Patent Assignment Details
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| Reel/Frame: | 054322/0106 | |
| Pages: | 4 |
| | Recorded: | 11/10/2020 | | |
| Attorney Dkt #: | 80042-024756U1CON-1149915 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/26/2021
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Application #:
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16537048
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Filing Dt:
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08/09/2019
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Publication #:
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Pub Dt:
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11/28/2019
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Title:
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SYSTEMS AND METHODS FOR RADIAL AND AZIMUTHAL CONTROL OF PLASMA UNIFORMITY
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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KILPATRICK TOWNSEND & STOCKTON LLP/AMAT
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1100 PEACHTREE STREET
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SUITE 2800
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ATLANTA, GA 30309
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