Patent Assignment Details
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| Reel/Frame: | 053493/0467 | |
| Pages: | 7 |
| | Recorded: | 08/14/2020 | | |
| Attorney Dkt #: | 529398US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/16/2023
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Application #:
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16819348
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Filing Dt:
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03/16/2020
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Publication #:
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Pub Dt:
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01/21/2021
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Title:
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ETCHING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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| 1-21, SHIBAURA 3-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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OBLON, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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05/06/2024 11:59 PM
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