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Reel/Frame:052733/0287   Pages: 11
Recorded: 05/22/2020
Attorney Dkt #:MAPS-62715
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/26/2023
Application #:
16881306
Filing Dt:
05/22/2020
Publication #:
Pub Dt:
12/03/2020
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Assignors
1
Exec Dt:
05/07/2020
2
Exec Dt:
04/11/2020
3
Exec Dt:
05/14/2020
4
Exec Dt:
05/08/2020
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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