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Reel/Frame:054100/0167   Pages: 17
Recorded: 10/19/2020
Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 40
1
Patent #:
10431469
Issue Dt:
10/01/2019
Application #:
14406256
Filing Dt:
12/08/2014
Publication #:
US20150144155
Pub Dt:
05/28/2015
Title:
METHOD FOR HIGH ASPECT RATIO PHOTORESIST REMOVAL IN PURE REDUCING PLASMA
2
Patent #:
10727140
Issue Dt:
07/28/2020
Application #:
15377121
Filing Dt:
12/13/2016
Publication #:
US20170194220
Pub Dt:
07/06/2017
Title:
Preheat Processes for Millisecond Anneal System
3
Patent #:
10734262
Issue Dt:
08/04/2020
Application #:
15378509
Filing Dt:
12/14/2016
Publication #:
US20170194178
Pub Dt:
07/06/2017
Title:
SUBSTRATE SUPPORT IN A MILLISECOND ANNEAL SYSTEM
4
Patent #:
10770309
Issue Dt:
09/08/2020
Application #:
15378580
Filing Dt:
12/14/2016
Publication #:
US20170194163
Pub Dt:
07/06/2017
Title:
Features for Improving Process Uniformity in a Millisecond Anneal System
5
Patent #:
10580661
Issue Dt:
03/03/2020
Application #:
15582896
Filing Dt:
05/01/2017
Publication #:
US20180166296
Pub Dt:
06/14/2018
Title:
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
6
Patent #:
10599039
Issue Dt:
03/24/2020
Application #:
15597283
Filing Dt:
05/17/2017
Publication #:
US20180074409
Pub Dt:
03/15/2018
Title:
Strip Process for High Aspect Ratio Structure
7
Patent #:
10580672
Issue Dt:
03/03/2020
Application #:
15726437
Filing Dt:
10/06/2017
Publication #:
US20180108548
Pub Dt:
04/19/2018
Title:
Systems and Methods for Workpiece Processing
8
Patent #:
10790119
Issue Dt:
09/29/2020
Application #:
15851922
Filing Dt:
12/22/2017
Publication #:
US20180358208
Pub Dt:
12/13/2018
Title:
Plasma Processing Apparatus With Post Plasma Gas Injection
9
Patent #:
10760976
Issue Dt:
09/01/2020
Application #:
15951291
Filing Dt:
04/12/2018
Publication #:
US20190316972
Pub Dt:
10/17/2019
Title:
Thermal Imaging Of Heat Sources In Thermal Processing Systems
10
Patent #:
10804109
Issue Dt:
10/13/2020
Application #:
15958635
Filing Dt:
04/20/2018
Publication #:
US20190103270
Pub Dt:
04/04/2019
Title:
SURFACE TREATMENT OF SILICON AND CARBON CONTAINING FILMS BY REMOTE PLASMA WITH ORGANIC PRECURSORS
11
Patent #:
10573532
Issue Dt:
02/25/2020
Application #:
16020178
Filing Dt:
06/27/2018
Publication #:
US20190385862
Pub Dt:
12/19/2019
Title:
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
12
Patent #:
11251075
Issue Dt:
02/15/2022
Application #:
16055685
Filing Dt:
08/06/2018
Publication #:
US20200043775
Pub Dt:
02/06/2020
Title:
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
13
Patent #:
11083340
Issue Dt:
08/10/2021
Application #:
16245937
Filing Dt:
01/11/2019
Publication #:
US20210204760
Pub Dt:
07/08/2021
Title:
Multi-Function Fixture for a Lavatory System
14
Patent #:
NONE
Issue Dt:
Application #:
16245973
Filing Dt:
01/11/2019
Publication #:
US20200227239
Pub Dt:
07/16/2020
Title:
Electrostatic Shield for Inductive Plasma Sources
15
Patent #:
11039527
Issue Dt:
06/15/2021
Application #:
16258744
Filing Dt:
01/28/2019
Publication #:
US20200245444
Pub Dt:
07/30/2020
Title:
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
16
Patent #:
11521868
Issue Dt:
12/06/2022
Application #:
16356074
Filing Dt:
03/18/2019
Publication #:
US20190295869
Pub Dt:
09/26/2019
Title:
Support Plate for Localized Heating in Thermal Processing Systems
17
Patent #:
10910228
Issue Dt:
02/02/2021
Application #:
16357800
Filing Dt:
03/19/2019
Publication #:
US20190214262
Pub Dt:
07/11/2019
Title:
SURFACE TREATMENT OF CARBON CONTAINING FILMS USING ORGANIC RADICALS
18
Patent #:
10679864
Issue Dt:
06/09/2020
Application #:
16364568
Filing Dt:
03/26/2019
Publication #:
US20190221442
Pub Dt:
07/18/2019
Title:
Pre-Heat Processes for Millisecond Anneal System
19
Patent #:
11195732
Issue Dt:
12/07/2021
Application #:
16376031
Filing Dt:
04/05/2019
Publication #:
US20190318947
Pub Dt:
10/17/2019
Title:
Low Thermal Budget Annealing
20
Patent #:
11387111
Issue Dt:
07/12/2022
Application #:
16379912
Filing Dt:
04/10/2019
Publication #:
US20190318937
Pub Dt:
10/17/2019
Title:
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
21
Patent #:
11586113
Issue Dt:
02/21/2023
Application #:
16402405
Filing Dt:
05/03/2019
Publication #:
US20190384178
Pub Dt:
12/19/2019
Title:
METHODS AND APPARATUS FOR POST EXPOSURE BAKE PROCESSING OF A WORKPIECE
22
Patent #:
10872761
Issue Dt:
12/22/2020
Application #:
16403722
Filing Dt:
05/06/2019
Publication #:
US20190393027
Pub Dt:
12/26/2019
Title:
Post Etch Defluorination Process
23
Patent #:
11164725
Issue Dt:
11/02/2021
Application #:
16420542
Filing Dt:
05/23/2019
Publication #:
US20190378692
Pub Dt:
12/12/2019
Title:
Generation of Hydrogen Reactive Species For Processing of Workpieces
24
Patent #:
11062910
Issue Dt:
07/13/2021
Application #:
16444146
Filing Dt:
06/18/2019
Publication #:
US20190304793
Pub Dt:
10/03/2019
Title:
SURFACE TREATMENT OF SILICON OR SILICON GERMANIUM SURFACES USING ORGANIC RADICALS
25
Patent #:
NONE
Issue Dt:
Application #:
16508429
Filing Dt:
07/11/2019
Publication #:
US20200064198
Pub Dt:
02/27/2020
Title:
Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures
26
Patent #:
10964528
Issue Dt:
03/30/2021
Application #:
16522193
Filing Dt:
07/25/2019
Publication #:
US20200185216
Pub Dt:
06/11/2020
Title:
Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication
27
Patent #:
NONE
Issue Dt:
Application #:
16534149
Filing Dt:
08/07/2019
Publication #:
US20200075313
Pub Dt:
03/05/2020
Title:
Oxide Removal From Titanium Nitride Surfaces
28
Patent #:
10692730
Issue Dt:
06/23/2020
Application #:
16557346
Filing Dt:
08/30/2019
Title:
SILICON OXIDE SELECTIVE DRY ETCH PROCESS
29
Patent #:
11107693
Issue Dt:
08/31/2021
Application #:
16587439
Filing Dt:
09/30/2019
Publication #:
US20200098576
Pub Dt:
03/26/2020
Title:
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
30
Patent #:
11495456
Issue Dt:
11/08/2022
Application #:
16589270
Filing Dt:
10/01/2019
Publication #:
US20200118813
Pub Dt:
04/16/2020
Title:
Ozone for Selective Hydrophilic Surface Treatment
31
Patent #:
NONE
Issue Dt:
Application #:
16598423
Filing Dt:
10/10/2019
Publication #:
US20200135554
Pub Dt:
04/30/2020
Title:
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
32
Patent #:
11264249
Issue Dt:
03/01/2022
Application #:
16713281
Filing Dt:
12/13/2019
Publication #:
US20200194277
Pub Dt:
06/18/2020
Title:
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
33
Patent #:
11387115
Issue Dt:
07/12/2022
Application #:
16716585
Filing Dt:
12/17/2019
Publication #:
US20200203182
Pub Dt:
06/25/2020
Title:
SILICON MANDREL ETCH AFTER NATIVE OXIDE PUNCH-THROUGH
34
Patent #:
11107695
Issue Dt:
08/31/2021
Application #:
16718356
Filing Dt:
12/18/2019
Publication #:
US20200203173
Pub Dt:
06/25/2020
Title:
Surface Smoothing of Workpieces
35
Patent #:
NONE
Issue Dt:
Application #:
16744244
Filing Dt:
01/16/2020
Publication #:
US20200243305
Pub Dt:
07/30/2020
Title:
Post Plasma Gas Injection In A Separation Grid
36
Patent #:
11043393
Issue Dt:
06/22/2021
Application #:
16744403
Filing Dt:
01/16/2020
Publication #:
US20200234969
Pub Dt:
07/23/2020
Title:
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
37
Patent #:
11764072
Issue Dt:
09/19/2023
Application #:
16798732
Filing Dt:
02/24/2020
Publication #:
US20200234983
Pub Dt:
07/23/2020
Title:
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
38
Patent #:
11699603
Issue Dt:
07/11/2023
Application #:
16812526
Filing Dt:
03/09/2020
Publication #:
US20200294826
Pub Dt:
09/17/2020
Title:
Thermal Processing System With Temperature Non-Uniformity Control
39
Patent #:
10901321
Issue Dt:
01/26/2021
Application #:
16822747
Filing Dt:
03/18/2020
Publication #:
US20200218158
Pub Dt:
07/09/2020
Title:
Strip Process for High Aspect Ratio Structure
40
Patent #:
11101142
Issue Dt:
08/24/2021
Application #:
16893515
Filing Dt:
06/05/2020
Publication #:
US20200303206
Pub Dt:
09/24/2020
Title:
Pre-Heat Processes for Millisecond Anneal System
Assignor
1
MATTSON TECHNOLOGY, INC.
Exec Dt:
08/21/2018
Assignee
1
EAST WEST BANK
2350 MISSION COLLEGE BLVD., SUITE 988
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
PATTY CHENG
2625 MIDDLEFIELD RD., #215
PALO ALTO, CA 94306

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