Patent Assignment Details
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| Reel/Frame: | 052566/0301 | |
| Pages: | 6 |
| | Recorded: | 05/04/2020 | | |
| Attorney Dkt #: | XA-13395 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/23/2021
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Application #:
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16055057
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Filing Dt:
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08/04/2018
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Publication #:
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Pub Dt:
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02/14/2019
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS, FILM-FORMING METHOD USING ATOMIC LAYER DEPOSITION APPARATUS, AND CLEANING METHOD OF ATOMIC LAYER DEPOSITION APPARATUS
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Assignee
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| 11-1, OSAKI 1-CHOME |
| SHINAGAWA-KU, TOKYO, JAPAN 141-0032 |
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Correspondence name and address
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MITCHELL W. SHAPIRO
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1701 PENNSYLVANIA AVENUE, NW
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SUITE 200
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WASHINGTON, DC 20006
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