Patent Assignment Details
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| Reel/Frame: | 053229/0078 | |
| Pages: | 13 |
| | Recorded: | 07/16/2020 | | |
| Attorney Dkt #: | HITACHI13-0002997US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/2022
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Application #:
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16878242
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Filing Dt:
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05/19/2020
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Publication #:
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Pub Dt:
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11/26/2020
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF PROCESSING SUBSTRATE
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Assignee
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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VOLPE AND KOENIG P.C.
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30 SOUTH 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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