Patent Assignment Details
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| Reel/Frame: | 054103/0984 | |
| Pages: | 4 |
| | Recorded: | 10/20/2020 | | |
| Attorney Dkt #: | 101928-030000 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17070735
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Filing Dt:
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10/14/2020
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Publication #:
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Pub Dt:
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04/22/2021
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Title:
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ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, AND PLASMA PROCESSING APPARATUS
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Assignee
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| 188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG |
| SHANGHAI, CHINA 201201 |
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Correspondence name and address
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WOMBLE BOND DICKINSON (US) LLP
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ATTN: IP DOCKETING
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P.O. BOX 7037
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ATLANTA, GA 30537-7037
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