Patent Assignment Details
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| Reel/Frame: | 052664/0517 | |
| Pages: | 8 |
| | Recorded: | 05/14/2020 | | |
| Attorney Dkt #: | Q251901 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/08/2022
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Application #:
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16741060
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Filing Dt:
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01/13/2020
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Publication #:
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Pub Dt:
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07/30/2020
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Title:
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FILM FORMATION APPARATUS CONFIGURED TO SUPPLY MIST OF A SOLUTION TO SURFACE OF A SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE FILM FORMATION APPARATUS
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Assignees
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| 1, TOYOTA-CHO |
| TOYOTA-SHI, AICHI, JAPAN 4718571 |
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| 1, MATSUGASAKI HASHIKAMI-CHO, SAKYO-KU |
| KYOTO-SHI, KYOTO, JAPAN 6068585 |
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Correspondence name and address
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SUGHRUE MION, PLLC
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2000 PENNSYLVANIA AVENUE, N.W.
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SUITE 900
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WASHINGTON, DC 20006
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