt:	01/26/2006
Title:	METHOD AND APPARATUS FOR INSPECTING A SEMICONDUCTOR DEVICE

Patent #:	7456403	Issue Dt:	11/25/2008	Application #:	11240391	Filing Dt:	10/03/2005
Publication #:	US20070235645	Pub Dt:	10/11/2007
Title:	CHARGED PARTICLE BEAM DEVICE

Patent #:	7214936	Issue Dt:	05/08/2007	Application #:	11242129	Filing Dt:	10/04/2005
Publication #:	US20060071166	Pub Dt:	04/06/2006
Title:	CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD

Patent #:	7928377	Issue Dt:	04/19/2011	Application #:	11258035	Filing Dt:	10/26/2005
Publication #:	US20060097166	Pub Dt:	05/11/2006
Title:	CHARGED PARTICLE BEAM APPARATUS AND SAMPLE MANUFACTURING METHOD

Patent #:	7129727	Issue Dt:	10/31/2006	Application #:	11258041	Filing Dt:	10/26/2005
Publication #:	US20060087330	Pub Dt:	04/27/2006
Title:	DEFECT INSPECTING APPARATUS

Patent #:	7449689	Issue Dt:	11/11/2008	Application #:	11260082	Filing Dt:	10/28/2005
Publication #:	US20060108524	Pub Dt:	05/25/2006
Title:	DIMENSION MEASURING SEM SYSTEM, METHOD OF EVALUATING SHAPE OF CIRCUIT PATTERN AND A SYSTEM FOR CARRYING OUT THE METHOD

Patent #:	7593564	Issue Dt:	09/22/2009	Application #:	11272897	Filing Dt:	11/15/2005
Publication #:	US20060104500	Pub Dt:	05/18/2006
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECT OF SUBJECT TO BE INSPECTED

Patent #:	7456951	Issue Dt:	11/25/2008	Application #:	11285146	Filing Dt:	11/23/2005
Publication #:	US20060109460	Pub Dt:	05/25/2006
Title:	FLUORESCENCE DETECTION METHOD, DETECTION APPARATUS AND FLUORESCENCE DETECTION PROGRAM

Patent #:	7259866	Issue Dt:	08/21/2007	Application #:	11289394	Filing Dt:	11/30/2005
Publication #:	US20060077397	Pub Dt:	04/13/2006
Title:	SEMICONDUCTOR FABRICATING APPARATUS WITH FUNCTION OF DETERMINING ETCHING PROCESSING STATE

Patent #:	7187345	Issue Dt:	03/06/2007	Application #:	11298590	Filing Dt:	12/12/2005
Publication #:	US20070024528	Pub Dt:	02/01/2007
Title:	IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS

Patent #:	7435957	Issue Dt:	10/14/2008	Application #:	11302323	Filing Dt:	12/14/2005
Publication #:	US20060151697	Pub Dt:	07/13/2006
Title:	CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY

Patent #:	7247864	Issue Dt:	07/24/2007	Application #:	11305109	Filing Dt:	12/19/2005
Publication #:	US20070120068	Pub Dt:	05/31/2007
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	7205541	Issue Dt:	04/17/2007	Application #:	11305231	Filing Dt:	12/19/2005
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	7657078	Issue Dt:	02/02/2010	Application #:	11311254	Filing Dt:	12/20/2005
Publication #:	US20060215901	Pub Dt:	09/28/2006
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	7601252	Issue Dt:	10/13/2009	Application #:	11312550	Filing Dt:	12/21/2005
Publication #:	US20060096863	Pub Dt:	05/11/2006
Title:	MULTI-CAPILLARY ELECTROPHORESIS APPARATUS

Patent #:	7595484	Issue Dt:	09/29/2009	Application #:	11315162	Filing Dt:	12/23/2005
Publication #:	US20060169889	Pub Dt:	08/03/2006
Title:	MASS SPECTROMETRIC METHOD, MASS SPECTROMETRIC SYSTEM, DIAGNOSIS SYSTEM, INSPECTION SYSTEM, AND MASS SPECTROMETRIC PROGRAM

Patent #:	7928365	Issue Dt:	04/19/2011	Application #:	11319611	Filing Dt:	12/29/2005
Publication #:	US20060248942	Pub Dt:	11/09/2006
Title:	METHOD AND APPARATUS FOR MASS SPECTROMETRY

Patent #:	7678576	Issue Dt:	03/16/2010	Application #:	11319680	Filing Dt:	12/29/2005
Publication #:	US20060159586	Pub Dt:	07/20/2006
Title:	CHEMICAL ANALYSIS APPARATUS AND CHEMICAL ANALYSIS CARTRIDGE

Patent #:	7727472	Issue Dt:	06/01/2010	Application #:	11319977	Filing Dt:	12/29/2005
Publication #:	US20060153735	Pub Dt:	07/13/2006
Title:	CHEMICAL ANALYSIS APPARATUS AND CHEMICAL ANALYSIS CARTRIDGE

Patent #:	7166839	Issue Dt:	01/23/2007	Application #:	11320752	Filing Dt:	12/30/2005
Publication #:	US20060108526	Pub Dt:	05/25/2006
Title:	APPARATUS FOR MEASURING A THREE-DIMENSIONAL SHAPE

Patent #:	7230723	Issue Dt:	06/12/2007	Application #:	11322559	Filing Dt:	01/03/2006
Publication #:	US20060145076	Pub Dt:	07/06/2006
Title:	HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS

Patent #:	7269287	Issue Dt:	09/11/2007	Application #:	11322560	Filing Dt:	01/03/2006
Publication #:	US20070092130	Pub Dt:	04/26/2007
Title:	METHOD AND APPARATUS FOR MEASURING DIMENSION USING ELECTRON MICROSCOPE

Patent #:	7716607	Issue Dt:	05/11/2010	Application #:	11324276	Filing Dt:	01/04/2006
Publication #:	US20060145950	Pub Dt:	07/06/2006
Title:	AUTOMATIC ANALYZER

Patent #:	7319222	Issue Dt:	01/15/2008	Application #:	11325444	Filing Dt:	01/05/2006
Publication #:	US20060219896	Pub Dt:	10/05/2006
Title:	MASS SPECTROMETER AND MASS ANALYSIS METHOD

Patent #:	7453561	Issue Dt:	11/18/2008	Application #:	11325548	Filing Dt:	01/05/2006
Publication #:	US20060203231	Pub Dt:	09/14/2006
Title:	METHOD AND APPARATUS FOR INSPECTING FOREIGN PARTICLE DEFECTS

Patent #:	7253405	Issue Dt:	08/07/2007	Application #:	11328151	Filing Dt:	01/10/2006
Publication #:	US20060124847	Pub Dt:	06/15/2006
Title:	MASS ANALYSIS APPARATUS AND METHOD FOR MASS ANALYSIS

Patent #:	7227144	Issue Dt:	06/05/2007	Application #:	11328173	Filing Dt:	01/10/2006
Publication #:	US20060151701	Pub Dt:	07/13/2006
Title:	SCANNING TRANSMISSION ELECTRON MICROSCOPE AND SCANNING TRANSMISSION ELECTRON MICROSCOPY

Patent #:	8895246	Issue Dt:	11/25/2014	Application #:	11332527	Filing Dt:	01/17/2006
Publication #:	US20060223085	Pub Dt:	10/05/2006
Title:	Nucleic acid detection method

Patent #:	7889908	Issue Dt:	02/15/2011	Application #:	11335515	Filing Dt:	01/20/2006
Publication #:	US20060210143	Pub Dt:	09/21/2006
Title:	METHOD AND APPARATUS FOR MEASURING SHAPE OF A SPECIMEN

Patent #:	7982188	Issue Dt:	07/19/2011	Application #:	11336895	Filing Dt:	01/23/2006
Publication #:	US20060249676	Pub Dt:	11/09/2006
Title:	APPARATUS AND METHOD FOR WAFER PATTERN INSPECTION

Patent #:	7230252	Issue Dt:	06/12/2007	Application #:	11337444	Filing Dt:	01/24/2006
Publication #:	US20060169927	Pub Dt:	08/03/2006
Title:	ABERRATION ADJUSTING METHOD, DEVICE FABRICATION METHOD, AND CHARGED PARTICLE BEAM LITHOGRAPHY MACHINE

Patent #:	7378671	Issue Dt:	05/27/2008	Application #:	11337603	Filing Dt:	01/24/2006
Publication #:	US20060169898	Pub Dt:	08/03/2006
Title:	ABERRATION MEASURING APPARATUS FOR CHARGED PARTICLE BEAM OPTICAL SYSTEM, CHARGED PARTICLE BEAM LITHOGRAPHY MACHINE HAVING THE ABERRATION MEASURING APPARATUS, AND DEVICE FABRICATION METHOD USING THE APPARATUS

Patent #:	7683319	Issue Dt:	03/23/2010	Application #:	11338843	Filing Dt:	01/25/2006
Publication #:	US20090166557	Pub Dt:	07/02/2009
Title:	CHARGE CONTROL APPARATUS AND MEASUREMENT APPARATUS EQUIPPED WITH THE CHARGE CONTROL APPARATUS

Patent #:	7309860	Issue Dt:	12/18/2007	Application #:	11338844	Filing Dt:	01/25/2006
Publication #:	US20060169892	Pub Dt:	08/03/2006
Title:	MASS SPECTROMETER

Patent #:	7107115	Issue Dt:	09/12/2006	Application #:	11339712	Filing Dt:	01/26/2006
Publication #:	US20060129264	Pub Dt:	06/15/2006
Title:	METHOD FOR CONTROLLING SEMICONDUCTOR PROCESSING APPARATUS

Patent #:	7504624	Issue Dt:	03/17/2009	Application #:	11341663	Filing Dt:	01/30/2006
Publication #:	US20060255269	Pub Dt:	11/16/2006
Title:	CHARGED PARTICLE BEAM DEVICE

Patent #:	7594175	Issue Dt:	09/22/2009	Application #:	11348420	Filing Dt:	02/06/2006
Publication #:	US20060221096	Pub Dt:	10/05/2006
Title:	PROCESSING INSTRUMENT AND PROCESSING INSTRUMENT SYSTEM

Patent #:	7439522	Issue Dt:	10/21/2008	Application #:	11349898	Filing Dt:	02/09/2006
Publication #:	US20060197034	Pub Dt:	09/07/2006
Title:	COUNTING SYSTEM FOR FLOUESCENT MOLECULES

Patent #:	7435958	Issue Dt:	10/14/2008	Application #:	11356438	Filing Dt:	02/17/2006
Publication #:	US20060219946	Pub Dt:	10/05/2006
Title:	ELECTRON BEAM APPARATUS AND METHOD FOR PRODUCTION OF ITS SPECIMEN CHAMBER

Patent #:	7483136	Issue Dt:	01/27/2009	Application #:	11356875	Filing Dt:	02/16/2006
Publication #:	US20070053186	Pub Dt:	03/08/2007
Title:	REFRACTIVE INDEX MATCHING IN CAPILLARY ILLUMINATION

Patent #:	7446313	Issue Dt:	11/04/2008	Application #:	11357020	Filing Dt:	02/21/2006
Publication #:	US20060188216	Pub Dt:	08/24/2006
Title:	SCANNING ELECTRON MICROSCOPE

Patent #:	7518110	Issue Dt:	04/14/2009	Application #:	11359374	Filing Dt:	02/23/2006
Publication #:	US20060193508	Pub Dt:	08/31/2006
Title:	PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

Patent #:	7353076	Issue Dt:	04/01/2008	Application #:	11362012	Filing Dt:	02/27/2006
Publication #:	US20070100488	Pub Dt:	05/03/2007
Title:	VACUUM PROCESSING METHOD AND VACUUM PROCESSING APPARATUS

Patent #:	8088247	Issue Dt:	01/03/2012	Application #:	11371921	Filing Dt:	03/10/2006
Publication #:	US20070202613	Pub Dt:	08/30/2007
Title:	PLASMA PROCESSING APPARATUS

Patent #:	7250601	Issue Dt:	07/31/2007	Application #:	11372057	Filing Dt:	03/10/2006
Publication #:	US20060163479	Pub Dt:	07/27/2006
Title:	ENERGY SPECTRUM MEASURING APPARATUS, ELECTRON ENERGY LOSS SPECTROMETER, ELECTRON MICROSCOPE PROVIDED THEREWITH, AND ELECTRON ENERGY LOSS SPECTRUM MEASURING METHOD

Patent #:	7473342	Issue Dt:	01/06/2009	Application #:	11395158	Filing Dt:	04/03/2006
Publication #:	US20060219559	Pub Dt:	10/05/2006
Title:	CAPILLARY ARRAY AND CAPILLARY ELECTROPHORESIS APPARATUS

Patent #:	7375330	Issue Dt:	05/20/2008	Application #:	11396654	Filing Dt:	04/04/2006
Publication #:	US20060219908	Pub Dt:	10/05/2006
Title:	CHARGED PARTICLE BEAM EQUIPMENT

Patent #:	7372283	Issue Dt:	05/13/2008	Application #:	11397677	Filing Dt:	04/05/2006
Publication #:	US20060192574	Pub Dt:	08/31/2006
Title:	PROBE NAVIGATION METHOD AND DEVICE AND DEFECT INSPECTION DEVICE

Patent #:	7442929	Issue Dt:	10/28/2008	Application #:	11397812	Filing Dt:	04/05/2006
Publication #:	US20060226362	Pub Dt:	10/12/2006
Title:	SCANNING ELECTRON MICROSCOPE

Patent #:	8545686	Issue Dt:	10/01/2013	Application #:	11397890	Filing Dt:	04/05/2006
Publication #:	US20060231400	Pub Dt:	10/19/2006
Title:	ELECTROPHORETIC APPARATUS AND ELECTROPHORETIC METHOD

Patent #:	7288763	Issue Dt:	10/30/2007	Application #:	11405456	Filing Dt:	04/18/2006
Publication #:	US20060192119	Pub Dt:	08/31/2006
Title:	METHOD OF MEASUREMENT ACCURACY IMPROVEMENT BY CONTROL OF PATTERN SHRINKAGE

Patent #:	7526143	Issue Dt:	04/28/2009	Application #:	11411154	Filing Dt:	04/26/2006
Publication #:	US20060243905	Pub Dt:	11/02/2006
Title:	IMAGING METHOD

Patent #:	7462828	Issue Dt:	12/09/2008	Application #:	11412976	Filing Dt:	04/28/2006
Publication #:	US20060243906	Pub Dt:	11/02/2006
Title:	INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

Patent #:	7476850	Issue Dt:	01/13/2009	Application #:	11431656	Filing Dt:	05/11/2006
Publication #:	US20060289739	Pub Dt:	12/28/2006
Title:	METHOD AND ITS APPARATUS FOR MASS SPECTROMETRY

Patent #:	7476882	Issue Dt:	01/13/2009	Application #:	11431705	Filing Dt:	05/11/2006
Publication #:	US20060255272	Pub Dt:	11/16/2006
Title:	CALIBRATION METHOD FOR ELECTRON-BEAM SYSTEM AND ELECTRON-BEAM SYSTEM

Patent #:	7435949	Issue Dt:	10/14/2008	Application #:	11439949	Filing Dt:	05/25/2006
Publication #:	US20060289735	Pub Dt:	12/28/2006
Title:	MASS SPECTROMETRIC ANALYSIS METHOD AND SYSTEM USING THE METHOD

Patent #:	7482603	Issue Dt:	01/27/2009	Application #:	11441016	Filing Dt:	05/26/2006
Publication #:	US20060284112	Pub Dt:	12/21/2006
Title:	APPARATUS AND METHOD FOR SPECIMEN FABRICATION

Patent #:	7691625	Issue Dt:	04/06/2010	Application #:	11441235	Filing Dt:	05/26/2006
Publication #:	US20060281172	Pub Dt:	12/14/2006
Title:	CELL CULTUREL VESSEL, PRODUCTION PROCESS THEREOF AND CULTURED CELL

Patent #:	7485852	Issue Dt:	02/03/2009	Application #:	11442113	Filing Dt:	05/30/2006
Publication #:	US20060289736	Pub Dt:	12/28/2006
Title:	MASS ANALYSIS METHOD AND MASS ANALYSIS APPARATUS

Patent #:	7566870	Issue Dt:	07/28/2009	Application #:	11446141	Filing Dt:	06/05/2006
Publication #:	US20060289743	Pub Dt:	12/28/2006
Title:	MASS SPECTROMETER

Patent #:	8216420	Issue Dt:	07/10/2012	Application #:	11447011	Filing Dt:	06/06/2006
Publication #:	US20060283550	Pub Dt:	12/21/2006
Title:	PLASMA PROCESSING APPARATUS

Patent #:	7259570	Issue Dt:	08/21/2007	Application #:	11447086	Filing Dt:	06/06/2006
Title:	MAGNETIC SIGNAL MEASUREMENT APPARATUS

Patent #:	7547884	Issue Dt:	06/16/2009	Application #:	11449650	Filing Dt:	06/09/2006
Publication #:	US20070085005	Pub Dt:	04/19/2007
Title:	PATTERN DEFECT INSPECTION METHOD AND APPARATUS THEREOF

Patent #:	7205550	Issue Dt:	04/17/2007	Application #:	11450382	Filing Dt:	06/12/2006
Publication #:	US20060232445	Pub Dt:	10/19/2006
Title:	ELECTRON BEAM APPARATUS AND METHOD FOR PRODUCTION OF ITS SPECIMEN CHAMBER

Patent #:	7411190	Issue Dt:	08/12/2008	Application #:	11450459	Filing Dt:	06/12/2006
Publication #:	US20060231758	Pub Dt:	10/19/2006
Title:	INSPECTION SYSTEM, INSPECTION METHOD, AND PROCESS MANAGEMENT METHOD

Patent #:	7664562	Issue Dt:	02/16/2010	Application #:	11451330	Filing Dt:	06/13/2006
Publication #:	US20060282190	Pub Dt:	12/14/2006
Title:	AUTOMATIC DEFECT REVIEW AND CLASSIFICATION SYSTEM

Patent #:	7507961	Issue Dt:	03/24/2009	Application #:	11453229	Filing Dt:	06/15/2006
Publication #:	US20070023653	Pub Dt:	02/01/2007
Title:	METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPECTION SYSTEM USING THE SAME

Patent #:	8027527	Issue Dt:	09/27/2011	Application #:	11472368	Filing Dt:	06/22/2006
Publication #:	US20060238755	Pub Dt:	10/26/2006
Title:	METHOD FOR ANALYZING DEFECT DATA AND INSPECTION APPARATUS AND REVIEW SYSTEM

Patent #:	7378668	Issue Dt:	05/27/2008	Application #:	11475014	Filing Dt:	06/27/2006
Publication #:	US20060289781	Pub Dt:	12/28/2006
Title:	METHOD AND APPARATUS FOR APPLYING CHARGED PARTICLE BEAM

Patent #:	7385194	Issue Dt:	06/10/2008	Application #:	11475934	Filing Dt:	06/28/2006
Publication #:	US20070023654	Pub Dt:	02/01/2007
Title:	CHARGED PARTICLE BEAM APPLICATION SYSTEM

Patent #:	7851753	Issue Dt:	12/14/2010	Application #:	11478618	Filing Dt:	07/03/2006
Publication #:	US20070057184	Pub Dt:	03/15/2007
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	7368729	Issue Dt:	05/06/2008	Application #:	11480975	Filing Dt:	07/06/2006
Publication #:	US20060249697	Pub Dt:	11/09/2006
Title:	METHOD, APPARATUS AND SYSTEM FOR SPECIMEN FABRICATION BY USING AN ION BEAM

Patent #:	7916926	Issue Dt:	03/29/2011	Application #:	11482089	Filing Dt:	07/07/2006
Publication #:	US20070024643	Pub Dt:	02/01/2007
Title:	SEMICONDUCTOR INSPECTION APPARATUS

Patent #:	7482586	Issue Dt:	01/27/2009	Application #:	11482094	Filing Dt:	07/07/2006
Publication #:	US20070023651	Pub Dt:	02/01/2007
Title:	METHODS FOR SAMPLE PREPARATION AND OBSERVATION, CHARGED PARTICLE APPARATUS

Patent #:	7355393	Issue Dt:	04/08/2008	Application #:	11485983	Filing Dt:	07/14/2006
Publication #:	US20070013369	Pub Dt:	01/18/2007
Title:	MAGNETIC HEAD SLIDER TESTING APPARATUS AND MAGNETIC HEAD SLIDER TESTING METHOD

Patent #:	7474394	Issue Dt:	01/06/2009	Application #:	11488622	Filing Dt:	07/19/2006
Publication #:	US20070019185	Pub Dt:	01/25/2007
Title:	APPARATUS OF INSPECTING DEFECT IN SEMICONDUCTOR AND METHOD OF THE SAME

Patent #:	7873202	Issue Dt:	01/18/2011	Application #:	11488636	Filing Dt:	07/19/2006
Publication #:	US20070031026	Pub Dt:	02/08/2007
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS OF SEMICONDUCTOR DEVICE

Patent #:	7329862	Issue Dt:	02/12/2008	Application #:	11495534	Filing Dt:	07/31/2006
Publication #:	US20060284072	Pub Dt:	12/21/2006
Title:	MASS SPECTROMETER

Patent #:	7531816	Issue Dt:	05/12/2009	Application #:	11497244	Filing Dt:	08/02/2006
Publication #:	US20070029504	Pub Dt:	02/08/2007
Title:	VACUUM CONVEYING APPARATUS AND CHARGED PARTICLE BEAM EQUIPMENT WITH THE SAME

Patent #:	7348559	Issue Dt:	03/25/2008	Application #:	11498125	Filing Dt:	08/03/2006
Publication #:	US20060284087	Pub Dt:	12/21/2006
Title:	DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS

Patent #:	8151190	Issue Dt:	04/03/2012	Application #:	11498900	Filing Dt:	08/04/2006
Publication #:	US20070038411	Pub Dt:	02/15/2007
Title:	ANALYSIS DEVICE

Patent #:	7355177	Issue Dt:	04/08/2008	Application #:	11499640	Filing Dt:	08/07/2006
Publication #:	US20060284093	Pub Dt:	12/21/2006
Title:	ELECTRON BEAM DEVICE

Patent #:	7567343	Issue Dt:	07/28/2009	Application #:	11500421	Filing Dt:	08/08/2006
Publication #:	US20070070337	Pub Dt:	03/29/2007
Title:	METHOD AND APPARATUS FOR DETECTING DEFECTS ON A WAFER

Patent #:	7881520	Issue Dt:	02/01/2011	Application #:	11501815	Filing Dt:	08/10/2006
Publication #:	US20070053581	Pub Dt:	03/08/2007
Title:	DEFECT INSPECTION SYSTEM

Patent #:	7420668	Issue Dt:	09/02/2008	Application #:	11501922	Filing Dt:	08/10/2006
Publication #:	US20070182957	Pub Dt:	08/09/2007
Title:	WAFER SURFACE INSPECTION APPARATUS AND WAFER SURFACE INSPECTION METHOD

Patent #:	7655906	Issue Dt:	02/02/2010	Application #:	11503997	Filing Dt:	08/15/2006
Publication #:	US20070040118	Pub Dt:	02/22/2007
Title:	METHOD AND APPARATUS FOR SCANNING AND MEASUREMENT BY ELECTRON BEAM

Patent #:	8926790	Issue Dt:	01/06/2015	Application #:	11508187	Filing Dt:	08/23/2006
Publication #:	US20070044716	Pub Dt:	03/01/2007
Title:	PLASMA PROCESSING APPARATUS

Patent #:	7381948	Issue Dt:	06/03/2008	Application #:	11508323	Filing Dt:	08/23/2006
Publication #:	US20070069123	Pub Dt:	03/29/2007
Title:	MASS SPECTROSCOPE AND METHOD OF CALIBRATING THE SAME

Patent #:	7838792	Issue Dt:	11/23/2010	Application #:	11512118	Filing Dt:	08/30/2006
Publication #:	US20080023448	Pub Dt:	01/31/2008
Title:	PLASMA PROCESSING APPARATUS CAPABLE OF ADJUSTING TEMPERATURE OF SAMPLE STAND

Patent #:	7616298	Issue Dt:	11/10/2009	Application #:	11513373	Filing Dt:	08/31/2006
Publication #:	US20080056711	Pub Dt:	03/06/2008
Title:	DISK TRANSFER MECHANISM, AND DISK INSPECTION APPARATUS AND DISK INSPECTION METHOD USING THE SAME

Patent #:	8246907	Issue Dt:	08/21/2012	Application #:	11514185	Filing Dt:	09/01/2006
Publication #:	US20070053793	Pub Dt:	03/08/2007
Title:	AUTOMATIC ANALYZER

Patent #:	7397025	Issue Dt:	07/08/2008	Application #:	11517334	Filing Dt:	09/08/2006
Publication #:	US20070023648	Pub Dt:	02/01/2007
Title:	MASS SPECTROMETER

Patent #:	8600689	Issue Dt:	12/03/2013	Application #:	11518176	Filing Dt:	09/11/2006
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Title:	AUTOMATC ANALYZER

Patent #:	7635851	Issue Dt:	12/22/2009	Application #:	11519872	Filing Dt:	09/13/2006
Publication #:	US20070057200	Pub Dt:	03/15/2007
Title:	ELECTRON BEAM APPARATUS AND METHOD OF GENERATING AN ELECTRON BEAM IRRADIATION PATTERN

100

Patent #:	8094920	Issue Dt:	01/10/2012	Application #:	11520800	Filing Dt:	09/14/2006
Publication #:	US20070092129	Pub Dt:	04/26/2007
Title:	SYSTEM AND METHOD OF IMAGE PROCESSING, AND SCANNING ELECTRON MICROSCOPE

Assignor

HITACHI HIGH-TECHNOLOGIES CORPORATION

Exec Dt:

02/12/2020

Assignee

HITACHI HIGH-TECH CORPORATION

17-1, TORANOMON 1-CHOME, MINATO-KU

TOKYO, JAPAN

Correspondence name and address
	MATTINGLY & MALUR PC
	1800 DIAGONAL ROAD
	SUITE 210
	ALEXANDRIA, VA 22314

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