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Reel/Frame:053568/0513   Pages: 2
Recorded: 08/20/2020
Attorney Dkt #:T3309-23783US01
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
16971449
Filing Dt:
08/20/2020
Publication #:
Pub Dt:
03/18/2021
Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS
Assignors
1
Exec Dt:
07/13/2020
2
Exec Dt:
07/13/2020
3
Exec Dt:
07/14/2020
4
Exec Dt:
07/14/2020
Assignee
1
17-1, TORANOMON 1-CHOME
MINATO-KU, TOKYO, JAPAN
Correspondence name and address
MILES & STOCKBRIDGE, P.C.
1751 PINNACLE DR.
SUITE 1500
TYSON'S CORNER, VA 22102

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