Patent Assignment Details
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| Reel/Frame: | 054075/0877 | |
| Pages: | 6 |
| | Recorded: | 10/16/2020 | | |
| Attorney Dkt #: | HITACHI18-0002106US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/02/2021
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Application #:
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16887527
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Filing Dt:
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05/29/2020
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Publication #:
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Pub Dt:
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09/17/2020
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 15-12, NISHI-SHIMBASHI 2-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 1058039 |
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Correspondence name and address
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VOLPE KOENIG
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30 SOUTH 17TH STREET
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UNITED PLAZA, SUITE 1800
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PHILADELPHIA, PA 19103
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